8/6/2010	7:33:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	7:33:09 AM	Recipe started at 7:33 AM
8/6/2010	7:33:09 AM	H2 valve closed
8/6/2010	7:33:09 AM	BCl3 valve closed
8/6/2010	7:33:09 AM	PH3 valve closed
8/6/2010	7:33:09 AM	SiCl4 pre valve closed
8/6/2010	7:33:09 AM	SiCl4 post valve closed
8/6/2010	7:33:09 AM	Main Vac valve closed
8/6/2010	7:33:09 AM	Bypass valve closed
8/6/2010	7:33:09 AM	Bubbler valve closed
8/6/2010	7:33:09 AM	Helium valve opened
8/6/2010	7:33:09 AM	Helium MFC set to  500.000000
8/6/2010	7:33:09 AM	H2 MFC set to  0.000000
8/6/2010	7:33:09 AM	BCl3 MFC set to  0.000000
8/6/2010	7:33:09 AM	PHl3 MFC set to  0.000000
8/6/2010	7:33:09 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:33:09 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:33:09 AM	Tube furnace set to 0
8/6/2010	7:41:45 AM	Helium valve closed
8/6/2010	7:41:45 AM	H2 valve closed
8/6/2010	7:41:45 AM	BCl3 valve closed
8/6/2010	7:41:45 AM	PH3 valve closed
8/6/2010	7:41:45 AM	SiCl4 pre valve closed
8/6/2010	7:41:45 AM	SiCl4 post valve closed
8/6/2010	7:41:45 AM	Main Vac valve closed
8/6/2010	7:41:45 AM	Bypass valve closed
8/6/2010	7:41:45 AM	Bubbler valve closed
8/6/2010	7:41:45 AM	Helium MFC set to  0.000000
8/6/2010	7:41:45 AM	H2 MFC set to  0.000000
8/6/2010	7:41:45 AM	BCl3 MFC set to  0.000000
8/6/2010	7:41:46 AM	PHl3 MFC set to  0.000000
8/6/2010	7:41:46 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:41:46 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:41:46 AM	Tube furnace set to 0
8/6/2010	7:41:46 AM	Run finished at 7:41 AM
8/6/2010	7:41:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	7:42:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/6/2010	7:42:35 AM	Recipe started at 7:42 AM
8/6/2010	7:42:35 AM	H2 valve closed
8/6/2010	7:42:35 AM	BCl3 valve closed
8/6/2010	7:42:35 AM	PH3 valve closed
8/6/2010	7:42:35 AM	SiCl4 pre valve closed
8/6/2010	7:42:35 AM	SiCl4 post valve closed
8/6/2010	7:42:35 AM	Main Vac valve closed
8/6/2010	7:42:35 AM	Bypass valve closed
8/6/2010	7:42:35 AM	Bubbler valve closed
8/6/2010	7:42:35 AM	Helium valve opened
8/6/2010	7:42:35 AM	Helium MFC set to  500.000000
8/6/2010	7:42:35 AM	H2 MFC set to  0.000000
8/6/2010	7:42:35 AM	BCl3 MFC set to  0.000000
8/6/2010	7:42:35 AM	PHl3 MFC set to  0.000000
8/6/2010	7:42:35 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:42:35 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:42:35 AM	Tube furnace set to 0
8/6/2010	7:42:38 AM	Helium valve closed
8/6/2010	7:42:38 AM	H2 valve closed
8/6/2010	7:42:38 AM	BCl3 valve closed
8/6/2010	7:42:38 AM	PH3 valve closed
8/6/2010	7:42:38 AM	SiCl4 pre valve closed
8/6/2010	7:42:38 AM	SiCl4 post valve closed
8/6/2010	7:42:38 AM	Main Vac valve closed
8/6/2010	7:42:38 AM	Bypass valve closed
8/6/2010	7:42:38 AM	Bubbler valve closed
8/6/2010	7:42:38 AM	Helium MFC set to  0.000000
8/6/2010	7:42:38 AM	H2 MFC set to  0.000000
8/6/2010	7:42:38 AM	BCl3 MFC set to  0.000000
8/6/2010	7:42:38 AM	PHl3 MFC set to  0.000000
8/6/2010	7:42:38 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:42:38 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:42:38 AM	Tube furnace set to 0
8/6/2010	7:42:53 AM	Helium valve closed
8/6/2010	7:42:53 AM	H2 valve closed
8/6/2010	7:42:53 AM	BCl3 valve closed
8/6/2010	7:42:53 AM	PH3 valve closed
8/6/2010	7:42:53 AM	SiCl4 pre valve closed
8/6/2010	7:42:53 AM	SiCl4 post valve closed
8/6/2010	7:42:53 AM	Main Vac valve closed
8/6/2010	7:42:53 AM	Bubbler valve closed
8/6/2010	7:42:53 AM	Bypass valve opened
8/6/2010	7:42:53 AM	Helium MFC set to  0.000000
8/6/2010	7:42:53 AM	H2 MFC set to  0.000000
8/6/2010	7:42:53 AM	BCl3 MFC set to  0.000000
8/6/2010	7:42:53 AM	PHl3 MFC set to  0.000000
8/6/2010	7:42:53 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:42:53 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:42:53 AM	Tube furnace set to 0
8/6/2010	7:46:34 AM	Helium valve closed
8/6/2010	7:46:34 AM	H2 valve closed
8/6/2010	7:46:34 AM	BCl3 valve closed
8/6/2010	7:46:34 AM	PH3 valve closed
8/6/2010	7:46:34 AM	SiCl4 pre valve closed
8/6/2010	7:46:34 AM	SiCl4 post valve closed
8/6/2010	7:46:34 AM	Bubbler valve closed
8/6/2010	7:46:34 AM	Main Vac valve opened
8/6/2010	7:46:34 AM	Bypass valve opened
8/6/2010	7:46:34 AM	Helium MFC set to  0.000000
8/6/2010	7:46:34 AM	H2 MFC set to  0.000000
8/6/2010	7:46:34 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:34 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:34 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:34 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:34 AM	Tube furnace set to 0
8/6/2010	7:46:34 AM	H2 valve closed
8/6/2010	7:46:34 AM	BCl3 valve closed
8/6/2010	7:46:34 AM	PH3 valve closed
8/6/2010	7:46:34 AM	SiCl4 pre valve closed
8/6/2010	7:46:34 AM	SiCl4 post valve closed
8/6/2010	7:46:34 AM	Main Vac valve closed
8/6/2010	7:46:34 AM	Bypass valve closed
8/6/2010	7:46:34 AM	Bubbler valve closed
8/6/2010	7:46:34 AM	Helium valve opened
8/6/2010	7:46:34 AM	Helium MFC set to  500.000000
8/6/2010	7:46:34 AM	H2 MFC set to  0.000000
8/6/2010	7:46:34 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:34 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:34 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:34 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:35 AM	Tube furnace set to 0
8/6/2010	7:46:35 AM	Helium valve closed
8/6/2010	7:46:35 AM	H2 valve closed
8/6/2010	7:46:35 AM	BCl3 valve closed
8/6/2010	7:46:35 AM	PH3 valve closed
8/6/2010	7:46:35 AM	SiCl4 pre valve closed
8/6/2010	7:46:35 AM	SiCl4 post valve closed
8/6/2010	7:46:35 AM	Main Vac valve closed
8/6/2010	7:46:35 AM	Bypass valve closed
8/6/2010	7:46:35 AM	Bubbler valve closed
8/6/2010	7:46:35 AM	Helium MFC set to  0.000000
8/6/2010	7:46:35 AM	H2 MFC set to  0.000000
8/6/2010	7:46:35 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:35 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:35 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:35 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:35 AM	Tube furnace set to 0
8/6/2010	7:46:36 AM	Helium valve closed
8/6/2010	7:46:36 AM	H2 valve closed
8/6/2010	7:46:36 AM	BCl3 valve closed
8/6/2010	7:46:36 AM	PH3 valve closed
8/6/2010	7:46:36 AM	SiCl4 pre valve closed
8/6/2010	7:46:36 AM	SiCl4 post valve closed
8/6/2010	7:46:36 AM	Main Vac valve closed
8/6/2010	7:46:36 AM	Bubbler valve closed
8/6/2010	7:46:36 AM	Bypass valve opened
8/6/2010	7:46:36 AM	Helium MFC set to  0.000000
8/6/2010	7:46:36 AM	H2 MFC set to  0.000000
8/6/2010	7:46:36 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:36 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:36 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:36 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:36 AM	Tube furnace set to 0
8/6/2010	7:46:37 AM	Helium valve closed
8/6/2010	7:46:37 AM	H2 valve closed
8/6/2010	7:46:37 AM	BCl3 valve closed
8/6/2010	7:46:37 AM	PH3 valve closed
8/6/2010	7:46:37 AM	SiCl4 pre valve closed
8/6/2010	7:46:37 AM	SiCl4 post valve closed
8/6/2010	7:46:37 AM	Bubbler valve closed
8/6/2010	7:46:37 AM	Main Vac valve opened
8/6/2010	7:46:37 AM	Bypass valve opened
8/6/2010	7:46:37 AM	Helium MFC set to  0.000000
8/6/2010	7:46:37 AM	H2 MFC set to  0.000000
8/6/2010	7:46:37 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:37 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:37 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:37 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:37 AM	Tube furnace set to 0
8/6/2010	7:46:37 AM	H2 valve closed
8/6/2010	7:46:37 AM	BCl3 valve closed
8/6/2010	7:46:37 AM	PH3 valve closed
8/6/2010	7:46:37 AM	SiCl4 pre valve closed
8/6/2010	7:46:37 AM	SiCl4 post valve closed
8/6/2010	7:46:37 AM	Main Vac valve closed
8/6/2010	7:46:37 AM	Bypass valve closed
8/6/2010	7:46:37 AM	Bubbler valve closed
8/6/2010	7:46:37 AM	Helium valve opened
8/6/2010	7:46:37 AM	Helium MFC set to  500.000000
8/6/2010	7:46:37 AM	H2 MFC set to  0.000000
8/6/2010	7:46:37 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:37 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:37 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:37 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:38 AM	Tube furnace set to 0
8/6/2010	7:46:38 AM	Helium valve closed
8/6/2010	7:46:38 AM	H2 valve closed
8/6/2010	7:46:38 AM	BCl3 valve closed
8/6/2010	7:46:38 AM	PH3 valve closed
8/6/2010	7:46:38 AM	SiCl4 pre valve closed
8/6/2010	7:46:38 AM	SiCl4 post valve closed
8/6/2010	7:46:38 AM	Main Vac valve closed
8/6/2010	7:46:38 AM	Bypass valve closed
8/6/2010	7:46:38 AM	Bubbler valve closed
8/6/2010	7:46:38 AM	Helium MFC set to  0.000000
8/6/2010	7:46:38 AM	H2 MFC set to  0.000000
8/6/2010	7:46:38 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:38 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:38 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:38 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:38 AM	Tube furnace set to 0
8/6/2010	7:46:38 AM	Helium valve closed
8/6/2010	7:46:38 AM	H2 valve closed
8/6/2010	7:46:38 AM	BCl3 valve closed
8/6/2010	7:46:38 AM	PH3 valve closed
8/6/2010	7:46:38 AM	SiCl4 pre valve closed
8/6/2010	7:46:38 AM	SiCl4 post valve closed
8/6/2010	7:46:38 AM	Main Vac valve closed
8/6/2010	7:46:38 AM	Bubbler valve closed
8/6/2010	7:46:38 AM	Bypass valve opened
8/6/2010	7:46:38 AM	Helium MFC set to  0.000000
8/6/2010	7:46:38 AM	H2 MFC set to  0.000000
8/6/2010	7:46:38 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:38 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:38 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:38 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:38 AM	Tube furnace set to 0
8/6/2010	7:46:39 AM	Helium valve closed
8/6/2010	7:46:39 AM	H2 valve closed
8/6/2010	7:46:39 AM	BCl3 valve closed
8/6/2010	7:46:39 AM	PH3 valve closed
8/6/2010	7:46:39 AM	SiCl4 pre valve closed
8/6/2010	7:46:39 AM	SiCl4 post valve closed
8/6/2010	7:46:39 AM	Bubbler valve closed
8/6/2010	7:46:39 AM	Main Vac valve opened
8/6/2010	7:46:39 AM	Bypass valve opened
8/6/2010	7:46:39 AM	Helium MFC set to  0.000000
8/6/2010	7:46:39 AM	H2 MFC set to  0.000000
8/6/2010	7:46:39 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:39 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:39 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:39 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:39 AM	Tube furnace set to 0
8/6/2010	7:46:39 AM	Helium valve closed
8/6/2010	7:46:39 AM	H2 valve closed
8/6/2010	7:46:39 AM	BCl3 valve closed
8/6/2010	7:46:39 AM	PH3 valve closed
8/6/2010	7:46:39 AM	SiCl4 pre valve closed
8/6/2010	7:46:39 AM	SiCl4 post valve closed
8/6/2010	7:46:39 AM	Bubbler valve closed
8/6/2010	7:46:39 AM	Main Vac valve opened
8/6/2010	7:46:39 AM	Bypass valve opened
8/6/2010	7:46:39 AM	Helium MFC set to  0.000000
8/6/2010	7:46:39 AM	H2 MFC set to  0.000000
8/6/2010	7:46:40 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:40 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:40 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:40 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:40 AM	Tube furnace set to 0
8/6/2010	7:46:41 AM	Run finished at 7:46 AM
8/6/2010	7:46:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/6/2010	7:46:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	7:46:44 AM	Recipe started at 7:46 AM
8/6/2010	7:46:44 AM	H2 valve closed
8/6/2010	7:46:44 AM	BCl3 valve closed
8/6/2010	7:46:44 AM	PH3 valve closed
8/6/2010	7:46:44 AM	SiCl4 pre valve closed
8/6/2010	7:46:44 AM	SiCl4 post valve closed
8/6/2010	7:46:44 AM	Main Vac valve closed
8/6/2010	7:46:44 AM	Bypass valve closed
8/6/2010	7:46:44 AM	Bubbler valve closed
8/6/2010	7:46:44 AM	Helium valve opened
8/6/2010	7:46:44 AM	Helium MFC set to  500.000000
8/6/2010	7:46:44 AM	H2 MFC set to  0.000000
8/6/2010	7:46:44 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:44 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:44 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:44 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:44 AM	Tube furnace set to 0
8/6/2010	7:46:53 AM	Helium valve closed
8/6/2010	7:46:53 AM	H2 valve closed
8/6/2010	7:46:53 AM	BCl3 valve closed
8/6/2010	7:46:53 AM	PH3 valve closed
8/6/2010	7:46:53 AM	SiCl4 pre valve closed
8/6/2010	7:46:53 AM	SiCl4 post valve closed
8/6/2010	7:46:53 AM	Main Vac valve closed
8/6/2010	7:46:53 AM	Bypass valve closed
8/6/2010	7:46:53 AM	Bubbler valve closed
8/6/2010	7:46:53 AM	Helium MFC set to  0.000000
8/6/2010	7:46:53 AM	H2 MFC set to  0.000000
8/6/2010	7:46:53 AM	BCl3 MFC set to  0.000000
8/6/2010	7:46:53 AM	PHl3 MFC set to  0.000000
8/6/2010	7:46:53 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:46:53 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:46:53 AM	Tube furnace set to 0
8/6/2010	7:46:54 AM	Run finished at 7:46 AM
8/6/2010	7:46:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	7:47:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	7:47:03 AM	Recipe started at 7:47 AM
8/6/2010	7:47:03 AM	Helium valve closed
8/6/2010	7:47:03 AM	H2 valve closed
8/6/2010	7:47:03 AM	BCl3 valve closed
8/6/2010	7:47:03 AM	PH3 valve closed
8/6/2010	7:47:03 AM	SiCl4 pre valve closed
8/6/2010	7:47:03 AM	SiCl4 post valve closed
8/6/2010	7:47:03 AM	Main Vac valve closed
8/6/2010	7:47:03 AM	Bubbler valve closed
8/6/2010	7:47:03 AM	Bypass valve opened
8/6/2010	7:47:03 AM	Helium MFC set to  0.000000
8/6/2010	7:47:03 AM	H2 MFC set to  0.000000
8/6/2010	7:47:03 AM	BCl3 MFC set to  0.000000
8/6/2010	7:47:03 AM	PHl3 MFC set to  0.000000
8/6/2010	7:47:03 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:47:03 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:47:04 AM	Tube furnace set to 0
8/6/2010	7:47:30 AM	Helium valve closed
8/6/2010	7:47:30 AM	H2 valve closed
8/6/2010	7:47:30 AM	BCl3 valve closed
8/6/2010	7:47:30 AM	PH3 valve closed
8/6/2010	7:47:30 AM	SiCl4 pre valve closed
8/6/2010	7:47:30 AM	SiCl4 post valve closed
8/6/2010	7:47:30 AM	Bubbler valve closed
8/6/2010	7:47:30 AM	Main Vac valve opened
8/6/2010	7:47:30 AM	Bypass valve opened
8/6/2010	7:47:30 AM	Helium MFC set to  0.000000
8/6/2010	7:47:30 AM	H2 MFC set to  0.000000
8/6/2010	7:47:30 AM	BCl3 MFC set to  0.000000
8/6/2010	7:47:30 AM	PHl3 MFC set to  0.000000
8/6/2010	7:47:30 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:47:30 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:47:30 AM	Tube furnace set to 0
8/6/2010	7:47:30 AM	Run finished at 7:47 AM
8/6/2010	7:47:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	7:47:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	7:47:40 AM	Recipe started at 7:47 AM
8/6/2010	7:47:40 AM	H2 valve closed
8/6/2010	7:47:40 AM	BCl3 valve closed
8/6/2010	7:47:40 AM	PH3 valve closed
8/6/2010	7:47:40 AM	SiCl4 pre valve closed
8/6/2010	7:47:40 AM	SiCl4 post valve closed
8/6/2010	7:47:40 AM	Main Vac valve closed
8/6/2010	7:47:40 AM	Bypass valve closed
8/6/2010	7:47:40 AM	Bubbler valve closed
8/6/2010	7:47:40 AM	Helium valve opened
8/6/2010	7:47:40 AM	Helium MFC set to  500.000000
8/6/2010	7:47:40 AM	H2 MFC set to  0.000000
8/6/2010	7:47:40 AM	BCl3 MFC set to  0.000000
8/6/2010	7:47:40 AM	PHl3 MFC set to  0.000000
8/6/2010	7:47:40 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:47:40 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:47:41 AM	Tube furnace set to 0
8/6/2010	7:47:59 AM	Helium valve closed
8/6/2010	7:47:59 AM	H2 valve closed
8/6/2010	7:47:59 AM	BCl3 valve closed
8/6/2010	7:47:59 AM	PH3 valve closed
8/6/2010	7:47:59 AM	SiCl4 pre valve closed
8/6/2010	7:47:59 AM	SiCl4 post valve closed
8/6/2010	7:47:59 AM	Main Vac valve closed
8/6/2010	7:47:59 AM	Bypass valve closed
8/6/2010	7:47:59 AM	Bubbler valve closed
8/6/2010	7:47:59 AM	Helium MFC set to  0.000000
8/6/2010	7:47:59 AM	H2 MFC set to  0.000000
8/6/2010	7:47:59 AM	BCl3 MFC set to  0.000000
8/6/2010	7:47:59 AM	PHl3 MFC set to  0.000000
8/6/2010	7:47:59 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:47:59 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:47:59 AM	Tube furnace set to 0
8/6/2010	7:47:59 AM	Run finished at 7:47 AM
8/6/2010	7:47:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	7:50:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	7:50:40 AM	Recipe started at 7:50 AM
8/6/2010	7:50:40 AM	Helium valve closed
8/6/2010	7:50:40 AM	H2 valve closed
8/6/2010	7:50:40 AM	BCl3 valve closed
8/6/2010	7:50:40 AM	PH3 valve closed
8/6/2010	7:50:40 AM	SiCl4 pre valve closed
8/6/2010	7:50:40 AM	SiCl4 post valve closed
8/6/2010	7:50:40 AM	Main Vac valve closed
8/6/2010	7:50:40 AM	Bubbler valve closed
8/6/2010	7:50:40 AM	Bypass valve opened
8/6/2010	7:50:40 AM	Helium MFC set to  0.000000
8/6/2010	7:50:40 AM	H2 MFC set to  0.000000
8/6/2010	7:50:40 AM	BCl3 MFC set to  0.000000
8/6/2010	7:50:40 AM	PHl3 MFC set to  0.000000
8/6/2010	7:50:40 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:50:40 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:50:41 AM	Tube furnace set to 0
8/6/2010	7:50:54 AM	Helium valve closed
8/6/2010	7:50:54 AM	H2 valve closed
8/6/2010	7:50:54 AM	BCl3 valve closed
8/6/2010	7:50:54 AM	PH3 valve closed
8/6/2010	7:50:54 AM	SiCl4 pre valve closed
8/6/2010	7:50:54 AM	SiCl4 post valve closed
8/6/2010	7:50:54 AM	Bubbler valve closed
8/6/2010	7:50:54 AM	Main Vac valve opened
8/6/2010	7:50:54 AM	Bypass valve opened
8/6/2010	7:50:54 AM	Helium MFC set to  0.000000
8/6/2010	7:50:54 AM	H2 MFC set to  0.000000
8/6/2010	7:50:54 AM	BCl3 MFC set to  0.000000
8/6/2010	7:50:54 AM	PHl3 MFC set to  0.000000
8/6/2010	7:50:54 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:50:54 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:50:54 AM	Tube furnace set to 0
8/6/2010	7:50:55 AM	Run finished at 7:50 AM
8/6/2010	7:50:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	7:50:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/6/2010	7:51:05 AM	Recipe started at 7:51 AM
8/6/2010	7:51:05 AM	H2 valve closed
8/6/2010	7:51:05 AM	BCl3 valve closed
8/6/2010	7:51:05 AM	PH3 valve closed
8/6/2010	7:51:05 AM	SiCl4 pre valve closed
8/6/2010	7:51:05 AM	SiCl4 post valve closed
8/6/2010	7:51:05 AM	Main Vac valve closed
8/6/2010	7:51:05 AM	Bypass valve closed
8/6/2010	7:51:05 AM	Bubbler valve closed
8/6/2010	7:51:05 AM	Helium valve opened
8/6/2010	7:51:05 AM	Helium MFC set to  500.000000
8/6/2010	7:51:05 AM	H2 MFC set to  0.000000
8/6/2010	7:51:05 AM	BCl3 MFC set to  0.000000
8/6/2010	7:51:05 AM	PHl3 MFC set to  0.000000
8/6/2010	7:51:05 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:51:05 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:51:05 AM	Tube furnace set to 0
8/6/2010	7:51:29 AM	Helium valve closed
8/6/2010	7:51:29 AM	H2 valve closed
8/6/2010	7:51:29 AM	BCl3 valve closed
8/6/2010	7:51:29 AM	PH3 valve closed
8/6/2010	7:51:29 AM	SiCl4 pre valve closed
8/6/2010	7:51:29 AM	SiCl4 post valve closed
8/6/2010	7:51:29 AM	Main Vac valve closed
8/6/2010	7:51:29 AM	Bypass valve closed
8/6/2010	7:51:29 AM	Bubbler valve closed
8/6/2010	7:51:29 AM	Helium MFC set to  0.000000
8/6/2010	7:51:29 AM	H2 MFC set to  0.000000
8/6/2010	7:51:29 AM	BCl3 MFC set to  0.000000
8/6/2010	7:51:29 AM	PHl3 MFC set to  0.000000
8/6/2010	7:51:29 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:51:29 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:51:29 AM	Tube furnace set to 0
8/6/2010	7:51:44 AM	Helium valve closed
8/6/2010	7:51:44 AM	H2 valve closed
8/6/2010	7:51:44 AM	BCl3 valve closed
8/6/2010	7:51:44 AM	PH3 valve closed
8/6/2010	7:51:44 AM	SiCl4 pre valve closed
8/6/2010	7:51:44 AM	SiCl4 post valve closed
8/6/2010	7:51:44 AM	Main Vac valve closed
8/6/2010	7:51:44 AM	Bubbler valve closed
8/6/2010	7:51:44 AM	Bypass valve opened
8/6/2010	7:51:44 AM	Helium MFC set to  0.000000
8/6/2010	7:51:44 AM	H2 MFC set to  0.000000
8/6/2010	7:51:44 AM	BCl3 MFC set to  0.000000
8/6/2010	7:51:44 AM	PHl3 MFC set to  0.000000
8/6/2010	7:51:44 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:51:44 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:51:44 AM	Tube furnace set to 0
8/6/2010	7:52:26 AM	Helium valve closed
8/6/2010	7:52:26 AM	H2 valve closed
8/6/2010	7:52:26 AM	BCl3 valve closed
8/6/2010	7:52:26 AM	PH3 valve closed
8/6/2010	7:52:26 AM	SiCl4 pre valve closed
8/6/2010	7:52:26 AM	SiCl4 post valve closed
8/6/2010	7:52:26 AM	Bubbler valve closed
8/6/2010	7:52:26 AM	Main Vac valve opened
8/6/2010	7:52:26 AM	Bypass valve opened
8/6/2010	7:52:26 AM	Helium MFC set to  0.000000
8/6/2010	7:52:26 AM	H2 MFC set to  0.000000
8/6/2010	7:52:26 AM	BCl3 MFC set to  0.000000
8/6/2010	7:52:26 AM	PHl3 MFC set to  0.000000
8/6/2010	7:52:26 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:52:26 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:52:26 AM	Tube furnace set to 0
8/6/2010	7:52:27 AM	Run aborted at 7:52 AM
8/6/2010	7:52:27 AM	Helium valve closed
8/6/2010	7:52:27 AM	H2 valve closed
8/6/2010	7:52:27 AM	BCl3 valve closed
8/6/2010	7:52:27 AM	PH3 valve closed
8/6/2010	7:52:27 AM	SiCl4 pre valve closed
8/6/2010	7:52:27 AM	SiCl4 post valve closed
8/6/2010	7:52:27 AM	Bypass valve closed
8/6/2010	7:52:27 AM	Main Vac valve closed
8/6/2010	7:52:27 AM	Bubbler valve closed
8/6/2010	7:52:27 AM	Helium MFC set to  0.000000
8/6/2010	7:52:27 AM	H2 MFC set to  0.000000
8/6/2010	7:52:27 AM	BCl3 MFC set to  0.000000
8/6/2010	7:52:27 AM	PHl3 MFC set to  0.000000
8/6/2010	7:52:27 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:52:27 AM	Tube furnace set to 0
8/6/2010	7:52:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/6/2010	7:52:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	7:52:32 AM	Recipe started at 7:52 AM
8/6/2010	7:52:32 AM	H2 valve closed
8/6/2010	7:52:32 AM	BCl3 valve closed
8/6/2010	7:52:32 AM	PH3 valve closed
8/6/2010	7:52:32 AM	SiCl4 pre valve closed
8/6/2010	7:52:32 AM	SiCl4 post valve closed
8/6/2010	7:52:32 AM	Main Vac valve closed
8/6/2010	7:52:32 AM	Bypass valve closed
8/6/2010	7:52:32 AM	Bubbler valve closed
8/6/2010	7:52:32 AM	Helium valve opened
8/6/2010	7:52:32 AM	Helium MFC set to  500.000000
8/6/2010	7:52:32 AM	H2 MFC set to  0.000000
8/6/2010	7:52:32 AM	BCl3 MFC set to  0.000000
8/6/2010	7:52:32 AM	PHl3 MFC set to  0.000000
8/6/2010	7:52:32 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:52:32 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:52:32 AM	Tube furnace set to 0
8/6/2010	7:52:49 AM	Helium valve closed
8/6/2010	7:52:49 AM	H2 valve closed
8/6/2010	7:52:49 AM	BCl3 valve closed
8/6/2010	7:52:49 AM	PH3 valve closed
8/6/2010	7:52:49 AM	SiCl4 pre valve closed
8/6/2010	7:52:49 AM	SiCl4 post valve closed
8/6/2010	7:52:49 AM	Main Vac valve closed
8/6/2010	7:52:49 AM	Bypass valve closed
8/6/2010	7:52:49 AM	Bubbler valve closed
8/6/2010	7:52:49 AM	Helium MFC set to  0.000000
8/6/2010	7:52:49 AM	H2 MFC set to  0.000000
8/6/2010	7:52:49 AM	BCl3 MFC set to  0.000000
8/6/2010	7:52:49 AM	PHl3 MFC set to  0.000000
8/6/2010	7:52:49 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:52:49 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:52:49 AM	Tube furnace set to 0
8/6/2010	7:52:49 AM	Run finished at 7:52 AM
8/6/2010	7:52:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	7:57:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	7:57:27 AM	Recipe started at 7:57 AM
8/6/2010	7:57:27 AM	Helium valve closed
8/6/2010	7:57:27 AM	H2 valve closed
8/6/2010	7:57:27 AM	BCl3 valve closed
8/6/2010	7:57:27 AM	PH3 valve closed
8/6/2010	7:57:27 AM	SiCl4 pre valve closed
8/6/2010	7:57:27 AM	SiCl4 post valve closed
8/6/2010	7:57:27 AM	Main Vac valve closed
8/6/2010	7:57:27 AM	Bubbler valve closed
8/6/2010	7:57:27 AM	Bypass valve opened
8/6/2010	7:57:27 AM	Helium MFC set to  0.000000
8/6/2010	7:57:27 AM	H2 MFC set to  0.000000
8/6/2010	7:57:27 AM	BCl3 MFC set to  0.000000
8/6/2010	7:57:27 AM	PHl3 MFC set to  0.000000
8/6/2010	7:57:27 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:57:27 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:57:27 AM	Tube furnace set to 0
8/6/2010	7:58:10 AM	Helium valve closed
8/6/2010	7:58:10 AM	H2 valve closed
8/6/2010	7:58:10 AM	BCl3 valve closed
8/6/2010	7:58:10 AM	PH3 valve closed
8/6/2010	7:58:10 AM	SiCl4 pre valve closed
8/6/2010	7:58:10 AM	SiCl4 post valve closed
8/6/2010	7:58:10 AM	Bubbler valve closed
8/6/2010	7:58:10 AM	Main Vac valve opened
8/6/2010	7:58:10 AM	Bypass valve opened
8/6/2010	7:58:10 AM	Helium MFC set to  0.000000
8/6/2010	7:58:10 AM	H2 MFC set to  0.000000
8/6/2010	7:58:10 AM	BCl3 MFC set to  0.000000
8/6/2010	7:58:10 AM	PHl3 MFC set to  0.000000
8/6/2010	7:58:10 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:58:10 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:58:10 AM	Tube furnace set to 0
8/6/2010	7:58:10 AM	Run finished at 7:58 AM
8/6/2010	7:58:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	7:58:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/6/2010	7:58:21 AM	Recipe started at 7:58 AM
8/6/2010	7:58:21 AM	H2 valve closed
8/6/2010	7:58:21 AM	BCl3 valve closed
8/6/2010	7:58:21 AM	PH3 valve closed
8/6/2010	7:58:21 AM	SiCl4 pre valve closed
8/6/2010	7:58:21 AM	SiCl4 post valve closed
8/6/2010	7:58:21 AM	Main Vac valve closed
8/6/2010	7:58:21 AM	Bypass valve closed
8/6/2010	7:58:21 AM	Bubbler valve closed
8/6/2010	7:58:21 AM	Helium valve opened
8/6/2010	7:58:21 AM	Helium MFC set to  500.000000
8/6/2010	7:58:21 AM	H2 MFC set to  0.000000
8/6/2010	7:58:21 AM	BCl3 MFC set to  0.000000
8/6/2010	7:58:21 AM	PHl3 MFC set to  0.000000
8/6/2010	7:58:21 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:58:21 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:58:21 AM	Tube furnace set to 0
8/6/2010	7:59:42 AM	Helium valve closed
8/6/2010	7:59:42 AM	H2 valve closed
8/6/2010	7:59:42 AM	BCl3 valve closed
8/6/2010	7:59:42 AM	PH3 valve closed
8/6/2010	7:59:42 AM	SiCl4 pre valve closed
8/6/2010	7:59:42 AM	SiCl4 post valve closed
8/6/2010	7:59:42 AM	Main Vac valve closed
8/6/2010	7:59:42 AM	Bypass valve closed
8/6/2010	7:59:42 AM	Bubbler valve closed
8/6/2010	7:59:42 AM	Helium MFC set to  0.000000
8/6/2010	7:59:42 AM	H2 MFC set to  0.000000
8/6/2010	7:59:42 AM	BCl3 MFC set to  0.000000
8/6/2010	7:59:42 AM	PHl3 MFC set to  0.000000
8/6/2010	7:59:42 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:59:42 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:59:43 AM	Tube furnace set to 0
8/6/2010	7:59:58 AM	Helium valve closed
8/6/2010	7:59:58 AM	H2 valve closed
8/6/2010	7:59:58 AM	BCl3 valve closed
8/6/2010	7:59:58 AM	PH3 valve closed
8/6/2010	7:59:58 AM	SiCl4 pre valve closed
8/6/2010	7:59:58 AM	SiCl4 post valve closed
8/6/2010	7:59:58 AM	Main Vac valve closed
8/6/2010	7:59:58 AM	Bubbler valve closed
8/6/2010	7:59:58 AM	Bypass valve opened
8/6/2010	7:59:58 AM	Helium MFC set to  0.000000
8/6/2010	7:59:58 AM	H2 MFC set to  0.000000
8/6/2010	7:59:58 AM	BCl3 MFC set to  0.000000
8/6/2010	7:59:58 AM	PHl3 MFC set to  0.000000
8/6/2010	7:59:58 AM	SiCl4 MFC set to  0.000000
8/6/2010	7:59:58 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:59:58 AM	Tube furnace set to 0
8/6/2010	8:00:26 AM	Helium valve closed
8/6/2010	8:00:26 AM	H2 valve closed
8/6/2010	8:00:26 AM	BCl3 valve closed
8/6/2010	8:00:26 AM	PH3 valve closed
8/6/2010	8:00:26 AM	SiCl4 pre valve closed
8/6/2010	8:00:26 AM	SiCl4 post valve closed
8/6/2010	8:00:26 AM	Bubbler valve closed
8/6/2010	8:00:26 AM	Main Vac valve opened
8/6/2010	8:00:26 AM	Bypass valve opened
8/6/2010	8:00:26 AM	Helium MFC set to  0.000000
8/6/2010	8:00:26 AM	H2 MFC set to  0.000000
8/6/2010	8:00:26 AM	BCl3 MFC set to  0.000000
8/6/2010	8:00:26 AM	PHl3 MFC set to  0.000000
8/6/2010	8:00:26 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:00:26 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:00:26 AM	Tube furnace set to 0
8/6/2010	8:05:26 AM	H2 valve closed
8/6/2010	8:05:26 AM	BCl3 valve closed
8/6/2010	8:05:26 AM	PH3 valve closed
8/6/2010	8:05:26 AM	SiCl4 pre valve closed
8/6/2010	8:05:26 AM	SiCl4 post valve closed
8/6/2010	8:05:26 AM	Main Vac valve closed
8/6/2010	8:05:26 AM	Bypass valve closed
8/6/2010	8:05:26 AM	Bubbler valve closed
8/6/2010	8:05:26 AM	Helium valve opened
8/6/2010	8:05:26 AM	Helium MFC set to  500.000000
8/6/2010	8:05:26 AM	H2 MFC set to  0.000000
8/6/2010	8:05:26 AM	BCl3 MFC set to  0.000000
8/6/2010	8:05:26 AM	PHl3 MFC set to  0.000000
8/6/2010	8:05:26 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:05:26 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:05:26 AM	Tube furnace set to 0
8/6/2010	8:06:48 AM	Helium valve closed
8/6/2010	8:06:48 AM	H2 valve closed
8/6/2010	8:06:48 AM	BCl3 valve closed
8/6/2010	8:06:48 AM	PH3 valve closed
8/6/2010	8:06:48 AM	SiCl4 pre valve closed
8/6/2010	8:06:48 AM	SiCl4 post valve closed
8/6/2010	8:06:48 AM	Main Vac valve closed
8/6/2010	8:06:48 AM	Bypass valve closed
8/6/2010	8:06:48 AM	Bubbler valve closed
8/6/2010	8:06:48 AM	Helium MFC set to  0.000000
8/6/2010	8:06:48 AM	H2 MFC set to  0.000000
8/6/2010	8:06:48 AM	BCl3 MFC set to  0.000000
8/6/2010	8:06:48 AM	PHl3 MFC set to  0.000000
8/6/2010	8:06:48 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:06:48 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:06:48 AM	Tube furnace set to 0
8/6/2010	8:07:03 AM	Helium valve closed
8/6/2010	8:07:03 AM	H2 valve closed
8/6/2010	8:07:03 AM	BCl3 valve closed
8/6/2010	8:07:03 AM	PH3 valve closed
8/6/2010	8:07:03 AM	SiCl4 pre valve closed
8/6/2010	8:07:03 AM	SiCl4 post valve closed
8/6/2010	8:07:03 AM	Main Vac valve closed
8/6/2010	8:07:03 AM	Bubbler valve closed
8/6/2010	8:07:03 AM	Bypass valve opened
8/6/2010	8:07:03 AM	Helium MFC set to  0.000000
8/6/2010	8:07:03 AM	H2 MFC set to  0.000000
8/6/2010	8:07:03 AM	BCl3 MFC set to  0.000000
8/6/2010	8:07:03 AM	PHl3 MFC set to  0.000000
8/6/2010	8:07:03 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:07:03 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:07:03 AM	Tube furnace set to 0
8/6/2010	8:07:31 AM	Helium valve closed
8/6/2010	8:07:31 AM	H2 valve closed
8/6/2010	8:07:31 AM	BCl3 valve closed
8/6/2010	8:07:31 AM	PH3 valve closed
8/6/2010	8:07:31 AM	SiCl4 pre valve closed
8/6/2010	8:07:31 AM	SiCl4 post valve closed
8/6/2010	8:07:31 AM	Bubbler valve closed
8/6/2010	8:07:31 AM	Main Vac valve opened
8/6/2010	8:07:31 AM	Bypass valve opened
8/6/2010	8:07:31 AM	Helium MFC set to  0.000000
8/6/2010	8:07:31 AM	H2 MFC set to  0.000000
8/6/2010	8:07:31 AM	BCl3 MFC set to  0.000000
8/6/2010	8:07:31 AM	PHl3 MFC set to  0.000000
8/6/2010	8:07:31 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:07:31 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:07:31 AM	Tube furnace set to 0
8/6/2010	8:12:31 AM	H2 valve closed
8/6/2010	8:12:31 AM	BCl3 valve closed
8/6/2010	8:12:31 AM	PH3 valve closed
8/6/2010	8:12:31 AM	SiCl4 pre valve closed
8/6/2010	8:12:31 AM	SiCl4 post valve closed
8/6/2010	8:12:31 AM	Main Vac valve closed
8/6/2010	8:12:31 AM	Bypass valve closed
8/6/2010	8:12:31 AM	Bubbler valve closed
8/6/2010	8:12:31 AM	Helium valve opened
8/6/2010	8:12:31 AM	Helium MFC set to  500.000000
8/6/2010	8:12:31 AM	H2 MFC set to  0.000000
8/6/2010	8:12:31 AM	BCl3 MFC set to  0.000000
8/6/2010	8:12:31 AM	PHl3 MFC set to  0.000000
8/6/2010	8:12:31 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:12:31 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:12:31 AM	Tube furnace set to 0
8/6/2010	8:13:53 AM	Helium valve closed
8/6/2010	8:13:53 AM	H2 valve closed
8/6/2010	8:13:53 AM	BCl3 valve closed
8/6/2010	8:13:53 AM	PH3 valve closed
8/6/2010	8:13:53 AM	SiCl4 pre valve closed
8/6/2010	8:13:53 AM	SiCl4 post valve closed
8/6/2010	8:13:53 AM	Main Vac valve closed
8/6/2010	8:13:53 AM	Bypass valve closed
8/6/2010	8:13:53 AM	Bubbler valve closed
8/6/2010	8:13:53 AM	Helium MFC set to  0.000000
8/6/2010	8:13:53 AM	H2 MFC set to  0.000000
8/6/2010	8:13:53 AM	BCl3 MFC set to  0.000000
8/6/2010	8:13:53 AM	PHl3 MFC set to  0.000000
8/6/2010	8:13:53 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:13:53 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:13:53 AM	Tube furnace set to 0
8/6/2010	8:14:08 AM	Helium valve closed
8/6/2010	8:14:08 AM	H2 valve closed
8/6/2010	8:14:08 AM	BCl3 valve closed
8/6/2010	8:14:08 AM	PH3 valve closed
8/6/2010	8:14:08 AM	SiCl4 pre valve closed
8/6/2010	8:14:08 AM	SiCl4 post valve closed
8/6/2010	8:14:08 AM	Main Vac valve closed
8/6/2010	8:14:08 AM	Bubbler valve closed
8/6/2010	8:14:08 AM	Bypass valve opened
8/6/2010	8:14:08 AM	Helium MFC set to  0.000000
8/6/2010	8:14:08 AM	H2 MFC set to  0.000000
8/6/2010	8:14:08 AM	BCl3 MFC set to  0.000000
8/6/2010	8:14:08 AM	PHl3 MFC set to  0.000000
8/6/2010	8:14:08 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:14:08 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:14:08 AM	Tube furnace set to 0
8/6/2010	8:14:36 AM	Helium valve closed
8/6/2010	8:14:36 AM	H2 valve closed
8/6/2010	8:14:36 AM	BCl3 valve closed
8/6/2010	8:14:36 AM	PH3 valve closed
8/6/2010	8:14:36 AM	SiCl4 pre valve closed
8/6/2010	8:14:36 AM	SiCl4 post valve closed
8/6/2010	8:14:36 AM	Bubbler valve closed
8/6/2010	8:14:36 AM	Main Vac valve opened
8/6/2010	8:14:36 AM	Bypass valve opened
8/6/2010	8:14:36 AM	Helium MFC set to  0.000000
8/6/2010	8:14:36 AM	H2 MFC set to  0.000000
8/6/2010	8:14:36 AM	BCl3 MFC set to  0.000000
8/6/2010	8:14:36 AM	PHl3 MFC set to  0.000000
8/6/2010	8:14:36 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:14:36 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:14:36 AM	Tube furnace set to 0
8/6/2010	8:19:36 AM	Helium valve closed
8/6/2010	8:19:36 AM	H2 valve closed
8/6/2010	8:19:36 AM	BCl3 valve closed
8/6/2010	8:19:36 AM	PH3 valve closed
8/6/2010	8:19:36 AM	SiCl4 pre valve closed
8/6/2010	8:19:36 AM	SiCl4 post valve closed
8/6/2010	8:19:36 AM	Bubbler valve closed
8/6/2010	8:19:36 AM	Main Vac valve opened
8/6/2010	8:19:36 AM	Bypass valve opened
8/6/2010	8:19:36 AM	Helium MFC set to  0.000000
8/6/2010	8:19:36 AM	H2 MFC set to  0.000000
8/6/2010	8:19:36 AM	BCl3 MFC set to  0.000000
8/6/2010	8:19:36 AM	PHl3 MFC set to  0.000000
8/6/2010	8:19:36 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:19:36 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:19:37 AM	Tube furnace set to 0
8/6/2010	8:19:38 AM	Run finished at 8:19 AM
8/6/2010	8:19:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/6/2010	8:20:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	8:20:49 AM	Recipe started at 8:20 AM
8/6/2010	8:20:49 AM	Helium valve closed
8/6/2010	8:20:49 AM	H2 valve closed
8/6/2010	8:20:49 AM	BCl3 valve closed
8/6/2010	8:20:49 AM	PH3 valve closed
8/6/2010	8:20:49 AM	SiCl4 pre valve closed
8/6/2010	8:20:49 AM	SiCl4 post valve closed
8/6/2010	8:20:49 AM	Main Vac valve closed
8/6/2010	8:20:49 AM	Bubbler valve closed
8/6/2010	8:20:49 AM	Bypass valve opened
8/6/2010	8:20:49 AM	Helium MFC set to  0.000000
8/6/2010	8:20:49 AM	H2 MFC set to  0.000000
8/6/2010	8:20:49 AM	BCl3 MFC set to  0.000000
8/6/2010	8:20:49 AM	PHl3 MFC set to  0.000000
8/6/2010	8:20:49 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:20:49 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:20:49 AM	Tube furnace set to 0
8/6/2010	8:20:50 AM	Helium valve closed
8/6/2010	8:20:50 AM	H2 valve closed
8/6/2010	8:20:50 AM	BCl3 valve closed
8/6/2010	8:20:50 AM	PH3 valve closed
8/6/2010	8:20:50 AM	SiCl4 pre valve closed
8/6/2010	8:20:50 AM	SiCl4 post valve closed
8/6/2010	8:20:50 AM	Bubbler valve closed
8/6/2010	8:20:50 AM	Main Vac valve opened
8/6/2010	8:20:50 AM	Bypass valve opened
8/6/2010	8:20:50 AM	Helium MFC set to  0.000000
8/6/2010	8:20:50 AM	H2 MFC set to  0.000000
8/6/2010	8:20:50 AM	BCl3 MFC set to  0.000000
8/6/2010	8:20:50 AM	PHl3 MFC set to  0.000000
8/6/2010	8:20:50 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:20:50 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:20:50 AM	Tube furnace set to 0
8/6/2010	8:21:50 AM	H2 valve closed
8/6/2010	8:21:50 AM	BCl3 valve closed
8/6/2010	8:21:50 AM	PH3 valve closed
8/6/2010	8:21:50 AM	SiCl4 pre valve closed
8/6/2010	8:21:50 AM	SiCl4 post valve closed
8/6/2010	8:21:50 AM	Bubbler valve closed
8/6/2010	8:21:50 AM	Helium valve opened
8/6/2010	8:21:50 AM	Main Vac valve opened
8/6/2010	8:21:50 AM	Bypass valve opened
8/6/2010	8:21:50 AM	Helium MFC set to  100.000000
8/6/2010	8:21:50 AM	H2 MFC set to  0.000000
8/6/2010	8:21:50 AM	BCl3 MFC set to  0.000000
8/6/2010	8:21:50 AM	PHl3 MFC set to  0.000000
8/6/2010	8:21:50 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:21:50 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:21:50 AM	Tube furnace set to 0
8/6/2010	8:30:50 AM	Helium valve closed
8/6/2010	8:30:50 AM	H2 valve closed
8/6/2010	8:30:50 AM	BCl3 valve closed
8/6/2010	8:30:50 AM	PH3 valve closed
8/6/2010	8:30:50 AM	SiCl4 pre valve closed
8/6/2010	8:30:50 AM	SiCl4 post valve closed
8/6/2010	8:30:50 AM	Bubbler valve closed
8/6/2010	8:30:50 AM	Main Vac valve opened
8/6/2010	8:30:50 AM	Bypass valve opened
8/6/2010	8:30:50 AM	Helium MFC set to  0.000000
8/6/2010	8:30:50 AM	H2 MFC set to  0.000000
8/6/2010	8:30:50 AM	BCl3 MFC set to  0.000000
8/6/2010	8:30:50 AM	PHl3 MFC set to  0.000000
8/6/2010	8:30:50 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:30:50 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:30:50 AM	Tube furnace set to 0
8/6/2010	8:31:50 AM	H2 valve closed
8/6/2010	8:31:50 AM	BCl3 valve closed
8/6/2010	8:31:50 AM	PH3 valve closed
8/6/2010	8:31:50 AM	SiCl4 pre valve closed
8/6/2010	8:31:50 AM	SiCl4 post valve closed
8/6/2010	8:31:50 AM	Bubbler valve closed
8/6/2010	8:31:50 AM	Helium valve opened
8/6/2010	8:31:50 AM	Main Vac valve opened
8/6/2010	8:31:50 AM	Bypass valve opened
8/6/2010	8:31:50 AM	Helium MFC set to  100.000000
8/6/2010	8:31:50 AM	H2 MFC set to  0.000000
8/6/2010	8:31:50 AM	BCl3 MFC set to  0.000000
8/6/2010	8:31:50 AM	PHl3 MFC set to  0.000000
8/6/2010	8:31:50 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:31:50 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:31:50 AM	Tube furnace set to 0
8/6/2010	8:40:50 AM	Helium valve closed
8/6/2010	8:40:50 AM	H2 valve closed
8/6/2010	8:40:50 AM	BCl3 valve closed
8/6/2010	8:40:50 AM	PH3 valve closed
8/6/2010	8:40:50 AM	SiCl4 pre valve closed
8/6/2010	8:40:50 AM	SiCl4 post valve closed
8/6/2010	8:40:50 AM	Bubbler valve closed
8/6/2010	8:40:50 AM	Main Vac valve opened
8/6/2010	8:40:50 AM	Bypass valve opened
8/6/2010	8:40:50 AM	Helium MFC set to  0.000000
8/6/2010	8:40:50 AM	H2 MFC set to  0.000000
8/6/2010	8:40:50 AM	BCl3 MFC set to  0.000000
8/6/2010	8:40:50 AM	PHl3 MFC set to  0.000000
8/6/2010	8:40:50 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:40:50 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:40:50 AM	Tube furnace set to 0
8/6/2010	8:41:51 AM	H2 valve closed
8/6/2010	8:41:51 AM	BCl3 valve closed
8/6/2010	8:41:51 AM	PH3 valve closed
8/6/2010	8:41:51 AM	SiCl4 pre valve closed
8/6/2010	8:41:51 AM	SiCl4 post valve closed
8/6/2010	8:41:51 AM	Bubbler valve closed
8/6/2010	8:41:51 AM	Helium valve opened
8/6/2010	8:41:51 AM	Main Vac valve opened
8/6/2010	8:41:51 AM	Bypass valve opened
8/6/2010	8:41:51 AM	Helium MFC set to  100.000000
8/6/2010	8:41:51 AM	H2 MFC set to  0.000000
8/6/2010	8:41:51 AM	BCl3 MFC set to  0.000000
8/6/2010	8:41:51 AM	PHl3 MFC set to  0.000000
8/6/2010	8:41:51 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:41:51 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:41:51 AM	Tube furnace set to 0
8/6/2010	8:50:51 AM	Helium valve closed
8/6/2010	8:50:51 AM	H2 valve closed
8/6/2010	8:50:51 AM	BCl3 valve closed
8/6/2010	8:50:51 AM	PH3 valve closed
8/6/2010	8:50:51 AM	SiCl4 pre valve closed
8/6/2010	8:50:51 AM	SiCl4 post valve closed
8/6/2010	8:50:51 AM	Bubbler valve closed
8/6/2010	8:50:51 AM	Main Vac valve opened
8/6/2010	8:50:51 AM	Bypass valve opened
8/6/2010	8:50:51 AM	Helium MFC set to  0.000000
8/6/2010	8:50:51 AM	H2 MFC set to  0.000000
8/6/2010	8:50:51 AM	BCl3 MFC set to  0.000000
8/6/2010	8:50:51 AM	PHl3 MFC set to  0.000000
8/6/2010	8:50:51 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:50:51 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:50:51 AM	Tube furnace set to 0
8/6/2010	8:50:52 AM	Run finished at 8:50 AM
8/6/2010	8:50:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	8:52:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	8:52:05 AM	Recipe started at 8:52 AM
8/6/2010	8:52:05 AM	Helium valve closed
8/6/2010	8:52:05 AM	H2 valve closed
8/6/2010	8:52:05 AM	BCl3 valve closed
8/6/2010	8:52:05 AM	PH3 valve closed
8/6/2010	8:52:05 AM	SiCl4 pre valve closed
8/6/2010	8:52:05 AM	SiCl4 post valve closed
8/6/2010	8:52:05 AM	Main Vac valve closed
8/6/2010	8:52:05 AM	Bubbler valve closed
8/6/2010	8:52:05 AM	Bypass valve opened
8/6/2010	8:52:05 AM	Helium MFC set to  0.000000
8/6/2010	8:52:05 AM	H2 MFC set to  0.000000
8/6/2010	8:52:05 AM	BCl3 MFC set to  0.000000
8/6/2010	8:52:05 AM	PHl3 MFC set to  0.000000
8/6/2010	8:52:05 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:52:05 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:52:06 AM	Tube furnace set to 0
8/6/2010	8:52:06 AM	Helium valve closed
8/6/2010	8:52:06 AM	H2 valve closed
8/6/2010	8:52:06 AM	BCl3 valve closed
8/6/2010	8:52:06 AM	PH3 valve closed
8/6/2010	8:52:06 AM	SiCl4 pre valve closed
8/6/2010	8:52:06 AM	SiCl4 post valve closed
8/6/2010	8:52:06 AM	Bubbler valve closed
8/6/2010	8:52:06 AM	Main Vac valve opened
8/6/2010	8:52:06 AM	Bypass valve opened
8/6/2010	8:52:06 AM	Helium MFC set to  0.000000
8/6/2010	8:52:06 AM	H2 MFC set to  0.000000
8/6/2010	8:52:06 AM	BCl3 MFC set to  0.000000
8/6/2010	8:52:06 AM	PHl3 MFC set to  0.000000
8/6/2010	8:52:06 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:52:06 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:52:06 AM	Tube furnace set to 0
8/6/2010	8:53:06 AM	H2 valve closed
8/6/2010	8:53:06 AM	BCl3 valve closed
8/6/2010	8:53:06 AM	PH3 valve closed
8/6/2010	8:53:06 AM	SiCl4 pre valve closed
8/6/2010	8:53:06 AM	SiCl4 post valve closed
8/6/2010	8:53:06 AM	Bubbler valve closed
8/6/2010	8:53:06 AM	Helium valve opened
8/6/2010	8:53:06 AM	Main Vac valve opened
8/6/2010	8:53:06 AM	Bypass valve opened
8/6/2010	8:53:06 AM	Helium MFC set to  100.000000
8/6/2010	8:53:06 AM	H2 MFC set to  0.000000
8/6/2010	8:53:06 AM	BCl3 MFC set to  0.000000
8/6/2010	8:53:06 AM	PHl3 MFC set to  0.000000
8/6/2010	8:53:06 AM	SiCl4 MFC set to  0.000000
8/6/2010	8:53:06 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:53:06 AM	Tube furnace set to 0
8/6/2010	9:02:06 AM	Helium valve closed
8/6/2010	9:02:06 AM	H2 valve closed
8/6/2010	9:02:06 AM	BCl3 valve closed
8/6/2010	9:02:06 AM	PH3 valve closed
8/6/2010	9:02:06 AM	SiCl4 pre valve closed
8/6/2010	9:02:06 AM	SiCl4 post valve closed
8/6/2010	9:02:06 AM	Bubbler valve closed
8/6/2010	9:02:06 AM	Main Vac valve opened
8/6/2010	9:02:06 AM	Bypass valve opened
8/6/2010	9:02:06 AM	Helium MFC set to  0.000000
8/6/2010	9:02:06 AM	H2 MFC set to  0.000000
8/6/2010	9:02:06 AM	BCl3 MFC set to  0.000000
8/6/2010	9:02:06 AM	PHl3 MFC set to  0.000000
8/6/2010	9:02:06 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:02:06 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:02:06 AM	Tube furnace set to 0
8/6/2010	9:03:06 AM	H2 valve closed
8/6/2010	9:03:06 AM	BCl3 valve closed
8/6/2010	9:03:06 AM	PH3 valve closed
8/6/2010	9:03:06 AM	SiCl4 pre valve closed
8/6/2010	9:03:06 AM	SiCl4 post valve closed
8/6/2010	9:03:06 AM	Bubbler valve closed
8/6/2010	9:03:06 AM	Helium valve opened
8/6/2010	9:03:06 AM	Main Vac valve opened
8/6/2010	9:03:06 AM	Bypass valve opened
8/6/2010	9:03:06 AM	Helium MFC set to  100.000000
8/6/2010	9:03:06 AM	H2 MFC set to  0.000000
8/6/2010	9:03:06 AM	BCl3 MFC set to  0.000000
8/6/2010	9:03:06 AM	PHl3 MFC set to  0.000000
8/6/2010	9:03:06 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:03:06 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:03:07 AM	Tube furnace set to 0
8/6/2010	9:12:07 AM	Helium valve closed
8/6/2010	9:12:07 AM	H2 valve closed
8/6/2010	9:12:07 AM	BCl3 valve closed
8/6/2010	9:12:07 AM	PH3 valve closed
8/6/2010	9:12:07 AM	SiCl4 pre valve closed
8/6/2010	9:12:07 AM	SiCl4 post valve closed
8/6/2010	9:12:07 AM	Bubbler valve closed
8/6/2010	9:12:07 AM	Main Vac valve opened
8/6/2010	9:12:07 AM	Bypass valve opened
8/6/2010	9:12:07 AM	Helium MFC set to  0.000000
8/6/2010	9:12:07 AM	H2 MFC set to  0.000000
8/6/2010	9:12:07 AM	BCl3 MFC set to  0.000000
8/6/2010	9:12:07 AM	PHl3 MFC set to  0.000000
8/6/2010	9:12:07 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:12:07 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:12:07 AM	Tube furnace set to 0
8/6/2010	9:13:07 AM	H2 valve closed
8/6/2010	9:13:07 AM	BCl3 valve closed
8/6/2010	9:13:07 AM	PH3 valve closed
8/6/2010	9:13:07 AM	SiCl4 pre valve closed
8/6/2010	9:13:07 AM	SiCl4 post valve closed
8/6/2010	9:13:07 AM	Bubbler valve closed
8/6/2010	9:13:07 AM	Helium valve opened
8/6/2010	9:13:07 AM	Main Vac valve opened
8/6/2010	9:13:07 AM	Bypass valve opened
8/6/2010	9:13:07 AM	Helium MFC set to  100.000000
8/6/2010	9:13:07 AM	H2 MFC set to  0.000000
8/6/2010	9:13:07 AM	BCl3 MFC set to  0.000000
8/6/2010	9:13:07 AM	PHl3 MFC set to  0.000000
8/6/2010	9:13:07 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:13:07 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:13:07 AM	Tube furnace set to 0
8/6/2010	9:22:07 AM	Helium valve closed
8/6/2010	9:22:07 AM	H2 valve closed
8/6/2010	9:22:07 AM	BCl3 valve closed
8/6/2010	9:22:07 AM	PH3 valve closed
8/6/2010	9:22:07 AM	SiCl4 pre valve closed
8/6/2010	9:22:07 AM	SiCl4 post valve closed
8/6/2010	9:22:07 AM	Bubbler valve closed
8/6/2010	9:22:07 AM	Main Vac valve opened
8/6/2010	9:22:07 AM	Bypass valve opened
8/6/2010	9:22:07 AM	Helium MFC set to  0.000000
8/6/2010	9:22:07 AM	H2 MFC set to  0.000000
8/6/2010	9:22:07 AM	BCl3 MFC set to  0.000000
8/6/2010	9:22:07 AM	PHl3 MFC set to  0.000000
8/6/2010	9:22:07 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:22:07 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:22:07 AM	Tube furnace set to 0
8/6/2010	9:22:08 AM	Run finished at 9:22 AM
8/6/2010	9:22:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	9:31:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	9:31:10 AM	Recipe started at 9:31 AM
8/6/2010	9:31:10 AM	Helium valve closed
8/6/2010	9:31:10 AM	H2 valve closed
8/6/2010	9:31:10 AM	BCl3 valve closed
8/6/2010	9:31:10 AM	PH3 valve closed
8/6/2010	9:31:10 AM	SiCl4 pre valve closed
8/6/2010	9:31:10 AM	SiCl4 post valve closed
8/6/2010	9:31:10 AM	Main Vac valve closed
8/6/2010	9:31:10 AM	Bubbler valve closed
8/6/2010	9:31:10 AM	Bypass valve opened
8/6/2010	9:31:10 AM	Helium MFC set to  0.000000
8/6/2010	9:31:10 AM	H2 MFC set to  0.000000
8/6/2010	9:31:10 AM	BCl3 MFC set to  0.000000
8/6/2010	9:31:10 AM	PHl3 MFC set to  0.000000
8/6/2010	9:31:10 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:31:10 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:31:10 AM	Tube furnace set to 0
8/6/2010	9:31:10 AM	Helium valve closed
8/6/2010	9:31:10 AM	H2 valve closed
8/6/2010	9:31:10 AM	BCl3 valve closed
8/6/2010	9:31:10 AM	PH3 valve closed
8/6/2010	9:31:10 AM	SiCl4 pre valve closed
8/6/2010	9:31:10 AM	SiCl4 post valve closed
8/6/2010	9:31:10 AM	Bubbler valve closed
8/6/2010	9:31:10 AM	Main Vac valve opened
8/6/2010	9:31:10 AM	Bypass valve opened
8/6/2010	9:31:10 AM	Helium MFC set to  0.000000
8/6/2010	9:31:10 AM	H2 MFC set to  0.000000
8/6/2010	9:31:10 AM	BCl3 MFC set to  0.000000
8/6/2010	9:31:10 AM	PHl3 MFC set to  0.000000
8/6/2010	9:31:10 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:31:10 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:31:10 AM	Tube furnace set to 0
8/6/2010	9:32:10 AM	H2 valve closed
8/6/2010	9:32:10 AM	BCl3 valve closed
8/6/2010	9:32:10 AM	PH3 valve closed
8/6/2010	9:32:10 AM	SiCl4 pre valve closed
8/6/2010	9:32:10 AM	SiCl4 post valve closed
8/6/2010	9:32:10 AM	Bubbler valve closed
8/6/2010	9:32:10 AM	Helium valve opened
8/6/2010	9:32:10 AM	Main Vac valve opened
8/6/2010	9:32:10 AM	Bypass valve opened
8/6/2010	9:32:10 AM	Helium MFC set to  100.000000
8/6/2010	9:32:10 AM	H2 MFC set to  0.000000
8/6/2010	9:32:10 AM	BCl3 MFC set to  0.000000
8/6/2010	9:32:10 AM	PHl3 MFC set to  0.000000
8/6/2010	9:32:10 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:32:10 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:32:10 AM	Tube furnace set to 0
8/6/2010	9:41:10 AM	Helium valve closed
8/6/2010	9:41:10 AM	H2 valve closed
8/6/2010	9:41:10 AM	BCl3 valve closed
8/6/2010	9:41:10 AM	PH3 valve closed
8/6/2010	9:41:10 AM	SiCl4 pre valve closed
8/6/2010	9:41:10 AM	SiCl4 post valve closed
8/6/2010	9:41:10 AM	Bubbler valve closed
8/6/2010	9:41:10 AM	Main Vac valve opened
8/6/2010	9:41:10 AM	Bypass valve opened
8/6/2010	9:41:10 AM	Helium MFC set to  0.000000
8/6/2010	9:41:10 AM	H2 MFC set to  0.000000
8/6/2010	9:41:10 AM	BCl3 MFC set to  0.000000
8/6/2010	9:41:10 AM	PHl3 MFC set to  0.000000
8/6/2010	9:41:10 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:41:10 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:41:11 AM	Tube furnace set to 0
8/6/2010	9:42:11 AM	H2 valve closed
8/6/2010	9:42:11 AM	BCl3 valve closed
8/6/2010	9:42:11 AM	PH3 valve closed
8/6/2010	9:42:11 AM	SiCl4 pre valve closed
8/6/2010	9:42:11 AM	SiCl4 post valve closed
8/6/2010	9:42:11 AM	Bubbler valve closed
8/6/2010	9:42:11 AM	Helium valve opened
8/6/2010	9:42:11 AM	Main Vac valve opened
8/6/2010	9:42:11 AM	Bypass valve opened
8/6/2010	9:42:11 AM	Helium MFC set to  100.000000
8/6/2010	9:42:11 AM	H2 MFC set to  0.000000
8/6/2010	9:42:11 AM	BCl3 MFC set to  0.000000
8/6/2010	9:42:11 AM	PHl3 MFC set to  0.000000
8/6/2010	9:42:11 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:42:11 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:42:11 AM	Tube furnace set to 0
8/6/2010	9:43:41 AM	Helium valve closed
8/6/2010	9:43:41 AM	H2 valve closed
8/6/2010	9:43:41 AM	BCl3 valve closed
8/6/2010	9:43:41 AM	PH3 valve closed
8/6/2010	9:43:41 AM	SiCl4 pre valve closed
8/6/2010	9:43:41 AM	SiCl4 post valve closed
8/6/2010	9:43:41 AM	Bubbler valve closed
8/6/2010	9:43:41 AM	Main Vac valve opened
8/6/2010	9:43:41 AM	Bypass valve opened
8/6/2010	9:43:41 AM	Helium MFC set to  0.000000
8/6/2010	9:43:41 AM	H2 MFC set to  0.000000
8/6/2010	9:43:41 AM	BCl3 MFC set to  0.000000
8/6/2010	9:43:41 AM	PHl3 MFC set to  0.000000
8/6/2010	9:43:41 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:43:41 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:43:41 AM	Tube furnace set to 0
8/6/2010	9:43:42 AM	H2 valve closed
8/6/2010	9:43:42 AM	BCl3 valve closed
8/6/2010	9:43:42 AM	PH3 valve closed
8/6/2010	9:43:42 AM	SiCl4 pre valve closed
8/6/2010	9:43:42 AM	SiCl4 post valve closed
8/6/2010	9:43:42 AM	Bubbler valve closed
8/6/2010	9:43:42 AM	Helium valve opened
8/6/2010	9:43:42 AM	Main Vac valve opened
8/6/2010	9:43:42 AM	Bypass valve opened
8/6/2010	9:43:42 AM	Helium MFC set to  100.000000
8/6/2010	9:43:42 AM	H2 MFC set to  0.000000
8/6/2010	9:43:42 AM	BCl3 MFC set to  0.000000
8/6/2010	9:43:42 AM	PHl3 MFC set to  0.000000
8/6/2010	9:43:42 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:43:42 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:43:42 AM	Tube furnace set to 0
8/6/2010	9:43:42 AM	Helium valve closed
8/6/2010	9:43:42 AM	H2 valve closed
8/6/2010	9:43:42 AM	BCl3 valve closed
8/6/2010	9:43:42 AM	PH3 valve closed
8/6/2010	9:43:42 AM	SiCl4 pre valve closed
8/6/2010	9:43:42 AM	SiCl4 post valve closed
8/6/2010	9:43:42 AM	Bubbler valve closed
8/6/2010	9:43:42 AM	Main Vac valve opened
8/6/2010	9:43:42 AM	Bypass valve opened
8/6/2010	9:43:42 AM	Helium MFC set to  0.000000
8/6/2010	9:43:42 AM	H2 MFC set to  0.000000
8/6/2010	9:43:42 AM	BCl3 MFC set to  0.000000
8/6/2010	9:43:42 AM	PHl3 MFC set to  0.000000
8/6/2010	9:43:42 AM	SiCl4 MFC set to  0.000000
8/6/2010	9:43:43 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:43:43 AM	Tube furnace set to 0
8/6/2010	9:43:43 AM	Run finished at 9:43 AM
8/6/2010	9:43:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	9:56:00 AM	Bypass valve closed
8/6/2010	9:56:00 AM	Main Vac valve closed
8/6/2010	9:56:26 AM	Bypass valve opened
8/6/2010	9:56:27 AM	Main Vac valve opened
8/6/2010	10:01:36 AM	Recipe started at 10:01 AM
8/6/2010	10:01:36 AM	Helium valve closed
8/6/2010	10:01:36 AM	BCl3 valve closed
8/6/2010	10:01:36 AM	PH3 valve closed
8/6/2010	10:01:36 AM	SiCl4 pre valve closed
8/6/2010	10:01:36 AM	SiCl4 post valve closed
8/6/2010	10:01:36 AM	Main Vac valve closed
8/6/2010	10:01:36 AM	Bypass valve closed
8/6/2010	10:01:36 AM	Bubbler valve closed
8/6/2010	10:01:36 AM	H2 valve opened
8/6/2010	10:01:36 AM	Helium MFC set to  0.000000
8/6/2010	10:01:36 AM	H2 MFC set to  500.000000
8/6/2010	10:01:36 AM	BCl3 MFC set to  0.000000
8/6/2010	10:01:36 AM	PHl3 MFC set to  0.000000
8/6/2010	10:01:36 AM	SiCl4 MFC set to  0.000000
8/6/2010	10:01:36 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:01:36 AM	Tube furnace set to 0
8/6/2010	10:02:59 AM	Helium valve closed
8/6/2010	10:02:59 AM	BCl3 valve closed
8/6/2010	10:02:59 AM	PH3 valve closed
8/6/2010	10:02:59 AM	SiCl4 pre valve closed
8/6/2010	10:02:59 AM	SiCl4 post valve closed
8/6/2010	10:02:59 AM	Main Vac valve closed
8/6/2010	10:02:59 AM	Bypass valve closed
8/6/2010	10:02:59 AM	H2 valve opened
8/6/2010	10:02:59 AM	Bubbler valve opened
8/6/2010	10:02:59 AM	Helium MFC set to  0.000000
8/6/2010	10:02:59 AM	H2 MFC set to  500.000000
8/6/2010	10:02:59 AM	BCl3 MFC set to  0.000000
8/6/2010	10:02:59 AM	PHl3 MFC set to  0.000000
8/6/2010	10:02:59 AM	SiCl4 MFC set to  0.000000
8/6/2010	10:02:59 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:02:59 AM	Tube furnace set to 1000
8/6/2010	10:22:59 AM	Helium valve closed
8/6/2010	10:22:59 AM	PH3 valve closed
8/6/2010	10:22:59 AM	Main Vac valve closed
8/6/2010	10:22:59 AM	Bypass valve closed
8/6/2010	10:22:59 AM	H2 valve opened
8/6/2010	10:22:59 AM	BCl3 valve opened
8/6/2010	10:22:59 AM	SiCl4 pre valve opened
8/6/2010	10:22:59 AM	SiCl4 post valve opened
8/6/2010	10:22:59 AM	Bubbler valve opened
8/6/2010	10:22:59 AM	Helium MFC set to  0.000000
8/6/2010	10:22:59 AM	H2 MFC set to  500.000000
8/6/2010	10:22:59 AM	BCl3 MFC set to  6.000000
8/6/2010	10:22:59 AM	PHl3 MFC set to  0.000000
8/6/2010	10:22:59 AM	SiCl4 MFC set to  50.000000
8/6/2010	10:22:59 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:22:59 AM	Tube furnace set to 1000
8/6/2010	10:42:59 AM	H2 valve closed
8/6/2010	10:42:59 AM	BCl3 valve closed
8/6/2010	10:42:59 AM	PH3 valve closed
8/6/2010	10:42:59 AM	SiCl4 pre valve closed
8/6/2010	10:42:59 AM	SiCl4 post valve closed
8/6/2010	10:42:59 AM	Main Vac valve closed
8/6/2010	10:42:59 AM	Bypass valve closed
8/6/2010	10:42:59 AM	Helium valve opened
8/6/2010	10:42:59 AM	Bubbler valve opened
8/6/2010	10:42:59 AM	Helium MFC set to  500.000000
8/6/2010	10:42:59 AM	H2 MFC set to  0.000000
8/6/2010	10:42:59 AM	BCl3 MFC set to  0.000000
8/6/2010	10:42:59 AM	PHl3 MFC set to  0.000000
8/6/2010	10:42:59 AM	SiCl4 MFC set to  0.000000
8/6/2010	10:42:59 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:42:59 AM	Tube furnace set to 0
8/6/2010	11:02:59 AM	Helium valve closed
8/6/2010	11:02:59 AM	H2 valve closed
8/6/2010	11:02:59 AM	BCl3 valve closed
8/6/2010	11:02:59 AM	PH3 valve closed
8/6/2010	11:02:59 AM	SiCl4 pre valve closed
8/6/2010	11:02:59 AM	SiCl4 post valve closed
8/6/2010	11:02:59 AM	Main Vac valve closed
8/6/2010	11:02:59 AM	Bypass valve closed
8/6/2010	11:02:59 AM	Bubbler valve closed
8/6/2010	11:02:59 AM	Helium MFC set to  0.000000
8/6/2010	11:02:59 AM	H2 MFC set to  0.000000
8/6/2010	11:02:59 AM	BCl3 MFC set to  0.000000
8/6/2010	11:02:59 AM	PHl3 MFC set to  0.000000
8/6/2010	11:02:59 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:02:59 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:02:59 AM	Tube furnace set to 0
8/6/2010	11:02:59 AM	Run finished at 11:02 AM
8/6/2010	11:09:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	11:09:27 AM	Recipe started at 11:09 AM
8/6/2010	11:09:27 AM	Helium valve closed
8/6/2010	11:09:27 AM	H2 valve closed
8/6/2010	11:09:27 AM	BCl3 valve closed
8/6/2010	11:09:27 AM	PH3 valve closed
8/6/2010	11:09:27 AM	SiCl4 pre valve closed
8/6/2010	11:09:27 AM	SiCl4 post valve closed
8/6/2010	11:09:27 AM	Main Vac valve closed
8/6/2010	11:09:27 AM	Bubbler valve closed
8/6/2010	11:09:27 AM	Bypass valve opened
8/6/2010	11:09:27 AM	Helium MFC set to  0.000000
8/6/2010	11:09:27 AM	H2 MFC set to  0.000000
8/6/2010	11:09:27 AM	BCl3 MFC set to  0.000000
8/6/2010	11:09:27 AM	PHl3 MFC set to  0.000000
8/6/2010	11:09:27 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:09:27 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:09:27 AM	Tube furnace set to 0
8/6/2010	11:10:07 AM	Helium valve closed
8/6/2010	11:10:07 AM	H2 valve closed
8/6/2010	11:10:07 AM	BCl3 valve closed
8/6/2010	11:10:07 AM	PH3 valve closed
8/6/2010	11:10:07 AM	SiCl4 pre valve closed
8/6/2010	11:10:07 AM	SiCl4 post valve closed
8/6/2010	11:10:07 AM	Bubbler valve closed
8/6/2010	11:10:07 AM	Main Vac valve opened
8/6/2010	11:10:07 AM	Bypass valve opened
8/6/2010	11:10:07 AM	Helium MFC set to  0.000000
8/6/2010	11:10:07 AM	H2 MFC set to  0.000000
8/6/2010	11:10:07 AM	BCl3 MFC set to  0.000000
8/6/2010	11:10:07 AM	PHl3 MFC set to  0.000000
8/6/2010	11:10:07 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:10:07 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:10:07 AM	Tube furnace set to 0
8/6/2010	11:10:07 AM	Run finished at 11:10 AM
8/6/2010	11:10:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	11:23:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	11:23:29 AM	Recipe started at 11:23 AM
8/6/2010	11:23:29 AM	Helium valve closed
8/6/2010	11:23:29 AM	H2 valve closed
8/6/2010	11:23:29 AM	BCl3 valve closed
8/6/2010	11:23:29 AM	PH3 valve closed
8/6/2010	11:23:29 AM	SiCl4 pre valve closed
8/6/2010	11:23:29 AM	SiCl4 post valve closed
8/6/2010	11:23:29 AM	Main Vac valve closed
8/6/2010	11:23:29 AM	Bubbler valve closed
8/6/2010	11:23:29 AM	Bypass valve opened
8/6/2010	11:23:29 AM	Helium MFC set to  0.000000
8/6/2010	11:23:29 AM	H2 MFC set to  0.000000
8/6/2010	11:23:29 AM	BCl3 MFC set to  0.000000
8/6/2010	11:23:29 AM	PHl3 MFC set to  0.000000
8/6/2010	11:23:29 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:23:29 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:23:29 AM	Tube furnace set to 0
8/6/2010	11:23:29 AM	Helium valve closed
8/6/2010	11:23:29 AM	H2 valve closed
8/6/2010	11:23:29 AM	BCl3 valve closed
8/6/2010	11:23:29 AM	PH3 valve closed
8/6/2010	11:23:29 AM	SiCl4 pre valve closed
8/6/2010	11:23:29 AM	SiCl4 post valve closed
8/6/2010	11:23:29 AM	Bubbler valve closed
8/6/2010	11:23:29 AM	Main Vac valve opened
8/6/2010	11:23:29 AM	Bypass valve opened
8/6/2010	11:23:29 AM	Helium MFC set to  0.000000
8/6/2010	11:23:29 AM	H2 MFC set to  0.000000
8/6/2010	11:23:29 AM	BCl3 MFC set to  0.000000
8/6/2010	11:23:29 AM	PHl3 MFC set to  0.000000
8/6/2010	11:23:29 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:23:29 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:23:30 AM	Tube furnace set to 0
8/6/2010	11:23:37 AM	Run aborted at 11:23 AM
8/6/2010	11:23:37 AM	Helium valve closed
8/6/2010	11:23:37 AM	H2 valve closed
8/6/2010	11:23:37 AM	BCl3 valve closed
8/6/2010	11:23:37 AM	PH3 valve closed
8/6/2010	11:23:37 AM	SiCl4 pre valve closed
8/6/2010	11:23:37 AM	SiCl4 post valve closed
8/6/2010	11:23:37 AM	Bypass valve closed
8/6/2010	11:23:37 AM	Main Vac valve closed
8/6/2010	11:23:37 AM	Bubbler valve closed
8/6/2010	11:23:37 AM	Helium MFC set to  0.000000
8/6/2010	11:23:37 AM	H2 MFC set to  0.000000
8/6/2010	11:23:37 AM	BCl3 MFC set to  0.000000
8/6/2010	11:23:37 AM	PHl3 MFC set to  0.000000
8/6/2010	11:23:37 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:23:37 AM	Tube furnace set to 0
8/6/2010	11:23:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	11:23:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	11:23:41 AM	Recipe started at 11:23 AM
8/6/2010	11:23:41 AM	Helium valve closed
8/6/2010	11:23:41 AM	H2 valve closed
8/6/2010	11:23:41 AM	BCl3 valve closed
8/6/2010	11:23:41 AM	PH3 valve closed
8/6/2010	11:23:41 AM	SiCl4 pre valve closed
8/6/2010	11:23:41 AM	SiCl4 post valve closed
8/6/2010	11:23:41 AM	Main Vac valve closed
8/6/2010	11:23:41 AM	Bubbler valve closed
8/6/2010	11:23:41 AM	Bypass valve opened
8/6/2010	11:23:41 AM	Helium MFC set to  0.000000
8/6/2010	11:23:41 AM	H2 MFC set to  0.000000
8/6/2010	11:23:41 AM	BCl3 MFC set to  0.000000
8/6/2010	11:23:41 AM	PHl3 MFC set to  0.000000
8/6/2010	11:23:41 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:23:41 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:23:41 AM	Tube furnace set to 0
8/6/2010	11:23:41 AM	Helium valve closed
8/6/2010	11:23:41 AM	H2 valve closed
8/6/2010	11:23:41 AM	BCl3 valve closed
8/6/2010	11:23:41 AM	PH3 valve closed
8/6/2010	11:23:41 AM	SiCl4 pre valve closed
8/6/2010	11:23:41 AM	SiCl4 post valve closed
8/6/2010	11:23:41 AM	Bubbler valve closed
8/6/2010	11:23:41 AM	Main Vac valve opened
8/6/2010	11:23:41 AM	Bypass valve opened
8/6/2010	11:23:41 AM	Helium MFC set to  0.000000
8/6/2010	11:23:41 AM	H2 MFC set to  0.000000
8/6/2010	11:23:41 AM	BCl3 MFC set to  0.000000
8/6/2010	11:23:41 AM	PHl3 MFC set to  0.000000
8/6/2010	11:23:41 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:23:41 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:23:41 AM	Tube furnace set to 0
8/6/2010	11:23:41 AM	Run finished at 11:23 AM
8/6/2010	11:23:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	11:23:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	11:24:00 AM	Recipe started at 11:23 AM
8/6/2010	11:24:00 AM	Helium valve closed
8/6/2010	11:24:00 AM	H2 valve closed
8/6/2010	11:24:01 AM	BCl3 valve closed
8/6/2010	11:24:01 AM	PH3 valve closed
8/6/2010	11:24:01 AM	SiCl4 pre valve closed
8/6/2010	11:24:01 AM	SiCl4 post valve closed
8/6/2010	11:24:01 AM	Main Vac valve closed
8/6/2010	11:24:01 AM	Bubbler valve closed
8/6/2010	11:24:01 AM	Bypass valve opened
8/6/2010	11:24:01 AM	Helium MFC set to  0.000000
8/6/2010	11:24:01 AM	H2 MFC set to  0.000000
8/6/2010	11:24:01 AM	BCl3 MFC set to  0.000000
8/6/2010	11:24:01 AM	PHl3 MFC set to  0.000000
8/6/2010	11:24:01 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:24:01 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:24:01 AM	Tube furnace set to 0
8/6/2010	11:24:01 AM	Helium valve closed
8/6/2010	11:24:01 AM	H2 valve closed
8/6/2010	11:24:01 AM	BCl3 valve closed
8/6/2010	11:24:01 AM	PH3 valve closed
8/6/2010	11:24:01 AM	SiCl4 pre valve closed
8/6/2010	11:24:01 AM	SiCl4 post valve closed
8/6/2010	11:24:01 AM	Bubbler valve closed
8/6/2010	11:24:01 AM	Main Vac valve opened
8/6/2010	11:24:01 AM	Bypass valve opened
8/6/2010	11:24:01 AM	Helium MFC set to  0.000000
8/6/2010	11:24:01 AM	H2 MFC set to  0.000000
8/6/2010	11:24:01 AM	BCl3 MFC set to  0.000000
8/6/2010	11:24:01 AM	PHl3 MFC set to  0.000000
8/6/2010	11:24:01 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:24:01 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:24:01 AM	Tube furnace set to 0
8/6/2010	11:25:01 AM	H2 valve closed
8/6/2010	11:25:01 AM	BCl3 valve closed
8/6/2010	11:25:01 AM	PH3 valve closed
8/6/2010	11:25:01 AM	SiCl4 pre valve closed
8/6/2010	11:25:01 AM	SiCl4 post valve closed
8/6/2010	11:25:01 AM	Bubbler valve closed
8/6/2010	11:25:01 AM	Helium valve opened
8/6/2010	11:25:01 AM	Main Vac valve opened
8/6/2010	11:25:01 AM	Bypass valve opened
8/6/2010	11:25:01 AM	Helium MFC set to  100.000000
8/6/2010	11:25:01 AM	H2 MFC set to  0.000000
8/6/2010	11:25:01 AM	BCl3 MFC set to  0.000000
8/6/2010	11:25:01 AM	PHl3 MFC set to  0.000000
8/6/2010	11:25:01 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:25:01 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:25:01 AM	Tube furnace set to 0
8/6/2010	11:34:01 AM	Helium valve closed
8/6/2010	11:34:01 AM	H2 valve closed
8/6/2010	11:34:01 AM	BCl3 valve closed
8/6/2010	11:34:01 AM	PH3 valve closed
8/6/2010	11:34:01 AM	SiCl4 pre valve closed
8/6/2010	11:34:01 AM	SiCl4 post valve closed
8/6/2010	11:34:01 AM	Bubbler valve closed
8/6/2010	11:34:01 AM	Main Vac valve opened
8/6/2010	11:34:01 AM	Bypass valve opened
8/6/2010	11:34:01 AM	Helium MFC set to  0.000000
8/6/2010	11:34:01 AM	H2 MFC set to  0.000000
8/6/2010	11:34:01 AM	BCl3 MFC set to  0.000000
8/6/2010	11:34:01 AM	PHl3 MFC set to  0.000000
8/6/2010	11:34:01 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:34:01 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:34:01 AM	Tube furnace set to 0
8/6/2010	11:35:02 AM	H2 valve closed
8/6/2010	11:35:02 AM	BCl3 valve closed
8/6/2010	11:35:02 AM	PH3 valve closed
8/6/2010	11:35:02 AM	SiCl4 pre valve closed
8/6/2010	11:35:02 AM	SiCl4 post valve closed
8/6/2010	11:35:02 AM	Bubbler valve closed
8/6/2010	11:35:02 AM	Helium valve opened
8/6/2010	11:35:02 AM	Main Vac valve opened
8/6/2010	11:35:02 AM	Bypass valve opened
8/6/2010	11:35:02 AM	Helium MFC set to  100.000000
8/6/2010	11:35:02 AM	H2 MFC set to  0.000000
8/6/2010	11:35:02 AM	BCl3 MFC set to  0.000000
8/6/2010	11:35:02 AM	PHl3 MFC set to  0.000000
8/6/2010	11:35:02 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:35:02 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:35:02 AM	Tube furnace set to 0
8/6/2010	11:44:02 AM	Helium valve closed
8/6/2010	11:44:02 AM	H2 valve closed
8/6/2010	11:44:02 AM	BCl3 valve closed
8/6/2010	11:44:02 AM	PH3 valve closed
8/6/2010	11:44:02 AM	SiCl4 pre valve closed
8/6/2010	11:44:02 AM	SiCl4 post valve closed
8/6/2010	11:44:02 AM	Bubbler valve closed
8/6/2010	11:44:02 AM	Main Vac valve opened
8/6/2010	11:44:02 AM	Bypass valve opened
8/6/2010	11:44:02 AM	Helium MFC set to  0.000000
8/6/2010	11:44:02 AM	H2 MFC set to  0.000000
8/6/2010	11:44:02 AM	BCl3 MFC set to  0.000000
8/6/2010	11:44:02 AM	PHl3 MFC set to  0.000000
8/6/2010	11:44:02 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:44:02 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:44:02 AM	Tube furnace set to 0
8/6/2010	11:45:02 AM	H2 valve closed
8/6/2010	11:45:02 AM	BCl3 valve closed
8/6/2010	11:45:02 AM	PH3 valve closed
8/6/2010	11:45:02 AM	SiCl4 pre valve closed
8/6/2010	11:45:02 AM	SiCl4 post valve closed
8/6/2010	11:45:02 AM	Bubbler valve closed
8/6/2010	11:45:02 AM	Helium valve opened
8/6/2010	11:45:02 AM	Main Vac valve opened
8/6/2010	11:45:02 AM	Bypass valve opened
8/6/2010	11:45:02 AM	Helium MFC set to  100.000000
8/6/2010	11:45:02 AM	H2 MFC set to  0.000000
8/6/2010	11:45:02 AM	BCl3 MFC set to  0.000000
8/6/2010	11:45:02 AM	PHl3 MFC set to  0.000000
8/6/2010	11:45:02 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:45:02 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:45:02 AM	Tube furnace set to 0
8/6/2010	11:54:02 AM	Helium valve closed
8/6/2010	11:54:02 AM	H2 valve closed
8/6/2010	11:54:02 AM	BCl3 valve closed
8/6/2010	11:54:02 AM	PH3 valve closed
8/6/2010	11:54:02 AM	SiCl4 pre valve closed
8/6/2010	11:54:02 AM	SiCl4 post valve closed
8/6/2010	11:54:02 AM	Bubbler valve closed
8/6/2010	11:54:02 AM	Main Vac valve opened
8/6/2010	11:54:02 AM	Bypass valve opened
8/6/2010	11:54:02 AM	Helium MFC set to  0.000000
8/6/2010	11:54:02 AM	H2 MFC set to  0.000000
8/6/2010	11:54:02 AM	BCl3 MFC set to  0.000000
8/6/2010	11:54:02 AM	PHl3 MFC set to  0.000000
8/6/2010	11:54:02 AM	SiCl4 MFC set to  0.000000
8/6/2010	11:54:02 AM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:54:02 AM	Tube furnace set to 0
8/6/2010	11:54:03 AM	Run finished at 11:54 AM
8/6/2010	11:54:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	12:01:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	12:01:31 PM	Recipe started at 12:01 PM
8/6/2010	12:01:31 PM	Helium valve closed
8/6/2010	12:01:31 PM	H2 valve closed
8/6/2010	12:01:31 PM	BCl3 valve closed
8/6/2010	12:01:31 PM	PH3 valve closed
8/6/2010	12:01:31 PM	SiCl4 pre valve closed
8/6/2010	12:01:31 PM	SiCl4 post valve closed
8/6/2010	12:01:31 PM	Main Vac valve closed
8/6/2010	12:01:31 PM	Bubbler valve closed
8/6/2010	12:01:31 PM	Bypass valve opened
8/6/2010	12:01:31 PM	Helium MFC set to  0.000000
8/6/2010	12:01:31 PM	H2 MFC set to  0.000000
8/6/2010	12:01:31 PM	BCl3 MFC set to  0.000000
8/6/2010	12:01:31 PM	PHl3 MFC set to  0.000000
8/6/2010	12:01:31 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:01:31 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:01:31 PM	Tube furnace set to 0
8/6/2010	12:01:31 PM	Helium valve closed
8/6/2010	12:01:31 PM	H2 valve closed
8/6/2010	12:01:31 PM	BCl3 valve closed
8/6/2010	12:01:31 PM	PH3 valve closed
8/6/2010	12:01:31 PM	SiCl4 pre valve closed
8/6/2010	12:01:31 PM	SiCl4 post valve closed
8/6/2010	12:01:31 PM	Bubbler valve closed
8/6/2010	12:01:31 PM	Main Vac valve opened
8/6/2010	12:01:31 PM	Bypass valve opened
8/6/2010	12:01:31 PM	Helium MFC set to  0.000000
8/6/2010	12:01:31 PM	H2 MFC set to  0.000000
8/6/2010	12:01:31 PM	BCl3 MFC set to  0.000000
8/6/2010	12:01:31 PM	PHl3 MFC set to  0.000000
8/6/2010	12:01:31 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:01:31 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:01:31 PM	Tube furnace set to 0
8/6/2010	12:02:31 PM	H2 valve closed
8/6/2010	12:02:31 PM	BCl3 valve closed
8/6/2010	12:02:31 PM	PH3 valve closed
8/6/2010	12:02:31 PM	SiCl4 pre valve closed
8/6/2010	12:02:31 PM	SiCl4 post valve closed
8/6/2010	12:02:31 PM	Bubbler valve closed
8/6/2010	12:02:31 PM	Helium valve opened
8/6/2010	12:02:31 PM	Main Vac valve opened
8/6/2010	12:02:31 PM	Bypass valve opened
8/6/2010	12:02:31 PM	Helium MFC set to  100.000000
8/6/2010	12:02:31 PM	H2 MFC set to  0.000000
8/6/2010	12:02:31 PM	BCl3 MFC set to  0.000000
8/6/2010	12:02:31 PM	PHl3 MFC set to  0.000000
8/6/2010	12:02:31 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:02:31 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:02:32 PM	Tube furnace set to 0
8/6/2010	12:10:08 PM	Helium valve closed
8/6/2010	12:10:08 PM	H2 valve closed
8/6/2010	12:10:08 PM	BCl3 valve closed
8/6/2010	12:10:08 PM	PH3 valve closed
8/6/2010	12:10:08 PM	SiCl4 pre valve closed
8/6/2010	12:10:08 PM	SiCl4 post valve closed
8/6/2010	12:10:08 PM	Bubbler valve closed
8/6/2010	12:10:08 PM	Main Vac valve opened
8/6/2010	12:10:08 PM	Bypass valve opened
8/6/2010	12:10:08 PM	Helium MFC set to  0.000000
8/6/2010	12:10:08 PM	H2 MFC set to  0.000000
8/6/2010	12:10:08 PM	BCl3 MFC set to  0.000000
8/6/2010	12:10:08 PM	PHl3 MFC set to  0.000000
8/6/2010	12:10:08 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:10:08 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:10:08 PM	Tube furnace set to 0
8/6/2010	12:10:09 PM	H2 valve closed
8/6/2010	12:10:09 PM	BCl3 valve closed
8/6/2010	12:10:09 PM	PH3 valve closed
8/6/2010	12:10:09 PM	SiCl4 pre valve closed
8/6/2010	12:10:09 PM	SiCl4 post valve closed
8/6/2010	12:10:09 PM	Bubbler valve closed
8/6/2010	12:10:09 PM	Helium valve opened
8/6/2010	12:10:09 PM	Main Vac valve opened
8/6/2010	12:10:09 PM	Bypass valve opened
8/6/2010	12:10:09 PM	Helium MFC set to  100.000000
8/6/2010	12:10:09 PM	H2 MFC set to  0.000000
8/6/2010	12:10:09 PM	BCl3 MFC set to  0.000000
8/6/2010	12:10:09 PM	PHl3 MFC set to  0.000000
8/6/2010	12:10:09 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:10:09 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:10:09 PM	Tube furnace set to 0
8/6/2010	12:10:09 PM	Helium valve closed
8/6/2010	12:10:09 PM	H2 valve closed
8/6/2010	12:10:09 PM	BCl3 valve closed
8/6/2010	12:10:09 PM	PH3 valve closed
8/6/2010	12:10:09 PM	SiCl4 pre valve closed
8/6/2010	12:10:09 PM	SiCl4 post valve closed
8/6/2010	12:10:09 PM	Bubbler valve closed
8/6/2010	12:10:09 PM	Main Vac valve opened
8/6/2010	12:10:09 PM	Bypass valve opened
8/6/2010	12:10:09 PM	Helium MFC set to  0.000000
8/6/2010	12:10:09 PM	H2 MFC set to  0.000000
8/6/2010	12:10:09 PM	BCl3 MFC set to  0.000000
8/6/2010	12:10:09 PM	PHl3 MFC set to  0.000000
8/6/2010	12:10:10 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:10:10 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:10:10 PM	Tube furnace set to 0
8/6/2010	12:10:10 PM	H2 valve closed
8/6/2010	12:10:10 PM	BCl3 valve closed
8/6/2010	12:10:10 PM	PH3 valve closed
8/6/2010	12:10:10 PM	SiCl4 pre valve closed
8/6/2010	12:10:10 PM	SiCl4 post valve closed
8/6/2010	12:10:10 PM	Bubbler valve closed
8/6/2010	12:10:10 PM	Helium valve opened
8/6/2010	12:10:10 PM	Main Vac valve opened
8/6/2010	12:10:10 PM	Bypass valve opened
8/6/2010	12:10:10 PM	Helium MFC set to  100.000000
8/6/2010	12:10:10 PM	H2 MFC set to  0.000000
8/6/2010	12:10:10 PM	BCl3 MFC set to  0.000000
8/6/2010	12:10:10 PM	PHl3 MFC set to  0.000000
8/6/2010	12:10:10 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:10:10 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:10:10 PM	Tube furnace set to 0
8/6/2010	12:10:10 PM	Helium valve closed
8/6/2010	12:10:10 PM	H2 valve closed
8/6/2010	12:10:10 PM	BCl3 valve closed
8/6/2010	12:10:10 PM	PH3 valve closed
8/6/2010	12:10:10 PM	SiCl4 pre valve closed
8/6/2010	12:10:10 PM	SiCl4 post valve closed
8/6/2010	12:10:10 PM	Bubbler valve closed
8/6/2010	12:10:10 PM	Main Vac valve opened
8/6/2010	12:10:10 PM	Bypass valve opened
8/6/2010	12:10:10 PM	Helium MFC set to  0.000000
8/6/2010	12:10:10 PM	H2 MFC set to  0.000000
8/6/2010	12:10:10 PM	BCl3 MFC set to  0.000000
8/6/2010	12:10:10 PM	PHl3 MFC set to  0.000000
8/6/2010	12:10:10 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:10:10 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:10:11 PM	Tube furnace set to 0
8/6/2010	12:10:11 PM	Run finished at 12:10 PM
8/6/2010	12:10:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	12:16:00 PM	Bypass valve closed
8/6/2010	12:16:00 PM	Main Vac valve closed
8/6/2010	12:16:20 PM	Bypass valve opened
8/6/2010	12:16:20 PM	Main Vac valve opened
8/6/2010	12:17:58 PM	Recipe started at 12:17 PM
8/6/2010	12:17:58 PM	Helium valve closed
8/6/2010	12:17:58 PM	BCl3 valve closed
8/6/2010	12:17:58 PM	PH3 valve closed
8/6/2010	12:17:58 PM	SiCl4 pre valve closed
8/6/2010	12:17:58 PM	SiCl4 post valve closed
8/6/2010	12:17:58 PM	Main Vac valve closed
8/6/2010	12:17:58 PM	Bypass valve closed
8/6/2010	12:17:58 PM	Bubbler valve closed
8/6/2010	12:17:58 PM	H2 valve opened
8/6/2010	12:17:58 PM	Helium MFC set to  0.000000
8/6/2010	12:17:58 PM	H2 MFC set to  500.000000
8/6/2010	12:17:58 PM	BCl3 MFC set to  0.000000
8/6/2010	12:17:58 PM	PHl3 MFC set to  0.000000
8/6/2010	12:17:58 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:17:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:17:58 PM	Tube furnace set to 0
8/6/2010	12:19:18 PM	Helium valve closed
8/6/2010	12:19:18 PM	BCl3 valve closed
8/6/2010	12:19:18 PM	PH3 valve closed
8/6/2010	12:19:18 PM	SiCl4 pre valve closed
8/6/2010	12:19:18 PM	SiCl4 post valve closed
8/6/2010	12:19:18 PM	Main Vac valve closed
8/6/2010	12:19:18 PM	Bypass valve closed
8/6/2010	12:19:18 PM	H2 valve opened
8/6/2010	12:19:18 PM	Bubbler valve opened
8/6/2010	12:19:18 PM	Helium MFC set to  0.000000
8/6/2010	12:19:18 PM	H2 MFC set to  500.000000
8/6/2010	12:19:18 PM	BCl3 MFC set to  0.000000
8/6/2010	12:19:18 PM	PHl3 MFC set to  0.000000
8/6/2010	12:19:18 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:19:18 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:19:19 PM	Tube furnace set to 1000
8/6/2010	12:39:19 PM	Helium valve closed
8/6/2010	12:39:19 PM	PH3 valve closed
8/6/2010	12:39:19 PM	Main Vac valve closed
8/6/2010	12:39:19 PM	Bypass valve closed
8/6/2010	12:39:19 PM	H2 valve opened
8/6/2010	12:39:19 PM	BCl3 valve opened
8/6/2010	12:39:19 PM	SiCl4 pre valve opened
8/6/2010	12:39:19 PM	SiCl4 post valve opened
8/6/2010	12:39:19 PM	Bubbler valve opened
8/6/2010	12:39:19 PM	Helium MFC set to  0.000000
8/6/2010	12:39:19 PM	H2 MFC set to  500.000000
8/6/2010	12:39:19 PM	BCl3 MFC set to  6.000000
8/6/2010	12:39:19 PM	PHl3 MFC set to  0.000000
8/6/2010	12:39:19 PM	SiCl4 MFC set to  50.000000
8/6/2010	12:39:19 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:39:19 PM	Tube furnace set to 1000
8/6/2010	12:59:19 PM	H2 valve closed
8/6/2010	12:59:19 PM	BCl3 valve closed
8/6/2010	12:59:19 PM	PH3 valve closed
8/6/2010	12:59:19 PM	SiCl4 pre valve closed
8/6/2010	12:59:19 PM	SiCl4 post valve closed
8/6/2010	12:59:19 PM	Main Vac valve closed
8/6/2010	12:59:19 PM	Bypass valve closed
8/6/2010	12:59:19 PM	Helium valve opened
8/6/2010	12:59:19 PM	Bubbler valve opened
8/6/2010	12:59:19 PM	Helium MFC set to  500.000000
8/6/2010	12:59:19 PM	H2 MFC set to  0.000000
8/6/2010	12:59:19 PM	BCl3 MFC set to  0.000000
8/6/2010	12:59:19 PM	PHl3 MFC set to  0.000000
8/6/2010	12:59:19 PM	SiCl4 MFC set to  0.000000
8/6/2010	12:59:19 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	12:59:19 PM	Tube furnace set to 0
8/6/2010	1:19:19 PM	Helium valve closed
8/6/2010	1:19:19 PM	H2 valve closed
8/6/2010	1:19:19 PM	BCl3 valve closed
8/6/2010	1:19:19 PM	PH3 valve closed
8/6/2010	1:19:19 PM	SiCl4 pre valve closed
8/6/2010	1:19:19 PM	SiCl4 post valve closed
8/6/2010	1:19:19 PM	Main Vac valve closed
8/6/2010	1:19:19 PM	Bypass valve closed
8/6/2010	1:19:19 PM	Bubbler valve closed
8/6/2010	1:19:19 PM	Helium MFC set to  0.000000
8/6/2010	1:19:19 PM	H2 MFC set to  0.000000
8/6/2010	1:19:19 PM	BCl3 MFC set to  0.000000
8/6/2010	1:19:19 PM	PHl3 MFC set to  0.000000
8/6/2010	1:19:19 PM	SiCl4 MFC set to  0.000000
8/6/2010	1:19:19 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	1:19:19 PM	Tube furnace set to 0
8/6/2010	1:19:19 PM	Run finished at 1:19 PM
8/6/2010	1:48:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	1:48:37 PM	Recipe started at 1:48 PM
8/6/2010	1:48:37 PM	H2 valve closed
8/6/2010	1:48:37 PM	BCl3 valve closed
8/6/2010	1:48:37 PM	PH3 valve closed
8/6/2010	1:48:37 PM	SiCl4 pre valve closed
8/6/2010	1:48:37 PM	SiCl4 post valve closed
8/6/2010	1:48:37 PM	Main Vac valve closed
8/6/2010	1:48:37 PM	Bypass valve closed
8/6/2010	1:48:37 PM	Bubbler valve closed
8/6/2010	1:48:37 PM	Helium valve opened
8/6/2010	1:48:37 PM	Helium MFC set to  500.000000
8/6/2010	1:48:37 PM	H2 MFC set to  0.000000
8/6/2010	1:48:37 PM	BCl3 MFC set to  0.000000
8/6/2010	1:48:37 PM	PHl3 MFC set to  0.000000
8/6/2010	1:48:37 PM	SiCl4 MFC set to  0.000000
8/6/2010	1:48:37 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	1:48:37 PM	Tube furnace set to 0
8/6/2010	1:48:39 PM	Helium valve closed
8/6/2010	1:48:39 PM	H2 valve closed
8/6/2010	1:48:39 PM	BCl3 valve closed
8/6/2010	1:48:39 PM	PH3 valve closed
8/6/2010	1:48:39 PM	SiCl4 pre valve closed
8/6/2010	1:48:39 PM	SiCl4 post valve closed
8/6/2010	1:48:39 PM	Main Vac valve closed
8/6/2010	1:48:39 PM	Bypass valve closed
8/6/2010	1:48:39 PM	Bubbler valve closed
8/6/2010	1:48:39 PM	Helium MFC set to  0.000000
8/6/2010	1:48:39 PM	H2 MFC set to  0.000000
8/6/2010	1:48:39 PM	BCl3 MFC set to  0.000000
8/6/2010	1:48:39 PM	PHl3 MFC set to  0.000000
8/6/2010	1:48:39 PM	SiCl4 MFC set to  0.000000
8/6/2010	1:48:39 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	1:48:39 PM	Tube furnace set to 0
8/6/2010	1:48:39 PM	Run finished at 1:48 PM
8/6/2010	1:48:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2010	1:57:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	1:57:44 PM	Recipe started at 1:57 PM
8/6/2010	1:57:44 PM	Helium valve closed
8/6/2010	1:57:44 PM	H2 valve closed
8/6/2010	1:57:44 PM	BCl3 valve closed
8/6/2010	1:57:44 PM	PH3 valve closed
8/6/2010	1:57:44 PM	SiCl4 pre valve closed
8/6/2010	1:57:44 PM	SiCl4 post valve closed
8/6/2010	1:57:44 PM	Main Vac valve closed
8/6/2010	1:57:44 PM	Bubbler valve closed
8/6/2010	1:57:44 PM	Bypass valve opened
8/6/2010	1:57:44 PM	Helium MFC set to  0.000000
8/6/2010	1:57:44 PM	H2 MFC set to  0.000000
8/6/2010	1:57:44 PM	BCl3 MFC set to  0.000000
8/6/2010	1:57:44 PM	PHl3 MFC set to  0.000000
8/6/2010	1:57:44 PM	SiCl4 MFC set to  0.000000
8/6/2010	1:57:44 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	1:57:44 PM	Tube furnace set to 0
8/6/2010	1:58:22 PM	Helium valve closed
8/6/2010	1:58:22 PM	H2 valve closed
8/6/2010	1:58:22 PM	BCl3 valve closed
8/6/2010	1:58:22 PM	PH3 valve closed
8/6/2010	1:58:22 PM	SiCl4 pre valve closed
8/6/2010	1:58:22 PM	SiCl4 post valve closed
8/6/2010	1:58:22 PM	Bubbler valve closed
8/6/2010	1:58:22 PM	Main Vac valve opened
8/6/2010	1:58:22 PM	Bypass valve opened
8/6/2010	1:58:22 PM	Helium MFC set to  0.000000
8/6/2010	1:58:22 PM	H2 MFC set to  0.000000
8/6/2010	1:58:22 PM	BCl3 MFC set to  0.000000
8/6/2010	1:58:22 PM	PHl3 MFC set to  0.000000
8/6/2010	1:58:22 PM	SiCl4 MFC set to  0.000000
8/6/2010	1:58:22 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	1:58:23 PM	Tube furnace set to 0
8/6/2010	1:58:23 PM	Run finished at 1:58 PM
8/6/2010	1:58:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	2:08:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	2:08:52 PM	Recipe started at 2:08 PM
8/6/2010	2:08:52 PM	Helium valve closed
8/6/2010	2:08:52 PM	H2 valve closed
8/6/2010	2:08:52 PM	BCl3 valve closed
8/6/2010	2:08:52 PM	PH3 valve closed
8/6/2010	2:08:52 PM	SiCl4 pre valve closed
8/6/2010	2:08:52 PM	SiCl4 post valve closed
8/6/2010	2:08:52 PM	Main Vac valve closed
8/6/2010	2:08:52 PM	Bubbler valve closed
8/6/2010	2:08:52 PM	Bypass valve opened
8/6/2010	2:08:52 PM	Helium MFC set to  0.000000
8/6/2010	2:08:52 PM	H2 MFC set to  0.000000
8/6/2010	2:08:52 PM	BCl3 MFC set to  0.000000
8/6/2010	2:08:52 PM	PHl3 MFC set to  0.000000
8/6/2010	2:08:52 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:08:52 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:08:53 PM	Tube furnace set to 0
8/6/2010	2:08:53 PM	Helium valve closed
8/6/2010	2:08:53 PM	H2 valve closed
8/6/2010	2:08:53 PM	BCl3 valve closed
8/6/2010	2:08:53 PM	PH3 valve closed
8/6/2010	2:08:53 PM	SiCl4 pre valve closed
8/6/2010	2:08:53 PM	SiCl4 post valve closed
8/6/2010	2:08:53 PM	Bubbler valve closed
8/6/2010	2:08:53 PM	Main Vac valve opened
8/6/2010	2:08:53 PM	Bypass valve opened
8/6/2010	2:08:53 PM	Helium MFC set to  0.000000
8/6/2010	2:08:53 PM	H2 MFC set to  0.000000
8/6/2010	2:08:53 PM	BCl3 MFC set to  0.000000
8/6/2010	2:08:53 PM	PHl3 MFC set to  0.000000
8/6/2010	2:08:53 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:08:53 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:08:53 PM	Tube furnace set to 0
8/6/2010	2:09:53 PM	H2 valve closed
8/6/2010	2:09:53 PM	BCl3 valve closed
8/6/2010	2:09:53 PM	PH3 valve closed
8/6/2010	2:09:53 PM	SiCl4 pre valve closed
8/6/2010	2:09:53 PM	SiCl4 post valve closed
8/6/2010	2:09:53 PM	Bubbler valve closed
8/6/2010	2:09:53 PM	Helium valve opened
8/6/2010	2:09:53 PM	Main Vac valve opened
8/6/2010	2:09:53 PM	Bypass valve opened
8/6/2010	2:09:53 PM	Helium MFC set to  100.000000
8/6/2010	2:09:53 PM	H2 MFC set to  0.000000
8/6/2010	2:09:53 PM	BCl3 MFC set to  0.000000
8/6/2010	2:09:53 PM	PHl3 MFC set to  0.000000
8/6/2010	2:09:53 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:09:53 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:09:53 PM	Tube furnace set to 0
8/6/2010	2:18:53 PM	Helium valve closed
8/6/2010	2:18:53 PM	H2 valve closed
8/6/2010	2:18:53 PM	BCl3 valve closed
8/6/2010	2:18:53 PM	PH3 valve closed
8/6/2010	2:18:53 PM	SiCl4 pre valve closed
8/6/2010	2:18:53 PM	SiCl4 post valve closed
8/6/2010	2:18:53 PM	Bubbler valve closed
8/6/2010	2:18:53 PM	Main Vac valve opened
8/6/2010	2:18:53 PM	Bypass valve opened
8/6/2010	2:18:53 PM	Helium MFC set to  0.000000
8/6/2010	2:18:53 PM	H2 MFC set to  0.000000
8/6/2010	2:18:53 PM	BCl3 MFC set to  0.000000
8/6/2010	2:18:53 PM	PHl3 MFC set to  0.000000
8/6/2010	2:18:53 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:18:53 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:18:53 PM	Tube furnace set to 0
8/6/2010	2:19:53 PM	H2 valve closed
8/6/2010	2:19:53 PM	BCl3 valve closed
8/6/2010	2:19:53 PM	PH3 valve closed
8/6/2010	2:19:53 PM	SiCl4 pre valve closed
8/6/2010	2:19:53 PM	SiCl4 post valve closed
8/6/2010	2:19:53 PM	Bubbler valve closed
8/6/2010	2:19:53 PM	Helium valve opened
8/6/2010	2:19:53 PM	Main Vac valve opened
8/6/2010	2:19:53 PM	Bypass valve opened
8/6/2010	2:19:53 PM	Helium MFC set to  100.000000
8/6/2010	2:19:53 PM	H2 MFC set to  0.000000
8/6/2010	2:19:53 PM	BCl3 MFC set to  0.000000
8/6/2010	2:19:53 PM	PHl3 MFC set to  0.000000
8/6/2010	2:19:53 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:19:53 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:19:54 PM	Tube furnace set to 0
8/6/2010	2:28:54 PM	Helium valve closed
8/6/2010	2:28:54 PM	H2 valve closed
8/6/2010	2:28:54 PM	BCl3 valve closed
8/6/2010	2:28:54 PM	PH3 valve closed
8/6/2010	2:28:54 PM	SiCl4 pre valve closed
8/6/2010	2:28:54 PM	SiCl4 post valve closed
8/6/2010	2:28:54 PM	Bubbler valve closed
8/6/2010	2:28:54 PM	Main Vac valve opened
8/6/2010	2:28:54 PM	Bypass valve opened
8/6/2010	2:28:54 PM	Helium MFC set to  0.000000
8/6/2010	2:28:54 PM	H2 MFC set to  0.000000
8/6/2010	2:28:54 PM	BCl3 MFC set to  0.000000
8/6/2010	2:28:54 PM	PHl3 MFC set to  0.000000
8/6/2010	2:28:54 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:28:54 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:28:54 PM	Tube furnace set to 0
8/6/2010	2:29:54 PM	H2 valve closed
8/6/2010	2:29:54 PM	BCl3 valve closed
8/6/2010	2:29:54 PM	PH3 valve closed
8/6/2010	2:29:54 PM	SiCl4 pre valve closed
8/6/2010	2:29:54 PM	SiCl4 post valve closed
8/6/2010	2:29:54 PM	Bubbler valve closed
8/6/2010	2:29:54 PM	Helium valve opened
8/6/2010	2:29:54 PM	Main Vac valve opened
8/6/2010	2:29:54 PM	Bypass valve opened
8/6/2010	2:29:54 PM	Helium MFC set to  100.000000
8/6/2010	2:29:54 PM	H2 MFC set to  0.000000
8/6/2010	2:29:54 PM	BCl3 MFC set to  0.000000
8/6/2010	2:29:54 PM	PHl3 MFC set to  0.000000
8/6/2010	2:29:54 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:29:54 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:29:54 PM	Tube furnace set to 0
8/6/2010	2:38:54 PM	Helium valve closed
8/6/2010	2:38:54 PM	H2 valve closed
8/6/2010	2:38:54 PM	BCl3 valve closed
8/6/2010	2:38:54 PM	PH3 valve closed
8/6/2010	2:38:54 PM	SiCl4 pre valve closed
8/6/2010	2:38:54 PM	SiCl4 post valve closed
8/6/2010	2:38:54 PM	Bubbler valve closed
8/6/2010	2:38:54 PM	Main Vac valve opened
8/6/2010	2:38:54 PM	Bypass valve opened
8/6/2010	2:38:54 PM	Helium MFC set to  0.000000
8/6/2010	2:38:54 PM	H2 MFC set to  0.000000
8/6/2010	2:38:54 PM	BCl3 MFC set to  0.000000
8/6/2010	2:38:54 PM	PHl3 MFC set to  0.000000
8/6/2010	2:38:54 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:38:54 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:38:54 PM	Tube furnace set to 0
8/6/2010	2:38:55 PM	Run finished at 2:38 PM
8/6/2010	2:38:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	2:48:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	2:48:58 PM	Recipe started at 2:48 PM
8/6/2010	2:48:58 PM	Helium valve closed
8/6/2010	2:48:58 PM	H2 valve closed
8/6/2010	2:48:58 PM	BCl3 valve closed
8/6/2010	2:48:58 PM	PH3 valve closed
8/6/2010	2:48:58 PM	SiCl4 pre valve closed
8/6/2010	2:48:58 PM	SiCl4 post valve closed
8/6/2010	2:48:58 PM	Main Vac valve closed
8/6/2010	2:48:58 PM	Bubbler valve closed
8/6/2010	2:48:58 PM	Bypass valve opened
8/6/2010	2:48:58 PM	Helium MFC set to  0.000000
8/6/2010	2:48:58 PM	H2 MFC set to  0.000000
8/6/2010	2:48:58 PM	BCl3 MFC set to  0.000000
8/6/2010	2:48:58 PM	PHl3 MFC set to  0.000000
8/6/2010	2:48:58 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:48:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:48:58 PM	Tube furnace set to 0
8/6/2010	2:48:59 PM	Helium valve closed
8/6/2010	2:48:59 PM	H2 valve closed
8/6/2010	2:48:59 PM	BCl3 valve closed
8/6/2010	2:48:59 PM	PH3 valve closed
8/6/2010	2:48:59 PM	SiCl4 pre valve closed
8/6/2010	2:48:59 PM	SiCl4 post valve closed
8/6/2010	2:48:59 PM	Bubbler valve closed
8/6/2010	2:48:59 PM	Main Vac valve opened
8/6/2010	2:48:59 PM	Bypass valve opened
8/6/2010	2:48:59 PM	Helium MFC set to  0.000000
8/6/2010	2:48:59 PM	H2 MFC set to  0.000000
8/6/2010	2:48:59 PM	BCl3 MFC set to  0.000000
8/6/2010	2:48:59 PM	PHl3 MFC set to  0.000000
8/6/2010	2:48:59 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:48:59 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:48:59 PM	Tube furnace set to 0
8/6/2010	2:49:59 PM	H2 valve closed
8/6/2010	2:49:59 PM	BCl3 valve closed
8/6/2010	2:49:59 PM	PH3 valve closed
8/6/2010	2:49:59 PM	SiCl4 pre valve closed
8/6/2010	2:49:59 PM	SiCl4 post valve closed
8/6/2010	2:49:59 PM	Bubbler valve closed
8/6/2010	2:49:59 PM	Helium valve opened
8/6/2010	2:49:59 PM	Main Vac valve opened
8/6/2010	2:49:59 PM	Bypass valve opened
8/6/2010	2:49:59 PM	Helium MFC set to  100.000000
8/6/2010	2:49:59 PM	H2 MFC set to  0.000000
8/6/2010	2:49:59 PM	BCl3 MFC set to  0.000000
8/6/2010	2:49:59 PM	PHl3 MFC set to  0.000000
8/6/2010	2:49:59 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:49:59 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:49:59 PM	Tube furnace set to 0
8/6/2010	2:58:59 PM	Helium valve closed
8/6/2010	2:58:59 PM	H2 valve closed
8/6/2010	2:58:59 PM	BCl3 valve closed
8/6/2010	2:58:59 PM	PH3 valve closed
8/6/2010	2:58:59 PM	SiCl4 pre valve closed
8/6/2010	2:58:59 PM	SiCl4 post valve closed
8/6/2010	2:58:59 PM	Bubbler valve closed
8/6/2010	2:58:59 PM	Main Vac valve opened
8/6/2010	2:58:59 PM	Bypass valve opened
8/6/2010	2:58:59 PM	Helium MFC set to  0.000000
8/6/2010	2:58:59 PM	H2 MFC set to  0.000000
8/6/2010	2:58:59 PM	BCl3 MFC set to  0.000000
8/6/2010	2:58:59 PM	PHl3 MFC set to  0.000000
8/6/2010	2:58:59 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:58:59 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:58:59 PM	Tube furnace set to 0
8/6/2010	2:59:49 PM	H2 valve closed
8/6/2010	2:59:49 PM	BCl3 valve closed
8/6/2010	2:59:49 PM	PH3 valve closed
8/6/2010	2:59:49 PM	SiCl4 pre valve closed
8/6/2010	2:59:49 PM	SiCl4 post valve closed
8/6/2010	2:59:49 PM	Bubbler valve closed
8/6/2010	2:59:49 PM	Helium valve opened
8/6/2010	2:59:49 PM	Main Vac valve opened
8/6/2010	2:59:49 PM	Bypass valve opened
8/6/2010	2:59:49 PM	Helium MFC set to  100.000000
8/6/2010	2:59:49 PM	H2 MFC set to  0.000000
8/6/2010	2:59:49 PM	BCl3 MFC set to  0.000000
8/6/2010	2:59:49 PM	PHl3 MFC set to  0.000000
8/6/2010	2:59:49 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:59:49 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:59:49 PM	Tube furnace set to 0
8/6/2010	2:59:49 PM	Helium valve closed
8/6/2010	2:59:49 PM	H2 valve closed
8/6/2010	2:59:49 PM	BCl3 valve closed
8/6/2010	2:59:49 PM	PH3 valve closed
8/6/2010	2:59:49 PM	SiCl4 pre valve closed
8/6/2010	2:59:49 PM	SiCl4 post valve closed
8/6/2010	2:59:49 PM	Bubbler valve closed
8/6/2010	2:59:49 PM	Main Vac valve opened
8/6/2010	2:59:49 PM	Bypass valve opened
8/6/2010	2:59:49 PM	Helium MFC set to  0.000000
8/6/2010	2:59:49 PM	H2 MFC set to  0.000000
8/6/2010	2:59:49 PM	BCl3 MFC set to  0.000000
8/6/2010	2:59:49 PM	PHl3 MFC set to  0.000000
8/6/2010	2:59:49 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:59:49 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:59:49 PM	Tube furnace set to 0
8/6/2010	2:59:50 PM	H2 valve closed
8/6/2010	2:59:50 PM	BCl3 valve closed
8/6/2010	2:59:50 PM	PH3 valve closed
8/6/2010	2:59:50 PM	SiCl4 pre valve closed
8/6/2010	2:59:50 PM	SiCl4 post valve closed
8/6/2010	2:59:50 PM	Bubbler valve closed
8/6/2010	2:59:50 PM	Helium valve opened
8/6/2010	2:59:50 PM	Main Vac valve opened
8/6/2010	2:59:50 PM	Bypass valve opened
8/6/2010	2:59:50 PM	Helium MFC set to  100.000000
8/6/2010	2:59:50 PM	H2 MFC set to  0.000000
8/6/2010	2:59:50 PM	BCl3 MFC set to  0.000000
8/6/2010	2:59:50 PM	PHl3 MFC set to  0.000000
8/6/2010	2:59:50 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:59:50 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:59:50 PM	Tube furnace set to 0
8/6/2010	2:59:50 PM	Helium valve closed
8/6/2010	2:59:50 PM	H2 valve closed
8/6/2010	2:59:50 PM	BCl3 valve closed
8/6/2010	2:59:50 PM	PH3 valve closed
8/6/2010	2:59:50 PM	SiCl4 pre valve closed
8/6/2010	2:59:50 PM	SiCl4 post valve closed
8/6/2010	2:59:50 PM	Bubbler valve closed
8/6/2010	2:59:50 PM	Main Vac valve opened
8/6/2010	2:59:50 PM	Bypass valve opened
8/6/2010	2:59:50 PM	Helium MFC set to  0.000000
8/6/2010	2:59:50 PM	H2 MFC set to  0.000000
8/6/2010	2:59:50 PM	BCl3 MFC set to  0.000000
8/6/2010	2:59:50 PM	PHl3 MFC set to  0.000000
8/6/2010	2:59:50 PM	SiCl4 MFC set to  0.000000
8/6/2010	2:59:50 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	2:59:51 PM	Tube furnace set to 0
8/6/2010	2:59:51 PM	Run finished at 2:59 PM
8/6/2010	2:59:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	3:09:54 PM	Recipe started at 3:09 PM
8/6/2010	3:09:54 PM	Helium valve closed
8/6/2010	3:09:54 PM	BCl3 valve closed
8/6/2010	3:09:54 PM	PH3 valve closed
8/6/2010	3:09:54 PM	SiCl4 pre valve closed
8/6/2010	3:09:54 PM	SiCl4 post valve closed
8/6/2010	3:09:54 PM	Main Vac valve closed
8/6/2010	3:09:54 PM	Bypass valve closed
8/6/2010	3:09:54 PM	Bubbler valve closed
8/6/2010	3:09:54 PM	H2 valve opened
8/6/2010	3:09:54 PM	Helium MFC set to  0.000000
8/6/2010	3:09:54 PM	H2 MFC set to  500.000000
8/6/2010	3:09:54 PM	BCl3 MFC set to  0.000000
8/6/2010	3:09:54 PM	PHl3 MFC set to  0.000000
8/6/2010	3:09:54 PM	SiCl4 MFC set to  0.000000
8/6/2010	3:09:54 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	3:09:54 PM	Tube furnace set to 0
8/6/2010	3:09:55 PM	Helium valve closed
8/6/2010	3:09:55 PM	BCl3 valve closed
8/6/2010	3:09:55 PM	PH3 valve closed
8/6/2010	3:09:55 PM	SiCl4 pre valve closed
8/6/2010	3:09:55 PM	SiCl4 post valve closed
8/6/2010	3:09:55 PM	Main Vac valve closed
8/6/2010	3:09:55 PM	Bypass valve closed
8/6/2010	3:09:55 PM	Bubbler valve closed
8/6/2010	3:09:55 PM	H2 valve opened
8/6/2010	3:09:55 PM	Helium MFC set to  0.000000
8/6/2010	3:09:55 PM	H2 MFC set to  500.000000
8/6/2010	3:09:55 PM	BCl3 MFC set to  0.000000
8/6/2010	3:09:55 PM	PHl3 MFC set to  0.000000
8/6/2010	3:09:55 PM	SiCl4 MFC set to  0.000000
8/6/2010	3:09:55 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	3:09:55 PM	Tube furnace set to 1000
8/6/2010	3:09:55 PM	Helium valve closed
8/6/2010	3:09:55 PM	H2 valve closed
8/6/2010	3:09:55 PM	BCl3 valve closed
8/6/2010	3:09:55 PM	PH3 valve closed
8/6/2010	3:09:55 PM	SiCl4 pre valve closed
8/6/2010	3:09:55 PM	SiCl4 post valve closed
8/6/2010	3:09:55 PM	Main Vac valve closed
8/6/2010	3:09:55 PM	Bubbler valve closed
8/6/2010	3:09:55 PM	Bypass valve closed
8/6/2010	3:09:55 PM	Helium MFC set to  0.000000
8/6/2010	3:09:55 PM	H2 MFC set to  0.000000
8/6/2010	3:09:55 PM	BCl3 MFC set to  0.000000
8/6/2010	3:09:55 PM	PHl3 MFC set to  0.000000
8/6/2010	3:09:55 PM	SiCl4 MFC set to  0.000000
8/6/2010	3:09:55 PM	Bypass solenoid MFC set to  760.000000
8/6/2010	3:09:55 PM	Tube furnace set to 0
8/6/2010	3:09:55 PM	Baratron reads 5.301319 Torr and NaOH valve is open.  Emergency exit.
8/6/2010	3:09:59 PM	Run aborted at 3:09 PM
8/6/2010	3:10:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	3:10:08 PM	Recipe started at 3:10 PM
8/6/2010	3:10:08 PM	Helium valve closed
8/6/2010	3:10:08 PM	H2 valve closed
8/6/2010	3:10:08 PM	BCl3 valve closed
8/6/2010	3:10:08 PM	PH3 valve closed
8/6/2010	3:10:08 PM	SiCl4 pre valve closed
8/6/2010	3:10:08 PM	SiCl4 post valve closed
8/6/2010	3:10:08 PM	Main Vac valve closed
8/6/2010	3:10:08 PM	Bubbler valve closed
8/6/2010	3:10:08 PM	Bypass valve opened
8/6/2010	3:10:08 PM	Helium MFC set to  0.000000
8/6/2010	3:10:08 PM	H2 MFC set to  0.000000
8/6/2010	3:10:08 PM	BCl3 MFC set to  0.000000
8/6/2010	3:10:08 PM	PHl3 MFC set to  0.000000
8/6/2010	3:10:08 PM	SiCl4 MFC set to  0.000000
8/6/2010	3:10:08 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	3:10:08 PM	Tube furnace set to 0
8/6/2010	3:10:08 PM	Helium valve closed
8/6/2010	3:10:08 PM	H2 valve closed
8/6/2010	3:10:08 PM	BCl3 valve closed
8/6/2010	3:10:08 PM	PH3 valve closed
8/6/2010	3:10:08 PM	SiCl4 pre valve closed
8/6/2010	3:10:08 PM	SiCl4 post valve closed
8/6/2010	3:10:08 PM	Bubbler valve closed
8/6/2010	3:10:08 PM	Main Vac valve opened
8/6/2010	3:10:08 PM	Bypass valve opened
8/6/2010	3:10:08 PM	Helium MFC set to  0.000000
8/6/2010	3:10:08 PM	H2 MFC set to  0.000000
8/6/2010	3:10:08 PM	BCl3 MFC set to  0.000000
8/6/2010	3:10:08 PM	PHl3 MFC set to  0.000000
8/6/2010	3:10:08 PM	SiCl4 MFC set to  0.000000
8/6/2010	3:10:08 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	3:10:08 PM	Tube furnace set to 0
8/6/2010	3:10:09 PM	Run finished at 3:10 PM
8/6/2010	3:10:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	3:11:07 PM	Recipe started at 3:11 PM
8/6/2010	3:11:07 PM	Helium valve closed
8/6/2010	3:11:07 PM	BCl3 valve closed
8/6/2010	3:11:07 PM	PH3 valve closed
8/6/2010	3:11:07 PM	SiCl4 pre valve closed
8/6/2010	3:11:07 PM	SiCl4 post valve closed
8/6/2010	3:11:07 PM	Main Vac valve closed
8/6/2010	3:11:07 PM	Bypass valve closed
8/6/2010	3:11:07 PM	Bubbler valve closed
8/6/2010	3:11:07 PM	H2 valve opened
8/6/2010	3:11:07 PM	Helium MFC set to  0.000000
8/6/2010	3:11:07 PM	H2 MFC set to  500.000000
8/6/2010	3:11:07 PM	BCl3 MFC set to  0.000000
8/6/2010	3:11:07 PM	PHl3 MFC set to  0.000000
8/6/2010	3:11:07 PM	SiCl4 MFC set to  0.000000
8/6/2010	3:11:07 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	3:11:08 PM	Tube furnace set to 0
8/6/2010	3:12:29 PM	Helium valve closed
8/6/2010	3:12:29 PM	BCl3 valve closed
8/6/2010	3:12:29 PM	PH3 valve closed
8/6/2010	3:12:29 PM	SiCl4 pre valve closed
8/6/2010	3:12:29 PM	SiCl4 post valve closed
8/6/2010	3:12:29 PM	Main Vac valve closed
8/6/2010	3:12:29 PM	Bypass valve closed
8/6/2010	3:12:29 PM	H2 valve opened
8/6/2010	3:12:29 PM	Bubbler valve opened
8/6/2010	3:12:29 PM	Helium MFC set to  0.000000
8/6/2010	3:12:29 PM	H2 MFC set to  500.000000
8/6/2010	3:12:29 PM	BCl3 MFC set to  0.000000
8/6/2010	3:12:29 PM	PHl3 MFC set to  0.000000
8/6/2010	3:12:29 PM	SiCl4 MFC set to  0.000000
8/6/2010	3:12:29 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	3:12:29 PM	Tube furnace set to 1000
8/6/2010	3:32:29 PM	Helium valve closed
8/6/2010	3:32:29 PM	PH3 valve closed
8/6/2010	3:32:29 PM	Main Vac valve closed
8/6/2010	3:32:29 PM	Bypass valve closed
8/6/2010	3:32:29 PM	H2 valve opened
8/6/2010	3:32:29 PM	BCl3 valve opened
8/6/2010	3:32:29 PM	SiCl4 pre valve opened
8/6/2010	3:32:29 PM	SiCl4 post valve opened
8/6/2010	3:32:29 PM	Bubbler valve opened
8/6/2010	3:32:29 PM	Helium MFC set to  0.000000
8/6/2010	3:32:29 PM	H2 MFC set to  500.000000
8/6/2010	3:32:29 PM	BCl3 MFC set to  6.000000
8/6/2010	3:32:29 PM	PHl3 MFC set to  0.000000
8/6/2010	3:32:29 PM	SiCl4 MFC set to  50.000000
8/6/2010	3:32:29 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	3:32:29 PM	Tube furnace set to 1000
8/6/2010	3:52:29 PM	H2 valve closed
8/6/2010	3:52:29 PM	BCl3 valve closed
8/6/2010	3:52:29 PM	PH3 valve closed
8/6/2010	3:52:29 PM	SiCl4 pre valve closed
8/6/2010	3:52:29 PM	SiCl4 post valve closed
8/6/2010	3:52:29 PM	Main Vac valve closed
8/6/2010	3:52:29 PM	Bypass valve closed
8/6/2010	3:52:29 PM	Helium valve opened
8/6/2010	3:52:29 PM	Bubbler valve opened
8/6/2010	3:52:29 PM	Helium MFC set to  500.000000
8/6/2010	3:52:29 PM	H2 MFC set to  0.000000
8/6/2010	3:52:29 PM	BCl3 MFC set to  0.000000
8/6/2010	3:52:29 PM	PHl3 MFC set to  0.000000
8/6/2010	3:52:29 PM	SiCl4 MFC set to  0.000000
8/6/2010	3:52:29 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	3:52:29 PM	Tube furnace set to 0
8/6/2010	4:12:29 PM	Helium valve closed
8/6/2010	4:12:29 PM	H2 valve closed
8/6/2010	4:12:29 PM	BCl3 valve closed
8/6/2010	4:12:29 PM	PH3 valve closed
8/6/2010	4:12:29 PM	SiCl4 pre valve closed
8/6/2010	4:12:29 PM	SiCl4 post valve closed
8/6/2010	4:12:29 PM	Main Vac valve closed
8/6/2010	4:12:29 PM	Bypass valve closed
8/6/2010	4:12:29 PM	Bubbler valve closed
8/6/2010	4:12:29 PM	Helium MFC set to  0.000000
8/6/2010	4:12:29 PM	H2 MFC set to  0.000000
8/6/2010	4:12:29 PM	BCl3 MFC set to  0.000000
8/6/2010	4:12:29 PM	PHl3 MFC set to  0.000000
8/6/2010	4:12:29 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:12:29 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:12:29 PM	Tube furnace set to 0
8/6/2010	4:12:29 PM	Run finished at 4:12 PM
8/6/2010	4:33:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	4:33:52 PM	Recipe started at 4:33 PM
8/6/2010	4:33:52 PM	Helium valve closed
8/6/2010	4:33:52 PM	H2 valve closed
8/6/2010	4:33:52 PM	BCl3 valve closed
8/6/2010	4:33:52 PM	PH3 valve closed
8/6/2010	4:33:52 PM	SiCl4 pre valve closed
8/6/2010	4:33:52 PM	SiCl4 post valve closed
8/6/2010	4:33:52 PM	Main Vac valve closed
8/6/2010	4:33:52 PM	Bubbler valve closed
8/6/2010	4:33:52 PM	Bypass valve opened
8/6/2010	4:33:52 PM	Helium MFC set to  0.000000
8/6/2010	4:33:52 PM	H2 MFC set to  0.000000
8/6/2010	4:33:52 PM	BCl3 MFC set to  0.000000
8/6/2010	4:33:52 PM	PHl3 MFC set to  0.000000
8/6/2010	4:33:52 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:33:52 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:33:52 PM	Tube furnace set to 0
8/6/2010	4:34:32 PM	Helium valve closed
8/6/2010	4:34:32 PM	H2 valve closed
8/6/2010	4:34:32 PM	BCl3 valve closed
8/6/2010	4:34:32 PM	PH3 valve closed
8/6/2010	4:34:32 PM	SiCl4 pre valve closed
8/6/2010	4:34:32 PM	SiCl4 post valve closed
8/6/2010	4:34:32 PM	Bubbler valve closed
8/6/2010	4:34:32 PM	Main Vac valve opened
8/6/2010	4:34:32 PM	Bypass valve opened
8/6/2010	4:34:32 PM	Helium MFC set to  0.000000
8/6/2010	4:34:32 PM	H2 MFC set to  0.000000
8/6/2010	4:34:32 PM	BCl3 MFC set to  0.000000
8/6/2010	4:34:32 PM	PHl3 MFC set to  0.000000
8/6/2010	4:34:32 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:34:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:34:32 PM	Tube furnace set to 0
8/6/2010	4:34:32 PM	Run finished at 4:34 PM
8/6/2010	4:34:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	4:37:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	4:37:14 PM	Recipe started at 4:37 PM
8/6/2010	4:37:14 PM	Helium valve closed
8/6/2010	4:37:14 PM	H2 valve closed
8/6/2010	4:37:14 PM	BCl3 valve closed
8/6/2010	4:37:14 PM	PH3 valve closed
8/6/2010	4:37:14 PM	SiCl4 pre valve closed
8/6/2010	4:37:14 PM	SiCl4 post valve closed
8/6/2010	4:37:14 PM	Main Vac valve closed
8/6/2010	4:37:14 PM	Bubbler valve closed
8/6/2010	4:37:14 PM	Bypass valve opened
8/6/2010	4:37:14 PM	Helium MFC set to  0.000000
8/6/2010	4:37:14 PM	H2 MFC set to  0.000000
8/6/2010	4:37:14 PM	BCl3 MFC set to  0.000000
8/6/2010	4:37:14 PM	PHl3 MFC set to  0.000000
8/6/2010	4:37:14 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:37:14 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:37:14 PM	Tube furnace set to 0
8/6/2010	4:37:14 PM	Helium valve closed
8/6/2010	4:37:14 PM	H2 valve closed
8/6/2010	4:37:14 PM	BCl3 valve closed
8/6/2010	4:37:14 PM	PH3 valve closed
8/6/2010	4:37:14 PM	SiCl4 pre valve closed
8/6/2010	4:37:14 PM	SiCl4 post valve closed
8/6/2010	4:37:14 PM	Bubbler valve closed
8/6/2010	4:37:14 PM	Main Vac valve opened
8/6/2010	4:37:14 PM	Bypass valve opened
8/6/2010	4:37:14 PM	Helium MFC set to  0.000000
8/6/2010	4:37:14 PM	H2 MFC set to  0.000000
8/6/2010	4:37:14 PM	BCl3 MFC set to  0.000000
8/6/2010	4:37:14 PM	PHl3 MFC set to  0.000000
8/6/2010	4:37:14 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:37:14 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:37:14 PM	Tube furnace set to 0
8/6/2010	4:38:14 PM	H2 valve closed
8/6/2010	4:38:14 PM	BCl3 valve closed
8/6/2010	4:38:14 PM	PH3 valve closed
8/6/2010	4:38:14 PM	SiCl4 pre valve closed
8/6/2010	4:38:14 PM	SiCl4 post valve closed
8/6/2010	4:38:14 PM	Bubbler valve closed
8/6/2010	4:38:14 PM	Helium valve opened
8/6/2010	4:38:14 PM	Main Vac valve opened
8/6/2010	4:38:15 PM	Bypass valve opened
8/6/2010	4:38:15 PM	Helium MFC set to  100.000000
8/6/2010	4:38:15 PM	H2 MFC set to  0.000000
8/6/2010	4:38:15 PM	BCl3 MFC set to  0.000000
8/6/2010	4:38:15 PM	PHl3 MFC set to  0.000000
8/6/2010	4:38:15 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:38:15 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:38:15 PM	Tube furnace set to 0
8/6/2010	4:47:15 PM	Helium valve closed
8/6/2010	4:47:15 PM	H2 valve closed
8/6/2010	4:47:15 PM	BCl3 valve closed
8/6/2010	4:47:15 PM	PH3 valve closed
8/6/2010	4:47:15 PM	SiCl4 pre valve closed
8/6/2010	4:47:15 PM	SiCl4 post valve closed
8/6/2010	4:47:15 PM	Bubbler valve closed
8/6/2010	4:47:15 PM	Main Vac valve opened
8/6/2010	4:47:15 PM	Bypass valve opened
8/6/2010	4:47:15 PM	Helium MFC set to  0.000000
8/6/2010	4:47:15 PM	H2 MFC set to  0.000000
8/6/2010	4:47:15 PM	BCl3 MFC set to  0.000000
8/6/2010	4:47:15 PM	PHl3 MFC set to  0.000000
8/6/2010	4:47:15 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:47:15 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:47:15 PM	Tube furnace set to 0
8/6/2010	4:48:15 PM	H2 valve closed
8/6/2010	4:48:15 PM	BCl3 valve closed
8/6/2010	4:48:15 PM	PH3 valve closed
8/6/2010	4:48:15 PM	SiCl4 pre valve closed
8/6/2010	4:48:15 PM	SiCl4 post valve closed
8/6/2010	4:48:15 PM	Bubbler valve closed
8/6/2010	4:48:15 PM	Helium valve opened
8/6/2010	4:48:15 PM	Main Vac valve opened
8/6/2010	4:48:15 PM	Bypass valve opened
8/6/2010	4:48:15 PM	Helium MFC set to  100.000000
8/6/2010	4:48:15 PM	H2 MFC set to  0.000000
8/6/2010	4:48:15 PM	BCl3 MFC set to  0.000000
8/6/2010	4:48:15 PM	PHl3 MFC set to  0.000000
8/6/2010	4:48:15 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:48:15 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:48:15 PM	Tube furnace set to 0
8/6/2010	4:57:15 PM	Helium valve closed
8/6/2010	4:57:15 PM	H2 valve closed
8/6/2010	4:57:15 PM	BCl3 valve closed
8/6/2010	4:57:15 PM	PH3 valve closed
8/6/2010	4:57:15 PM	SiCl4 pre valve closed
8/6/2010	4:57:15 PM	SiCl4 post valve closed
8/6/2010	4:57:15 PM	Bubbler valve closed
8/6/2010	4:57:15 PM	Main Vac valve opened
8/6/2010	4:57:15 PM	Bypass valve opened
8/6/2010	4:57:15 PM	Helium MFC set to  0.000000
8/6/2010	4:57:15 PM	H2 MFC set to  0.000000
8/6/2010	4:57:15 PM	BCl3 MFC set to  0.000000
8/6/2010	4:57:15 PM	PHl3 MFC set to  0.000000
8/6/2010	4:57:15 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:57:15 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:57:15 PM	Tube furnace set to 0
8/6/2010	4:58:15 PM	H2 valve closed
8/6/2010	4:58:15 PM	BCl3 valve closed
8/6/2010	4:58:15 PM	PH3 valve closed
8/6/2010	4:58:15 PM	SiCl4 pre valve closed
8/6/2010	4:58:15 PM	SiCl4 post valve closed
8/6/2010	4:58:15 PM	Bubbler valve closed
8/6/2010	4:58:15 PM	Helium valve opened
8/6/2010	4:58:15 PM	Main Vac valve opened
8/6/2010	4:58:15 PM	Bypass valve opened
8/6/2010	4:58:15 PM	Helium MFC set to  100.000000
8/6/2010	4:58:15 PM	H2 MFC set to  0.000000
8/6/2010	4:58:15 PM	BCl3 MFC set to  0.000000
8/6/2010	4:58:15 PM	PHl3 MFC set to  0.000000
8/6/2010	4:58:15 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:58:15 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:58:15 PM	Tube furnace set to 0
8/6/2010	4:58:33 PM	Helium valve closed
8/6/2010	4:58:33 PM	H2 valve closed
8/6/2010	4:58:33 PM	BCl3 valve closed
8/6/2010	4:58:33 PM	PH3 valve closed
8/6/2010	4:58:33 PM	SiCl4 pre valve closed
8/6/2010	4:58:33 PM	SiCl4 post valve closed
8/6/2010	4:58:33 PM	Bubbler valve closed
8/6/2010	4:58:33 PM	Main Vac valve opened
8/6/2010	4:58:33 PM	Bypass valve opened
8/6/2010	4:58:33 PM	Helium MFC set to  0.000000
8/6/2010	4:58:33 PM	H2 MFC set to  0.000000
8/6/2010	4:58:33 PM	BCl3 MFC set to  0.000000
8/6/2010	4:58:33 PM	PHl3 MFC set to  0.000000
8/6/2010	4:58:33 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:58:33 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:58:33 PM	Tube furnace set to 0
8/6/2010	4:58:33 PM	Run finished at 4:58 PM
8/6/2010	4:58:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	4:59:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	4:59:09 PM	Recipe started at 4:59 PM
8/6/2010	4:59:09 PM	Helium valve closed
8/6/2010	4:59:09 PM	H2 valve closed
8/6/2010	4:59:09 PM	BCl3 valve closed
8/6/2010	4:59:09 PM	PH3 valve closed
8/6/2010	4:59:09 PM	SiCl4 pre valve closed
8/6/2010	4:59:09 PM	SiCl4 post valve closed
8/6/2010	4:59:09 PM	Main Vac valve closed
8/6/2010	4:59:09 PM	Bubbler valve closed
8/6/2010	4:59:09 PM	Bypass valve opened
8/6/2010	4:59:09 PM	Helium MFC set to  0.000000
8/6/2010	4:59:09 PM	H2 MFC set to  0.000000
8/6/2010	4:59:09 PM	BCl3 MFC set to  0.000000
8/6/2010	4:59:09 PM	PHl3 MFC set to  0.000000
8/6/2010	4:59:09 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:59:09 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:59:09 PM	Tube furnace set to 0
8/6/2010	4:59:09 PM	Helium valve closed
8/6/2010	4:59:09 PM	H2 valve closed
8/6/2010	4:59:09 PM	BCl3 valve closed
8/6/2010	4:59:09 PM	PH3 valve closed
8/6/2010	4:59:09 PM	SiCl4 pre valve closed
8/6/2010	4:59:09 PM	SiCl4 post valve closed
8/6/2010	4:59:09 PM	Bubbler valve closed
8/6/2010	4:59:09 PM	Main Vac valve opened
8/6/2010	4:59:09 PM	Bypass valve opened
8/6/2010	4:59:09 PM	Helium MFC set to  0.000000
8/6/2010	4:59:09 PM	H2 MFC set to  0.000000
8/6/2010	4:59:09 PM	BCl3 MFC set to  0.000000
8/6/2010	4:59:09 PM	PHl3 MFC set to  0.000000
8/6/2010	4:59:09 PM	SiCl4 MFC set to  0.000000
8/6/2010	4:59:09 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	4:59:09 PM	Tube furnace set to 0
8/6/2010	5:00:10 PM	H2 valve closed
8/6/2010	5:00:10 PM	BCl3 valve closed
8/6/2010	5:00:10 PM	PH3 valve closed
8/6/2010	5:00:10 PM	SiCl4 pre valve closed
8/6/2010	5:00:10 PM	SiCl4 post valve closed
8/6/2010	5:00:10 PM	Bubbler valve closed
8/6/2010	5:00:10 PM	Helium valve opened
8/6/2010	5:00:10 PM	Main Vac valve opened
8/6/2010	5:00:10 PM	Bypass valve opened
8/6/2010	5:00:10 PM	Helium MFC set to  100.000000
8/6/2010	5:00:10 PM	H2 MFC set to  0.000000
8/6/2010	5:00:10 PM	BCl3 MFC set to  0.000000
8/6/2010	5:00:10 PM	PHl3 MFC set to  0.000000
8/6/2010	5:00:10 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:00:10 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:00:10 PM	Tube furnace set to 0
8/6/2010	5:09:10 PM	Helium valve closed
8/6/2010	5:09:10 PM	H2 valve closed
8/6/2010	5:09:10 PM	BCl3 valve closed
8/6/2010	5:09:10 PM	PH3 valve closed
8/6/2010	5:09:10 PM	SiCl4 pre valve closed
8/6/2010	5:09:10 PM	SiCl4 post valve closed
8/6/2010	5:09:10 PM	Bubbler valve closed
8/6/2010	5:09:10 PM	Main Vac valve opened
8/6/2010	5:09:10 PM	Bypass valve opened
8/6/2010	5:09:10 PM	Helium MFC set to  0.000000
8/6/2010	5:09:10 PM	H2 MFC set to  0.000000
8/6/2010	5:09:10 PM	BCl3 MFC set to  0.000000
8/6/2010	5:09:10 PM	PHl3 MFC set to  0.000000
8/6/2010	5:09:10 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:09:10 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:09:10 PM	Tube furnace set to 0
8/6/2010	5:10:10 PM	H2 valve closed
8/6/2010	5:10:10 PM	BCl3 valve closed
8/6/2010	5:10:10 PM	PH3 valve closed
8/6/2010	5:10:10 PM	SiCl4 pre valve closed
8/6/2010	5:10:10 PM	SiCl4 post valve closed
8/6/2010	5:10:10 PM	Bubbler valve closed
8/6/2010	5:10:10 PM	Helium valve opened
8/6/2010	5:10:10 PM	Main Vac valve opened
8/6/2010	5:10:10 PM	Bypass valve opened
8/6/2010	5:10:10 PM	Helium MFC set to  100.000000
8/6/2010	5:10:10 PM	H2 MFC set to  0.000000
8/6/2010	5:10:10 PM	BCl3 MFC set to  0.000000
8/6/2010	5:10:10 PM	PHl3 MFC set to  0.000000
8/6/2010	5:10:10 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:10:10 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:10:10 PM	Tube furnace set to 0
8/6/2010	5:19:10 PM	Helium valve closed
8/6/2010	5:19:10 PM	H2 valve closed
8/6/2010	5:19:10 PM	BCl3 valve closed
8/6/2010	5:19:10 PM	PH3 valve closed
8/6/2010	5:19:10 PM	SiCl4 pre valve closed
8/6/2010	5:19:10 PM	SiCl4 post valve closed
8/6/2010	5:19:10 PM	Bubbler valve closed
8/6/2010	5:19:10 PM	Main Vac valve opened
8/6/2010	5:19:10 PM	Bypass valve opened
8/6/2010	5:19:10 PM	Helium MFC set to  0.000000
8/6/2010	5:19:10 PM	H2 MFC set to  0.000000
8/6/2010	5:19:10 PM	BCl3 MFC set to  0.000000
8/6/2010	5:19:10 PM	PHl3 MFC set to  0.000000
8/6/2010	5:19:10 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:19:10 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:19:10 PM	Tube furnace set to 0
8/6/2010	5:19:57 PM	H2 valve closed
8/6/2010	5:19:57 PM	BCl3 valve closed
8/6/2010	5:19:57 PM	PH3 valve closed
8/6/2010	5:19:57 PM	SiCl4 pre valve closed
8/6/2010	5:19:57 PM	SiCl4 post valve closed
8/6/2010	5:19:57 PM	Bubbler valve closed
8/6/2010	5:19:57 PM	Helium valve opened
8/6/2010	5:19:58 PM	Main Vac valve opened
8/6/2010	5:19:58 PM	Bypass valve opened
8/6/2010	5:19:58 PM	Helium MFC set to  100.000000
8/6/2010	5:19:58 PM	H2 MFC set to  0.000000
8/6/2010	5:19:58 PM	BCl3 MFC set to  0.000000
8/6/2010	5:19:58 PM	PHl3 MFC set to  0.000000
8/6/2010	5:19:58 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:19:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:19:58 PM	Tube furnace set to 0
8/6/2010	5:19:58 PM	Helium valve closed
8/6/2010	5:19:58 PM	H2 valve closed
8/6/2010	5:19:58 PM	BCl3 valve closed
8/6/2010	5:19:58 PM	PH3 valve closed
8/6/2010	5:19:58 PM	SiCl4 pre valve closed
8/6/2010	5:19:58 PM	SiCl4 post valve closed
8/6/2010	5:19:58 PM	Bubbler valve closed
8/6/2010	5:19:58 PM	Main Vac valve opened
8/6/2010	5:19:58 PM	Bypass valve opened
8/6/2010	5:19:58 PM	Helium MFC set to  0.000000
8/6/2010	5:19:58 PM	H2 MFC set to  0.000000
8/6/2010	5:19:58 PM	BCl3 MFC set to  0.000000
8/6/2010	5:19:58 PM	PHl3 MFC set to  0.000000
8/6/2010	5:19:58 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:19:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:19:58 PM	Tube furnace set to 0
8/6/2010	5:19:59 PM	Run finished at 5:19 PM
8/6/2010	5:19:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	5:20:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	5:20:55 PM	Recipe started at 5:20 PM
8/6/2010	5:20:55 PM	Helium valve closed
8/6/2010	5:20:55 PM	H2 valve closed
8/6/2010	5:20:55 PM	BCl3 valve closed
8/6/2010	5:20:55 PM	PH3 valve closed
8/6/2010	5:20:55 PM	SiCl4 pre valve closed
8/6/2010	5:20:55 PM	SiCl4 post valve closed
8/6/2010	5:20:55 PM	Main Vac valve closed
8/6/2010	5:20:55 PM	Bubbler valve closed
8/6/2010	5:20:55 PM	Bypass valve opened
8/6/2010	5:20:55 PM	Helium MFC set to  0.000000
8/6/2010	5:20:55 PM	H2 MFC set to  0.000000
8/6/2010	5:20:55 PM	BCl3 MFC set to  0.000000
8/6/2010	5:20:55 PM	PHl3 MFC set to  0.000000
8/6/2010	5:20:55 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:20:55 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:20:56 PM	Tube furnace set to 0
8/6/2010	5:20:56 PM	Helium valve closed
8/6/2010	5:20:56 PM	H2 valve closed
8/6/2010	5:20:56 PM	BCl3 valve closed
8/6/2010	5:20:56 PM	PH3 valve closed
8/6/2010	5:20:56 PM	SiCl4 pre valve closed
8/6/2010	5:20:56 PM	SiCl4 post valve closed
8/6/2010	5:20:56 PM	Bubbler valve closed
8/6/2010	5:20:56 PM	Main Vac valve opened
8/6/2010	5:20:56 PM	Bypass valve opened
8/6/2010	5:20:56 PM	Helium MFC set to  0.000000
8/6/2010	5:20:56 PM	H2 MFC set to  0.000000
8/6/2010	5:20:56 PM	BCl3 MFC set to  0.000000
8/6/2010	5:20:56 PM	PHl3 MFC set to  0.000000
8/6/2010	5:20:56 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:20:56 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:20:56 PM	Tube furnace set to 0
8/6/2010	5:21:56 PM	H2 valve closed
8/6/2010	5:21:56 PM	BCl3 valve closed
8/6/2010	5:21:56 PM	PH3 valve closed
8/6/2010	5:21:56 PM	SiCl4 pre valve closed
8/6/2010	5:21:56 PM	SiCl4 post valve closed
8/6/2010	5:21:56 PM	Bubbler valve closed
8/6/2010	5:21:56 PM	Helium valve opened
8/6/2010	5:21:56 PM	Main Vac valve opened
8/6/2010	5:21:56 PM	Bypass valve opened
8/6/2010	5:21:56 PM	Helium MFC set to  100.000000
8/6/2010	5:21:56 PM	H2 MFC set to  0.000000
8/6/2010	5:21:56 PM	BCl3 MFC set to  0.000000
8/6/2010	5:21:56 PM	PHl3 MFC set to  0.000000
8/6/2010	5:21:56 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:21:56 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:21:56 PM	Tube furnace set to 0
8/6/2010	5:30:56 PM	Helium valve closed
8/6/2010	5:30:56 PM	H2 valve closed
8/6/2010	5:30:56 PM	BCl3 valve closed
8/6/2010	5:30:56 PM	PH3 valve closed
8/6/2010	5:30:56 PM	SiCl4 pre valve closed
8/6/2010	5:30:56 PM	SiCl4 post valve closed
8/6/2010	5:30:56 PM	Bubbler valve closed
8/6/2010	5:30:56 PM	Main Vac valve opened
8/6/2010	5:30:56 PM	Bypass valve opened
8/6/2010	5:30:56 PM	Helium MFC set to  0.000000
8/6/2010	5:30:56 PM	H2 MFC set to  0.000000
8/6/2010	5:30:56 PM	BCl3 MFC set to  0.000000
8/6/2010	5:30:56 PM	PHl3 MFC set to  0.000000
8/6/2010	5:30:56 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:30:56 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:30:56 PM	Tube furnace set to 0
8/6/2010	5:31:56 PM	H2 valve closed
8/6/2010	5:31:56 PM	BCl3 valve closed
8/6/2010	5:31:56 PM	PH3 valve closed
8/6/2010	5:31:56 PM	SiCl4 pre valve closed
8/6/2010	5:31:56 PM	SiCl4 post valve closed
8/6/2010	5:31:56 PM	Bubbler valve closed
8/6/2010	5:31:56 PM	Helium valve opened
8/6/2010	5:31:56 PM	Main Vac valve opened
8/6/2010	5:31:56 PM	Bypass valve opened
8/6/2010	5:31:56 PM	Helium MFC set to  100.000000
8/6/2010	5:31:56 PM	H2 MFC set to  0.000000
8/6/2010	5:31:56 PM	BCl3 MFC set to  0.000000
8/6/2010	5:31:56 PM	PHl3 MFC set to  0.000000
8/6/2010	5:31:56 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:31:56 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:31:57 PM	Tube furnace set to 0
8/6/2010	5:38:07 PM	Helium valve closed
8/6/2010	5:38:07 PM	H2 valve closed
8/6/2010	5:38:07 PM	BCl3 valve closed
8/6/2010	5:38:07 PM	PH3 valve closed
8/6/2010	5:38:07 PM	SiCl4 pre valve closed
8/6/2010	5:38:07 PM	SiCl4 post valve closed
8/6/2010	5:38:07 PM	Bubbler valve closed
8/6/2010	5:38:07 PM	Main Vac valve opened
8/6/2010	5:38:07 PM	Bypass valve opened
8/6/2010	5:38:07 PM	Helium MFC set to  0.000000
8/6/2010	5:38:07 PM	H2 MFC set to  0.000000
8/6/2010	5:38:07 PM	BCl3 MFC set to  0.000000
8/6/2010	5:38:07 PM	PHl3 MFC set to  0.000000
8/6/2010	5:38:07 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:38:07 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:38:07 PM	Tube furnace set to 0
8/6/2010	5:38:08 PM	H2 valve closed
8/6/2010	5:38:08 PM	BCl3 valve closed
8/6/2010	5:38:08 PM	PH3 valve closed
8/6/2010	5:38:08 PM	SiCl4 pre valve closed
8/6/2010	5:38:08 PM	SiCl4 post valve closed
8/6/2010	5:38:08 PM	Bubbler valve closed
8/6/2010	5:38:08 PM	Helium valve opened
8/6/2010	5:38:08 PM	Main Vac valve opened
8/6/2010	5:38:08 PM	Bypass valve opened
8/6/2010	5:38:08 PM	Helium MFC set to  100.000000
8/6/2010	5:38:08 PM	H2 MFC set to  0.000000
8/6/2010	5:38:08 PM	BCl3 MFC set to  0.000000
8/6/2010	5:38:08 PM	PHl3 MFC set to  0.000000
8/6/2010	5:38:08 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:38:08 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:38:08 PM	Tube furnace set to 0
8/6/2010	5:38:09 PM	Helium valve closed
8/6/2010	5:38:09 PM	H2 valve closed
8/6/2010	5:38:09 PM	BCl3 valve closed
8/6/2010	5:38:09 PM	PH3 valve closed
8/6/2010	5:38:09 PM	SiCl4 pre valve closed
8/6/2010	5:38:09 PM	SiCl4 post valve closed
8/6/2010	5:38:09 PM	Bubbler valve closed
8/6/2010	5:38:09 PM	Main Vac valve opened
8/6/2010	5:38:09 PM	Bypass valve opened
8/6/2010	5:38:09 PM	Helium MFC set to  0.000000
8/6/2010	5:38:09 PM	H2 MFC set to  0.000000
8/6/2010	5:38:09 PM	BCl3 MFC set to  0.000000
8/6/2010	5:38:09 PM	PHl3 MFC set to  0.000000
8/6/2010	5:38:09 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:38:09 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:38:09 PM	Tube furnace set to 0
8/6/2010	5:38:10 PM	Run finished at 5:38 PM
8/6/2010	5:38:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	5:43:29 PM	Recipe started at 5:43 PM
8/6/2010	5:43:29 PM	Helium valve closed
8/6/2010	5:43:29 PM	BCl3 valve closed
8/6/2010	5:43:29 PM	PH3 valve closed
8/6/2010	5:43:29 PM	SiCl4 pre valve closed
8/6/2010	5:43:29 PM	SiCl4 post valve closed
8/6/2010	5:43:29 PM	Main Vac valve closed
8/6/2010	5:43:29 PM	Bypass valve closed
8/6/2010	5:43:29 PM	Bubbler valve closed
8/6/2010	5:43:29 PM	H2 valve opened
8/6/2010	5:43:29 PM	Helium MFC set to  0.000000
8/6/2010	5:43:29 PM	H2 MFC set to  500.000000
8/6/2010	5:43:29 PM	BCl3 MFC set to  0.000000
8/6/2010	5:43:29 PM	PHl3 MFC set to  0.000000
8/6/2010	5:43:29 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:43:29 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:43:29 PM	Tube furnace set to 0
8/6/2010	5:43:30 PM	Helium valve closed
8/6/2010	5:43:30 PM	BCl3 valve closed
8/6/2010	5:43:30 PM	PH3 valve closed
8/6/2010	5:43:30 PM	SiCl4 pre valve closed
8/6/2010	5:43:30 PM	SiCl4 post valve closed
8/6/2010	5:43:30 PM	Main Vac valve closed
8/6/2010	5:43:30 PM	Bypass valve closed
8/6/2010	5:43:30 PM	Bubbler valve closed
8/6/2010	5:43:30 PM	H2 valve opened
8/6/2010	5:43:30 PM	Helium MFC set to  0.000000
8/6/2010	5:43:30 PM	H2 MFC set to  500.000000
8/6/2010	5:43:30 PM	BCl3 MFC set to  0.000000
8/6/2010	5:43:30 PM	PHl3 MFC set to  0.000000
8/6/2010	5:43:30 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:43:30 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:43:30 PM	Tube furnace set to 1000
8/6/2010	5:43:30 PM	Helium valve closed
8/6/2010	5:43:30 PM	H2 valve closed
8/6/2010	5:43:30 PM	BCl3 valve closed
8/6/2010	5:43:30 PM	PH3 valve closed
8/6/2010	5:43:30 PM	SiCl4 pre valve closed
8/6/2010	5:43:30 PM	SiCl4 post valve closed
8/6/2010	5:43:30 PM	Main Vac valve closed
8/6/2010	5:43:30 PM	Bubbler valve closed
8/6/2010	5:43:30 PM	Bypass valve closed
8/6/2010	5:43:30 PM	Helium MFC set to  0.000000
8/6/2010	5:43:30 PM	H2 MFC set to  0.000000
8/6/2010	5:43:30 PM	BCl3 MFC set to  0.000000
8/6/2010	5:43:30 PM	PHl3 MFC set to  0.000000
8/6/2010	5:43:30 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:43:30 PM	Bypass solenoid MFC set to  760.000000
8/6/2010	5:43:30 PM	Tube furnace set to 0
8/6/2010	5:43:30 PM	Baratron reads 5.301319 Torr and NaOH valve is open.  Emergency exit.
8/6/2010	5:43:32 PM	Run aborted at 5:43 PM
8/6/2010	5:43:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	5:43:44 PM	Recipe started at 5:43 PM
8/6/2010	5:43:44 PM	Helium valve closed
8/6/2010	5:43:44 PM	H2 valve closed
8/6/2010	5:43:44 PM	BCl3 valve closed
8/6/2010	5:43:44 PM	PH3 valve closed
8/6/2010	5:43:44 PM	SiCl4 pre valve closed
8/6/2010	5:43:44 PM	SiCl4 post valve closed
8/6/2010	5:43:44 PM	Main Vac valve closed
8/6/2010	5:43:44 PM	Bubbler valve closed
8/6/2010	5:43:44 PM	Bypass valve opened
8/6/2010	5:43:44 PM	Helium MFC set to  0.000000
8/6/2010	5:43:44 PM	H2 MFC set to  0.000000
8/6/2010	5:43:44 PM	BCl3 MFC set to  0.000000
8/6/2010	5:43:44 PM	PHl3 MFC set to  0.000000
8/6/2010	5:43:44 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:43:44 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:43:44 PM	Tube furnace set to 0
8/6/2010	5:43:45 PM	Helium valve closed
8/6/2010	5:43:45 PM	H2 valve closed
8/6/2010	5:43:45 PM	BCl3 valve closed
8/6/2010	5:43:45 PM	PH3 valve closed
8/6/2010	5:43:45 PM	SiCl4 pre valve closed
8/6/2010	5:43:45 PM	SiCl4 post valve closed
8/6/2010	5:43:45 PM	Bubbler valve closed
8/6/2010	5:43:45 PM	Main Vac valve opened
8/6/2010	5:43:45 PM	Bypass valve opened
8/6/2010	5:43:45 PM	Helium MFC set to  0.000000
8/6/2010	5:43:45 PM	H2 MFC set to  0.000000
8/6/2010	5:43:45 PM	BCl3 MFC set to  0.000000
8/6/2010	5:43:45 PM	PHl3 MFC set to  0.000000
8/6/2010	5:43:45 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:43:45 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:43:45 PM	Tube furnace set to 0
8/6/2010	5:43:45 PM	Run finished at 5:43 PM
8/6/2010	5:43:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	5:45:52 PM	Recipe started at 5:45 PM
8/6/2010	5:45:52 PM	Helium valve closed
8/6/2010	5:45:52 PM	BCl3 valve closed
8/6/2010	5:45:52 PM	PH3 valve closed
8/6/2010	5:45:52 PM	SiCl4 pre valve closed
8/6/2010	5:45:52 PM	SiCl4 post valve closed
8/6/2010	5:45:52 PM	Main Vac valve closed
8/6/2010	5:45:52 PM	Bypass valve closed
8/6/2010	5:45:52 PM	Bubbler valve closed
8/6/2010	5:45:52 PM	H2 valve opened
8/6/2010	5:45:52 PM	Helium MFC set to  0.000000
8/6/2010	5:45:52 PM	H2 MFC set to  500.000000
8/6/2010	5:45:52 PM	BCl3 MFC set to  0.000000
8/6/2010	5:45:52 PM	PHl3 MFC set to  0.000000
8/6/2010	5:45:52 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:45:52 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:45:52 PM	Tube furnace set to 0
8/6/2010	5:47:13 PM	Helium valve closed
8/6/2010	5:47:13 PM	BCl3 valve closed
8/6/2010	5:47:13 PM	PH3 valve closed
8/6/2010	5:47:13 PM	SiCl4 pre valve closed
8/6/2010	5:47:13 PM	SiCl4 post valve closed
8/6/2010	5:47:13 PM	Main Vac valve closed
8/6/2010	5:47:13 PM	Bypass valve closed
8/6/2010	5:47:13 PM	H2 valve opened
8/6/2010	5:47:13 PM	Bubbler valve opened
8/6/2010	5:47:13 PM	Helium MFC set to  0.000000
8/6/2010	5:47:13 PM	H2 MFC set to  500.000000
8/6/2010	5:47:13 PM	BCl3 MFC set to  0.000000
8/6/2010	5:47:13 PM	PHl3 MFC set to  0.000000
8/6/2010	5:47:13 PM	SiCl4 MFC set to  0.000000
8/6/2010	5:47:13 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	5:47:13 PM	Tube furnace set to 1000
8/6/2010	6:07:13 PM	Helium valve closed
8/6/2010	6:07:13 PM	PH3 valve closed
8/6/2010	6:07:13 PM	Main Vac valve closed
8/6/2010	6:07:13 PM	Bypass valve closed
8/6/2010	6:07:13 PM	H2 valve opened
8/6/2010	6:07:13 PM	BCl3 valve opened
8/6/2010	6:07:13 PM	SiCl4 pre valve opened
8/6/2010	6:07:13 PM	SiCl4 post valve opened
8/6/2010	6:07:13 PM	Bubbler valve opened
8/6/2010	6:07:13 PM	Helium MFC set to  0.000000
8/6/2010	6:07:13 PM	H2 MFC set to  500.000000
8/6/2010	6:07:13 PM	BCl3 MFC set to  6.000000
8/6/2010	6:07:13 PM	PHl3 MFC set to  0.000000
8/6/2010	6:07:13 PM	SiCl4 MFC set to  50.000000
8/6/2010	6:07:13 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	6:07:14 PM	Tube furnace set to 1000
8/6/2010	6:27:14 PM	H2 valve closed
8/6/2010	6:27:14 PM	BCl3 valve closed
8/6/2010	6:27:14 PM	PH3 valve closed
8/6/2010	6:27:14 PM	SiCl4 pre valve closed
8/6/2010	6:27:14 PM	SiCl4 post valve closed
8/6/2010	6:27:14 PM	Main Vac valve closed
8/6/2010	6:27:14 PM	Bypass valve closed
8/6/2010	6:27:14 PM	Helium valve opened
8/6/2010	6:27:14 PM	Bubbler valve opened
8/6/2010	6:27:14 PM	Helium MFC set to  500.000000
8/6/2010	6:27:14 PM	H2 MFC set to  0.000000
8/6/2010	6:27:14 PM	BCl3 MFC set to  0.000000
8/6/2010	6:27:14 PM	PHl3 MFC set to  0.000000
8/6/2010	6:27:14 PM	SiCl4 MFC set to  0.000000
8/6/2010	6:27:14 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	6:27:14 PM	Tube furnace set to 0
8/6/2010	6:47:14 PM	Helium valve closed
8/6/2010	6:47:14 PM	H2 valve closed
8/6/2010	6:47:14 PM	BCl3 valve closed
8/6/2010	6:47:14 PM	PH3 valve closed
8/6/2010	6:47:14 PM	SiCl4 pre valve closed
8/6/2010	6:47:14 PM	SiCl4 post valve closed
8/6/2010	6:47:14 PM	Main Vac valve closed
8/6/2010	6:47:14 PM	Bypass valve closed
8/6/2010	6:47:14 PM	Bubbler valve closed
8/6/2010	6:47:14 PM	Helium MFC set to  0.000000
8/6/2010	6:47:14 PM	H2 MFC set to  0.000000
8/6/2010	6:47:14 PM	BCl3 MFC set to  0.000000
8/6/2010	6:47:14 PM	PHl3 MFC set to  0.000000
8/6/2010	6:47:14 PM	SiCl4 MFC set to  0.000000
8/6/2010	6:47:14 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	6:47:14 PM	Tube furnace set to 0
8/6/2010	6:47:14 PM	Run finished at 6:47 PM
8/6/2010	6:58:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	6:58:57 PM	Recipe started at 6:58 PM
8/6/2010	6:58:57 PM	Helium valve closed
8/6/2010	6:58:57 PM	H2 valve closed
8/6/2010	6:58:57 PM	BCl3 valve closed
8/6/2010	6:58:57 PM	PH3 valve closed
8/6/2010	6:58:57 PM	SiCl4 pre valve closed
8/6/2010	6:58:57 PM	SiCl4 post valve closed
8/6/2010	6:58:57 PM	Main Vac valve closed
8/6/2010	6:58:57 PM	Bubbler valve closed
8/6/2010	6:58:57 PM	Bypass valve opened
8/6/2010	6:58:57 PM	Helium MFC set to  0.000000
8/6/2010	6:58:57 PM	H2 MFC set to  0.000000
8/6/2010	6:58:57 PM	BCl3 MFC set to  0.000000
8/6/2010	6:58:57 PM	PHl3 MFC set to  0.000000
8/6/2010	6:58:57 PM	SiCl4 MFC set to  0.000000
8/6/2010	6:58:57 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	6:58:57 PM	Tube furnace set to 0
8/6/2010	6:59:36 PM	Helium valve closed
8/6/2010	6:59:36 PM	H2 valve closed
8/6/2010	6:59:36 PM	BCl3 valve closed
8/6/2010	6:59:36 PM	PH3 valve closed
8/6/2010	6:59:36 PM	SiCl4 pre valve closed
8/6/2010	6:59:36 PM	SiCl4 post valve closed
8/6/2010	6:59:36 PM	Bubbler valve closed
8/6/2010	6:59:36 PM	Main Vac valve opened
8/6/2010	6:59:36 PM	Bypass valve opened
8/6/2010	6:59:36 PM	Helium MFC set to  0.000000
8/6/2010	6:59:36 PM	H2 MFC set to  0.000000
8/6/2010	6:59:36 PM	BCl3 MFC set to  0.000000
8/6/2010	6:59:36 PM	PHl3 MFC set to  0.000000
8/6/2010	6:59:36 PM	SiCl4 MFC set to  0.000000
8/6/2010	6:59:36 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	6:59:36 PM	Tube furnace set to 0
8/6/2010	6:59:36 PM	Run finished at 6:59 PM
8/6/2010	6:59:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	7:00:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	7:00:04 PM	Recipe started at 7:00 PM
8/6/2010	7:00:04 PM	Helium valve closed
8/6/2010	7:00:04 PM	H2 valve closed
8/6/2010	7:00:04 PM	BCl3 valve closed
8/6/2010	7:00:04 PM	PH3 valve closed
8/6/2010	7:00:04 PM	SiCl4 pre valve closed
8/6/2010	7:00:04 PM	SiCl4 post valve closed
8/6/2010	7:00:04 PM	Main Vac valve closed
8/6/2010	7:00:04 PM	Bubbler valve closed
8/6/2010	7:00:04 PM	Bypass valve opened
8/6/2010	7:00:04 PM	Helium MFC set to  0.000000
8/6/2010	7:00:04 PM	H2 MFC set to  0.000000
8/6/2010	7:00:04 PM	BCl3 MFC set to  0.000000
8/6/2010	7:00:04 PM	PHl3 MFC set to  0.000000
8/6/2010	7:00:04 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:00:04 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:00:05 PM	Tube furnace set to 0
8/6/2010	7:00:05 PM	Helium valve closed
8/6/2010	7:00:05 PM	H2 valve closed
8/6/2010	7:00:05 PM	BCl3 valve closed
8/6/2010	7:00:05 PM	PH3 valve closed
8/6/2010	7:00:05 PM	SiCl4 pre valve closed
8/6/2010	7:00:05 PM	SiCl4 post valve closed
8/6/2010	7:00:05 PM	Bubbler valve closed
8/6/2010	7:00:05 PM	Main Vac valve opened
8/6/2010	7:00:05 PM	Bypass valve opened
8/6/2010	7:00:05 PM	Helium MFC set to  0.000000
8/6/2010	7:00:05 PM	H2 MFC set to  0.000000
8/6/2010	7:00:05 PM	BCl3 MFC set to  0.000000
8/6/2010	7:00:05 PM	PHl3 MFC set to  0.000000
8/6/2010	7:00:05 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:00:05 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:00:05 PM	Tube furnace set to 0
8/6/2010	7:01:05 PM	H2 valve closed
8/6/2010	7:01:05 PM	BCl3 valve closed
8/6/2010	7:01:05 PM	PH3 valve closed
8/6/2010	7:01:05 PM	SiCl4 pre valve closed
8/6/2010	7:01:05 PM	SiCl4 post valve closed
8/6/2010	7:01:05 PM	Bubbler valve closed
8/6/2010	7:01:05 PM	Helium valve opened
8/6/2010	7:01:05 PM	Main Vac valve opened
8/6/2010	7:01:05 PM	Bypass valve opened
8/6/2010	7:01:05 PM	Helium MFC set to  100.000000
8/6/2010	7:01:05 PM	H2 MFC set to  0.000000
8/6/2010	7:01:05 PM	BCl3 MFC set to  0.000000
8/6/2010	7:01:05 PM	PHl3 MFC set to  0.000000
8/6/2010	7:01:05 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:01:05 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:01:05 PM	Tube furnace set to 0
8/6/2010	7:10:05 PM	Helium valve closed
8/6/2010	7:10:05 PM	H2 valve closed
8/6/2010	7:10:05 PM	BCl3 valve closed
8/6/2010	7:10:05 PM	PH3 valve closed
8/6/2010	7:10:05 PM	SiCl4 pre valve closed
8/6/2010	7:10:05 PM	SiCl4 post valve closed
8/6/2010	7:10:05 PM	Bubbler valve closed
8/6/2010	7:10:05 PM	Main Vac valve opened
8/6/2010	7:10:05 PM	Bypass valve opened
8/6/2010	7:10:05 PM	Helium MFC set to  0.000000
8/6/2010	7:10:05 PM	H2 MFC set to  0.000000
8/6/2010	7:10:05 PM	BCl3 MFC set to  0.000000
8/6/2010	7:10:05 PM	PHl3 MFC set to  0.000000
8/6/2010	7:10:05 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:10:05 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:10:05 PM	Tube furnace set to 0
8/6/2010	7:11:05 PM	H2 valve closed
8/6/2010	7:11:05 PM	BCl3 valve closed
8/6/2010	7:11:05 PM	PH3 valve closed
8/6/2010	7:11:05 PM	SiCl4 pre valve closed
8/6/2010	7:11:05 PM	SiCl4 post valve closed
8/6/2010	7:11:05 PM	Bubbler valve closed
8/6/2010	7:11:05 PM	Helium valve opened
8/6/2010	7:11:05 PM	Main Vac valve opened
8/6/2010	7:11:05 PM	Bypass valve opened
8/6/2010	7:11:05 PM	Helium MFC set to  100.000000
8/6/2010	7:11:05 PM	H2 MFC set to  0.000000
8/6/2010	7:11:06 PM	BCl3 MFC set to  0.000000
8/6/2010	7:11:06 PM	PHl3 MFC set to  0.000000
8/6/2010	7:11:06 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:11:06 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:11:06 PM	Tube furnace set to 0
8/6/2010	7:20:06 PM	Helium valve closed
8/6/2010	7:20:06 PM	H2 valve closed
8/6/2010	7:20:06 PM	BCl3 valve closed
8/6/2010	7:20:06 PM	PH3 valve closed
8/6/2010	7:20:06 PM	SiCl4 pre valve closed
8/6/2010	7:20:06 PM	SiCl4 post valve closed
8/6/2010	7:20:06 PM	Bubbler valve closed
8/6/2010	7:20:06 PM	Main Vac valve opened
8/6/2010	7:20:06 PM	Bypass valve opened
8/6/2010	7:20:06 PM	Helium MFC set to  0.000000
8/6/2010	7:20:06 PM	H2 MFC set to  0.000000
8/6/2010	7:20:06 PM	BCl3 MFC set to  0.000000
8/6/2010	7:20:06 PM	PHl3 MFC set to  0.000000
8/6/2010	7:20:06 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:20:06 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:20:06 PM	Tube furnace set to 0
8/6/2010	7:21:06 PM	H2 valve closed
8/6/2010	7:21:06 PM	BCl3 valve closed
8/6/2010	7:21:06 PM	PH3 valve closed
8/6/2010	7:21:06 PM	SiCl4 pre valve closed
8/6/2010	7:21:06 PM	SiCl4 post valve closed
8/6/2010	7:21:06 PM	Bubbler valve closed
8/6/2010	7:21:06 PM	Helium valve opened
8/6/2010	7:21:06 PM	Main Vac valve opened
8/6/2010	7:21:06 PM	Bypass valve opened
8/6/2010	7:21:06 PM	Helium MFC set to  100.000000
8/6/2010	7:21:06 PM	H2 MFC set to  0.000000
8/6/2010	7:21:06 PM	BCl3 MFC set to  0.000000
8/6/2010	7:21:06 PM	PHl3 MFC set to  0.000000
8/6/2010	7:21:06 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:21:06 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:21:06 PM	Tube furnace set to 0
8/6/2010	7:30:06 PM	Helium valve closed
8/6/2010	7:30:06 PM	H2 valve closed
8/6/2010	7:30:06 PM	BCl3 valve closed
8/6/2010	7:30:06 PM	PH3 valve closed
8/6/2010	7:30:06 PM	SiCl4 pre valve closed
8/6/2010	7:30:06 PM	SiCl4 post valve closed
8/6/2010	7:30:06 PM	Bubbler valve closed
8/6/2010	7:30:06 PM	Main Vac valve opened
8/6/2010	7:30:06 PM	Bypass valve opened
8/6/2010	7:30:06 PM	Helium MFC set to  0.000000
8/6/2010	7:30:06 PM	H2 MFC set to  0.000000
8/6/2010	7:30:06 PM	BCl3 MFC set to  0.000000
8/6/2010	7:30:06 PM	PHl3 MFC set to  0.000000
8/6/2010	7:30:06 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:30:06 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:30:06 PM	Tube furnace set to 0
8/6/2010	7:30:07 PM	Run finished at 7:30 PM
8/6/2010	7:30:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	7:43:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	7:43:30 PM	Recipe started at 7:43 PM
8/6/2010	7:43:30 PM	Helium valve closed
8/6/2010	7:43:30 PM	H2 valve closed
8/6/2010	7:43:30 PM	BCl3 valve closed
8/6/2010	7:43:30 PM	PH3 valve closed
8/6/2010	7:43:30 PM	SiCl4 pre valve closed
8/6/2010	7:43:30 PM	SiCl4 post valve closed
8/6/2010	7:43:30 PM	Main Vac valve closed
8/6/2010	7:43:30 PM	Bubbler valve closed
8/6/2010	7:43:30 PM	Bypass valve opened
8/6/2010	7:43:30 PM	Helium MFC set to  0.000000
8/6/2010	7:43:30 PM	H2 MFC set to  0.000000
8/6/2010	7:43:30 PM	BCl3 MFC set to  0.000000
8/6/2010	7:43:30 PM	PHl3 MFC set to  0.000000
8/6/2010	7:43:30 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:43:30 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:43:30 PM	Tube furnace set to 0
8/6/2010	7:43:30 PM	Helium valve closed
8/6/2010	7:43:30 PM	H2 valve closed
8/6/2010	7:43:30 PM	BCl3 valve closed
8/6/2010	7:43:30 PM	PH3 valve closed
8/6/2010	7:43:30 PM	SiCl4 pre valve closed
8/6/2010	7:43:30 PM	SiCl4 post valve closed
8/6/2010	7:43:30 PM	Bubbler valve closed
8/6/2010	7:43:30 PM	Main Vac valve opened
8/6/2010	7:43:30 PM	Bypass valve opened
8/6/2010	7:43:30 PM	Helium MFC set to  0.000000
8/6/2010	7:43:30 PM	H2 MFC set to  0.000000
8/6/2010	7:43:30 PM	BCl3 MFC set to  0.000000
8/6/2010	7:43:30 PM	PHl3 MFC set to  0.000000
8/6/2010	7:43:30 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:43:30 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:43:30 PM	Tube furnace set to 0
8/6/2010	7:44:30 PM	H2 valve closed
8/6/2010	7:44:30 PM	BCl3 valve closed
8/6/2010	7:44:30 PM	PH3 valve closed
8/6/2010	7:44:30 PM	SiCl4 pre valve closed
8/6/2010	7:44:30 PM	SiCl4 post valve closed
8/6/2010	7:44:30 PM	Bubbler valve closed
8/6/2010	7:44:30 PM	Helium valve opened
8/6/2010	7:44:30 PM	Main Vac valve opened
8/6/2010	7:44:30 PM	Bypass valve opened
8/6/2010	7:44:30 PM	Helium MFC set to  100.000000
8/6/2010	7:44:30 PM	H2 MFC set to  0.000000
8/6/2010	7:44:30 PM	BCl3 MFC set to  0.000000
8/6/2010	7:44:30 PM	PHl3 MFC set to  0.000000
8/6/2010	7:44:30 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:44:30 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:44:30 PM	Tube furnace set to 0
8/6/2010	7:48:07 PM	Helium valve closed
8/6/2010	7:48:07 PM	H2 valve closed
8/6/2010	7:48:07 PM	BCl3 valve closed
8/6/2010	7:48:07 PM	PH3 valve closed
8/6/2010	7:48:07 PM	SiCl4 pre valve closed
8/6/2010	7:48:07 PM	SiCl4 post valve closed
8/6/2010	7:48:07 PM	Bubbler valve closed
8/6/2010	7:48:07 PM	Main Vac valve opened
8/6/2010	7:48:07 PM	Bypass valve opened
8/6/2010	7:48:07 PM	Helium MFC set to  0.000000
8/6/2010	7:48:07 PM	H2 MFC set to  0.000000
8/6/2010	7:48:07 PM	BCl3 MFC set to  0.000000
8/6/2010	7:48:07 PM	PHl3 MFC set to  0.000000
8/6/2010	7:48:07 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:48:07 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:48:07 PM	Tube furnace set to 0
8/6/2010	7:48:17 PM	H2 valve closed
8/6/2010	7:48:17 PM	BCl3 valve closed
8/6/2010	7:48:17 PM	PH3 valve closed
8/6/2010	7:48:17 PM	SiCl4 pre valve closed
8/6/2010	7:48:17 PM	SiCl4 post valve closed
8/6/2010	7:48:17 PM	Bubbler valve closed
8/6/2010	7:48:17 PM	Helium valve opened
8/6/2010	7:48:17 PM	Main Vac valve opened
8/6/2010	7:48:17 PM	Bypass valve opened
8/6/2010	7:48:17 PM	Helium MFC set to  100.000000
8/6/2010	7:48:17 PM	H2 MFC set to  0.000000
8/6/2010	7:48:17 PM	BCl3 MFC set to  0.000000
8/6/2010	7:48:17 PM	PHl3 MFC set to  0.000000
8/6/2010	7:48:17 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:48:17 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:48:17 PM	Tube furnace set to 0
8/6/2010	7:48:18 PM	Helium valve closed
8/6/2010	7:48:18 PM	H2 valve closed
8/6/2010	7:48:18 PM	BCl3 valve closed
8/6/2010	7:48:18 PM	PH3 valve closed
8/6/2010	7:48:18 PM	SiCl4 pre valve closed
8/6/2010	7:48:18 PM	SiCl4 post valve closed
8/6/2010	7:48:18 PM	Bubbler valve closed
8/6/2010	7:48:18 PM	Main Vac valve opened
8/6/2010	7:48:18 PM	Bypass valve opened
8/6/2010	7:48:18 PM	Helium MFC set to  0.000000
8/6/2010	7:48:18 PM	H2 MFC set to  0.000000
8/6/2010	7:48:18 PM	BCl3 MFC set to  0.000000
8/6/2010	7:48:18 PM	PHl3 MFC set to  0.000000
8/6/2010	7:48:18 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:48:18 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:48:18 PM	Tube furnace set to 0
8/6/2010	7:48:19 PM	H2 valve closed
8/6/2010	7:48:19 PM	BCl3 valve closed
8/6/2010	7:48:19 PM	PH3 valve closed
8/6/2010	7:48:19 PM	SiCl4 pre valve closed
8/6/2010	7:48:19 PM	SiCl4 post valve closed
8/6/2010	7:48:19 PM	Bubbler valve closed
8/6/2010	7:48:19 PM	Helium valve opened
8/6/2010	7:48:19 PM	Main Vac valve opened
8/6/2010	7:48:19 PM	Bypass valve opened
8/6/2010	7:48:19 PM	Helium MFC set to  100.000000
8/6/2010	7:48:19 PM	H2 MFC set to  0.000000
8/6/2010	7:48:19 PM	BCl3 MFC set to  0.000000
8/6/2010	7:48:19 PM	PHl3 MFC set to  0.000000
8/6/2010	7:48:19 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:48:19 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:48:19 PM	Tube furnace set to 0
8/6/2010	7:48:20 PM	Helium valve closed
8/6/2010	7:48:20 PM	H2 valve closed
8/6/2010	7:48:20 PM	BCl3 valve closed
8/6/2010	7:48:20 PM	PH3 valve closed
8/6/2010	7:48:20 PM	SiCl4 pre valve closed
8/6/2010	7:48:20 PM	SiCl4 post valve closed
8/6/2010	7:48:20 PM	Bubbler valve closed
8/6/2010	7:48:20 PM	Main Vac valve opened
8/6/2010	7:48:20 PM	Bypass valve opened
8/6/2010	7:48:20 PM	Helium MFC set to  0.000000
8/6/2010	7:48:20 PM	H2 MFC set to  0.000000
8/6/2010	7:48:20 PM	BCl3 MFC set to  0.000000
8/6/2010	7:48:20 PM	PHl3 MFC set to  0.000000
8/6/2010	7:48:20 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:48:20 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:48:20 PM	Tube furnace set to 0
8/6/2010	7:48:21 PM	Run finished at 7:48 PM
8/6/2010	7:48:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	7:51:49 PM	Recipe started at 7:51 PM
8/6/2010	7:51:49 PM	Helium valve closed
8/6/2010	7:51:49 PM	BCl3 valve closed
8/6/2010	7:51:49 PM	PH3 valve closed
8/6/2010	7:51:49 PM	SiCl4 pre valve closed
8/6/2010	7:51:49 PM	SiCl4 post valve closed
8/6/2010	7:51:49 PM	Main Vac valve closed
8/6/2010	7:51:49 PM	Bypass valve closed
8/6/2010	7:51:49 PM	Bubbler valve closed
8/6/2010	7:51:49 PM	H2 valve opened
8/6/2010	7:51:49 PM	Helium MFC set to  0.000000
8/6/2010	7:51:49 PM	H2 MFC set to  500.000000
8/6/2010	7:51:49 PM	BCl3 MFC set to  0.000000
8/6/2010	7:51:49 PM	PHl3 MFC set to  0.000000
8/6/2010	7:51:49 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:51:49 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:51:49 PM	Tube furnace set to 0
8/6/2010	7:53:08 PM	Helium valve closed
8/6/2010	7:53:08 PM	BCl3 valve closed
8/6/2010	7:53:08 PM	PH3 valve closed
8/6/2010	7:53:08 PM	SiCl4 pre valve closed
8/6/2010	7:53:08 PM	SiCl4 post valve closed
8/6/2010	7:53:08 PM	Main Vac valve closed
8/6/2010	7:53:08 PM	Bypass valve closed
8/6/2010	7:53:08 PM	H2 valve opened
8/6/2010	7:53:08 PM	Bubbler valve opened
8/6/2010	7:53:08 PM	Helium MFC set to  0.000000
8/6/2010	7:53:08 PM	H2 MFC set to  500.000000
8/6/2010	7:53:08 PM	BCl3 MFC set to  0.000000
8/6/2010	7:53:08 PM	PHl3 MFC set to  0.000000
8/6/2010	7:53:08 PM	SiCl4 MFC set to  0.000000
8/6/2010	7:53:08 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	7:53:08 PM	Tube furnace set to 1000
8/6/2010	8:13:08 PM	Helium valve closed
8/6/2010	8:13:08 PM	PH3 valve closed
8/6/2010	8:13:08 PM	Main Vac valve closed
8/6/2010	8:13:08 PM	Bypass valve closed
8/6/2010	8:13:08 PM	H2 valve opened
8/6/2010	8:13:08 PM	BCl3 valve opened
8/6/2010	8:13:08 PM	SiCl4 pre valve opened
8/6/2010	8:13:08 PM	SiCl4 post valve opened
8/6/2010	8:13:08 PM	Bubbler valve opened
8/6/2010	8:13:08 PM	Helium MFC set to  0.000000
8/6/2010	8:13:08 PM	H2 MFC set to  500.000000
8/6/2010	8:13:08 PM	BCl3 MFC set to  6.000000
8/6/2010	8:13:08 PM	PHl3 MFC set to  0.000000
8/6/2010	8:13:08 PM	SiCl4 MFC set to  50.000000
8/6/2010	8:13:08 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:13:08 PM	Tube furnace set to 1000
8/6/2010	8:33:08 PM	H2 valve closed
8/6/2010	8:33:08 PM	BCl3 valve closed
8/6/2010	8:33:08 PM	PH3 valve closed
8/6/2010	8:33:08 PM	SiCl4 pre valve closed
8/6/2010	8:33:08 PM	SiCl4 post valve closed
8/6/2010	8:33:08 PM	Main Vac valve closed
8/6/2010	8:33:08 PM	Bypass valve closed
8/6/2010	8:33:08 PM	Helium valve opened
8/6/2010	8:33:08 PM	Bubbler valve opened
8/6/2010	8:33:08 PM	Helium MFC set to  500.000000
8/6/2010	8:33:08 PM	H2 MFC set to  0.000000
8/6/2010	8:33:08 PM	BCl3 MFC set to  0.000000
8/6/2010	8:33:08 PM	PHl3 MFC set to  0.000000
8/6/2010	8:33:08 PM	SiCl4 MFC set to  0.000000
8/6/2010	8:33:08 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:33:08 PM	Tube furnace set to 0
8/6/2010	8:53:08 PM	Helium valve closed
8/6/2010	8:53:08 PM	H2 valve closed
8/6/2010	8:53:08 PM	BCl3 valve closed
8/6/2010	8:53:08 PM	PH3 valve closed
8/6/2010	8:53:08 PM	SiCl4 pre valve closed
8/6/2010	8:53:08 PM	SiCl4 post valve closed
8/6/2010	8:53:08 PM	Main Vac valve closed
8/6/2010	8:53:08 PM	Bypass valve closed
8/6/2010	8:53:08 PM	Bubbler valve closed
8/6/2010	8:53:08 PM	Helium MFC set to  0.000000
8/6/2010	8:53:08 PM	H2 MFC set to  0.000000
8/6/2010	8:53:08 PM	BCl3 MFC set to  0.000000
8/6/2010	8:53:08 PM	PHl3 MFC set to  0.000000
8/6/2010	8:53:08 PM	SiCl4 MFC set to  0.000000
8/6/2010	8:53:08 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	8:53:09 PM	Tube furnace set to 0
8/6/2010	8:53:09 PM	Run finished at 8:53 PM
8/6/2010	9:41:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	9:41:31 PM	Recipe started at 9:41 PM
8/6/2010	9:41:31 PM	Helium valve closed
8/6/2010	9:41:31 PM	H2 valve closed
8/6/2010	9:41:31 PM	BCl3 valve closed
8/6/2010	9:41:31 PM	PH3 valve closed
8/6/2010	9:41:31 PM	SiCl4 pre valve closed
8/6/2010	9:41:31 PM	SiCl4 post valve closed
8/6/2010	9:41:31 PM	Main Vac valve closed
8/6/2010	9:41:31 PM	Bubbler valve closed
8/6/2010	9:41:31 PM	Bypass valve opened
8/6/2010	9:41:31 PM	Helium MFC set to  0.000000
8/6/2010	9:41:31 PM	H2 MFC set to  0.000000
8/6/2010	9:41:31 PM	BCl3 MFC set to  0.000000
8/6/2010	9:41:31 PM	PHl3 MFC set to  0.000000
8/6/2010	9:41:31 PM	SiCl4 MFC set to  0.000000
8/6/2010	9:41:31 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:41:31 PM	Tube furnace set to 0
8/6/2010	9:42:11 PM	Helium valve closed
8/6/2010	9:42:11 PM	H2 valve closed
8/6/2010	9:42:11 PM	BCl3 valve closed
8/6/2010	9:42:11 PM	PH3 valve closed
8/6/2010	9:42:11 PM	SiCl4 pre valve closed
8/6/2010	9:42:11 PM	SiCl4 post valve closed
8/6/2010	9:42:11 PM	Bubbler valve closed
8/6/2010	9:42:11 PM	Main Vac valve opened
8/6/2010	9:42:11 PM	Bypass valve opened
8/6/2010	9:42:11 PM	Helium MFC set to  0.000000
8/6/2010	9:42:11 PM	H2 MFC set to  0.000000
8/6/2010	9:42:11 PM	BCl3 MFC set to  0.000000
8/6/2010	9:42:11 PM	PHl3 MFC set to  0.000000
8/6/2010	9:42:11 PM	SiCl4 MFC set to  0.000000
8/6/2010	9:42:11 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:42:11 PM	Tube furnace set to 0
8/6/2010	9:42:11 PM	Run finished at 9:42 PM
8/6/2010	9:42:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	9:50:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	9:50:31 PM	Recipe started at 9:50 PM
8/6/2010	9:50:31 PM	Helium valve closed
8/6/2010	9:50:31 PM	H2 valve closed
8/6/2010	9:50:31 PM	BCl3 valve closed
8/6/2010	9:50:31 PM	PH3 valve closed
8/6/2010	9:50:31 PM	SiCl4 pre valve closed
8/6/2010	9:50:31 PM	SiCl4 post valve closed
8/6/2010	9:50:31 PM	Main Vac valve closed
8/6/2010	9:50:31 PM	Bubbler valve closed
8/6/2010	9:50:31 PM	Bypass valve opened
8/6/2010	9:50:31 PM	Helium MFC set to  0.000000
8/6/2010	9:50:31 PM	H2 MFC set to  0.000000
8/6/2010	9:50:31 PM	BCl3 MFC set to  0.000000
8/6/2010	9:50:31 PM	PHl3 MFC set to  0.000000
8/6/2010	9:50:31 PM	SiCl4 MFC set to  0.000000
8/6/2010	9:50:31 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:50:31 PM	Tube furnace set to 0
8/6/2010	9:50:31 PM	Helium valve closed
8/6/2010	9:50:31 PM	H2 valve closed
8/6/2010	9:50:31 PM	BCl3 valve closed
8/6/2010	9:50:31 PM	PH3 valve closed
8/6/2010	9:50:31 PM	SiCl4 pre valve closed
8/6/2010	9:50:31 PM	SiCl4 post valve closed
8/6/2010	9:50:31 PM	Bubbler valve closed
8/6/2010	9:50:31 PM	Main Vac valve opened
8/6/2010	9:50:31 PM	Bypass valve opened
8/6/2010	9:50:31 PM	Helium MFC set to  0.000000
8/6/2010	9:50:31 PM	H2 MFC set to  0.000000
8/6/2010	9:50:31 PM	BCl3 MFC set to  0.000000
8/6/2010	9:50:31 PM	PHl3 MFC set to  0.000000
8/6/2010	9:50:31 PM	SiCl4 MFC set to  0.000000
8/6/2010	9:50:31 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:50:32 PM	Tube furnace set to 0
8/6/2010	9:51:32 PM	H2 valve closed
8/6/2010	9:51:32 PM	BCl3 valve closed
8/6/2010	9:51:32 PM	PH3 valve closed
8/6/2010	9:51:32 PM	SiCl4 pre valve closed
8/6/2010	9:51:32 PM	SiCl4 post valve closed
8/6/2010	9:51:32 PM	Bubbler valve closed
8/6/2010	9:51:32 PM	Helium valve opened
8/6/2010	9:51:32 PM	Main Vac valve opened
8/6/2010	9:51:32 PM	Bypass valve opened
8/6/2010	9:51:32 PM	Helium MFC set to  100.000000
8/6/2010	9:51:32 PM	H2 MFC set to  0.000000
8/6/2010	9:51:32 PM	BCl3 MFC set to  0.000000
8/6/2010	9:51:32 PM	PHl3 MFC set to  0.000000
8/6/2010	9:51:32 PM	SiCl4 MFC set to  0.000000
8/6/2010	9:51:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	9:51:32 PM	Tube furnace set to 0
8/6/2010	10:00:32 PM	Helium valve closed
8/6/2010	10:00:32 PM	H2 valve closed
8/6/2010	10:00:32 PM	BCl3 valve closed
8/6/2010	10:00:32 PM	PH3 valve closed
8/6/2010	10:00:32 PM	SiCl4 pre valve closed
8/6/2010	10:00:32 PM	SiCl4 post valve closed
8/6/2010	10:00:32 PM	Bubbler valve closed
8/6/2010	10:00:32 PM	Main Vac valve opened
8/6/2010	10:00:32 PM	Bypass valve opened
8/6/2010	10:00:32 PM	Helium MFC set to  0.000000
8/6/2010	10:00:32 PM	H2 MFC set to  0.000000
8/6/2010	10:00:32 PM	BCl3 MFC set to  0.000000
8/6/2010	10:00:32 PM	PHl3 MFC set to  0.000000
8/6/2010	10:00:32 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:00:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:00:32 PM	Tube furnace set to 0
8/6/2010	10:01:32 PM	H2 valve closed
8/6/2010	10:01:32 PM	BCl3 valve closed
8/6/2010	10:01:32 PM	PH3 valve closed
8/6/2010	10:01:32 PM	SiCl4 pre valve closed
8/6/2010	10:01:32 PM	SiCl4 post valve closed
8/6/2010	10:01:32 PM	Bubbler valve closed
8/6/2010	10:01:32 PM	Helium valve opened
8/6/2010	10:01:32 PM	Main Vac valve opened
8/6/2010	10:01:32 PM	Bypass valve opened
8/6/2010	10:01:32 PM	Helium MFC set to  100.000000
8/6/2010	10:01:32 PM	H2 MFC set to  0.000000
8/6/2010	10:01:32 PM	BCl3 MFC set to  0.000000
8/6/2010	10:01:32 PM	PHl3 MFC set to  0.000000
8/6/2010	10:01:32 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:01:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:01:32 PM	Tube furnace set to 0
8/6/2010	10:10:32 PM	Helium valve closed
8/6/2010	10:10:32 PM	H2 valve closed
8/6/2010	10:10:32 PM	BCl3 valve closed
8/6/2010	10:10:32 PM	PH3 valve closed
8/6/2010	10:10:32 PM	SiCl4 pre valve closed
8/6/2010	10:10:32 PM	SiCl4 post valve closed
8/6/2010	10:10:32 PM	Bubbler valve closed
8/6/2010	10:10:32 PM	Main Vac valve opened
8/6/2010	10:10:32 PM	Bypass valve opened
8/6/2010	10:10:32 PM	Helium MFC set to  0.000000
8/6/2010	10:10:32 PM	H2 MFC set to  0.000000
8/6/2010	10:10:32 PM	BCl3 MFC set to  0.000000
8/6/2010	10:10:32 PM	PHl3 MFC set to  0.000000
8/6/2010	10:10:32 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:10:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:10:32 PM	Tube furnace set to 0
8/6/2010	10:11:32 PM	H2 valve closed
8/6/2010	10:11:32 PM	BCl3 valve closed
8/6/2010	10:11:32 PM	PH3 valve closed
8/6/2010	10:11:32 PM	SiCl4 pre valve closed
8/6/2010	10:11:32 PM	SiCl4 post valve closed
8/6/2010	10:11:32 PM	Bubbler valve closed
8/6/2010	10:11:32 PM	Helium valve opened
8/6/2010	10:11:32 PM	Main Vac valve opened
8/6/2010	10:11:32 PM	Bypass valve opened
8/6/2010	10:11:32 PM	Helium MFC set to  100.000000
8/6/2010	10:11:32 PM	H2 MFC set to  0.000000
8/6/2010	10:11:32 PM	BCl3 MFC set to  0.000000
8/6/2010	10:11:32 PM	PHl3 MFC set to  0.000000
8/6/2010	10:11:32 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:11:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:11:33 PM	Tube furnace set to 0
8/6/2010	10:20:33 PM	Helium valve closed
8/6/2010	10:20:33 PM	H2 valve closed
8/6/2010	10:20:33 PM	BCl3 valve closed
8/6/2010	10:20:33 PM	PH3 valve closed
8/6/2010	10:20:33 PM	SiCl4 pre valve closed
8/6/2010	10:20:33 PM	SiCl4 post valve closed
8/6/2010	10:20:33 PM	Bubbler valve closed
8/6/2010	10:20:33 PM	Main Vac valve opened
8/6/2010	10:20:33 PM	Bypass valve opened
8/6/2010	10:20:33 PM	Helium MFC set to  0.000000
8/6/2010	10:20:33 PM	H2 MFC set to  0.000000
8/6/2010	10:20:33 PM	BCl3 MFC set to  0.000000
8/6/2010	10:20:33 PM	PHl3 MFC set to  0.000000
8/6/2010	10:20:33 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:20:33 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:20:33 PM	Tube furnace set to 0
8/6/2010	10:20:34 PM	Run finished at 10:20 PM
8/6/2010	10:20:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	10:25:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	10:25:28 PM	Recipe started at 10:25 PM
8/6/2010	10:25:28 PM	Helium valve closed
8/6/2010	10:25:28 PM	H2 valve closed
8/6/2010	10:25:28 PM	BCl3 valve closed
8/6/2010	10:25:28 PM	PH3 valve closed
8/6/2010	10:25:28 PM	SiCl4 pre valve closed
8/6/2010	10:25:28 PM	SiCl4 post valve closed
8/6/2010	10:25:28 PM	Main Vac valve closed
8/6/2010	10:25:28 PM	Bubbler valve closed
8/6/2010	10:25:28 PM	Bypass valve opened
8/6/2010	10:25:28 PM	Helium MFC set to  0.000000
8/6/2010	10:25:28 PM	H2 MFC set to  0.000000
8/6/2010	10:25:28 PM	BCl3 MFC set to  0.000000
8/6/2010	10:25:28 PM	PHl3 MFC set to  0.000000
8/6/2010	10:25:28 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:25:28 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:25:28 PM	Tube furnace set to 0
8/6/2010	10:25:28 PM	Helium valve closed
8/6/2010	10:25:28 PM	H2 valve closed
8/6/2010	10:25:28 PM	BCl3 valve closed
8/6/2010	10:25:28 PM	PH3 valve closed
8/6/2010	10:25:28 PM	SiCl4 pre valve closed
8/6/2010	10:25:28 PM	SiCl4 post valve closed
8/6/2010	10:25:28 PM	Bubbler valve closed
8/6/2010	10:25:28 PM	Main Vac valve opened
8/6/2010	10:25:28 PM	Bypass valve opened
8/6/2010	10:25:28 PM	Helium MFC set to  0.000000
8/6/2010	10:25:28 PM	H2 MFC set to  0.000000
8/6/2010	10:25:28 PM	BCl3 MFC set to  0.000000
8/6/2010	10:25:28 PM	PHl3 MFC set to  0.000000
8/6/2010	10:25:28 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:25:28 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:25:28 PM	Tube furnace set to 0
8/6/2010	10:26:28 PM	H2 valve closed
8/6/2010	10:26:28 PM	BCl3 valve closed
8/6/2010	10:26:28 PM	PH3 valve closed
8/6/2010	10:26:28 PM	SiCl4 pre valve closed
8/6/2010	10:26:28 PM	SiCl4 post valve closed
8/6/2010	10:26:28 PM	Bubbler valve closed
8/6/2010	10:26:28 PM	Helium valve opened
8/6/2010	10:26:28 PM	Main Vac valve opened
8/6/2010	10:26:28 PM	Bypass valve opened
8/6/2010	10:26:28 PM	Helium MFC set to  100.000000
8/6/2010	10:26:28 PM	H2 MFC set to  0.000000
8/6/2010	10:26:28 PM	BCl3 MFC set to  0.000000
8/6/2010	10:26:28 PM	PHl3 MFC set to  0.000000
8/6/2010	10:26:28 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:26:28 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:26:28 PM	Tube furnace set to 0
8/6/2010	10:35:28 PM	Helium valve closed
8/6/2010	10:35:28 PM	H2 valve closed
8/6/2010	10:35:28 PM	BCl3 valve closed
8/6/2010	10:35:28 PM	PH3 valve closed
8/6/2010	10:35:28 PM	SiCl4 pre valve closed
8/6/2010	10:35:28 PM	SiCl4 post valve closed
8/6/2010	10:35:28 PM	Bubbler valve closed
8/6/2010	10:35:28 PM	Main Vac valve opened
8/6/2010	10:35:28 PM	Bypass valve opened
8/6/2010	10:35:28 PM	Helium MFC set to  0.000000
8/6/2010	10:35:28 PM	H2 MFC set to  0.000000
8/6/2010	10:35:28 PM	BCl3 MFC set to  0.000000
8/6/2010	10:35:28 PM	PHl3 MFC set to  0.000000
8/6/2010	10:35:28 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:35:28 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:35:29 PM	Tube furnace set to 0
8/6/2010	10:36:29 PM	H2 valve closed
8/6/2010	10:36:29 PM	BCl3 valve closed
8/6/2010	10:36:29 PM	PH3 valve closed
8/6/2010	10:36:29 PM	SiCl4 pre valve closed
8/6/2010	10:36:29 PM	SiCl4 post valve closed
8/6/2010	10:36:29 PM	Bubbler valve closed
8/6/2010	10:36:29 PM	Helium valve opened
8/6/2010	10:36:29 PM	Main Vac valve opened
8/6/2010	10:36:29 PM	Bypass valve opened
8/6/2010	10:36:29 PM	Helium MFC set to  100.000000
8/6/2010	10:36:29 PM	H2 MFC set to  0.000000
8/6/2010	10:36:29 PM	BCl3 MFC set to  0.000000
8/6/2010	10:36:29 PM	PHl3 MFC set to  0.000000
8/6/2010	10:36:29 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:36:29 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:36:29 PM	Tube furnace set to 0
8/6/2010	10:36:39 PM	Helium valve closed
8/6/2010	10:36:39 PM	H2 valve closed
8/6/2010	10:36:39 PM	BCl3 valve closed
8/6/2010	10:36:39 PM	PH3 valve closed
8/6/2010	10:36:39 PM	SiCl4 pre valve closed
8/6/2010	10:36:39 PM	SiCl4 post valve closed
8/6/2010	10:36:39 PM	Bubbler valve closed
8/6/2010	10:36:39 PM	Main Vac valve opened
8/6/2010	10:36:39 PM	Bypass valve opened
8/6/2010	10:36:39 PM	Helium MFC set to  0.000000
8/6/2010	10:36:39 PM	H2 MFC set to  0.000000
8/6/2010	10:36:39 PM	BCl3 MFC set to  0.000000
8/6/2010	10:36:39 PM	PHl3 MFC set to  0.000000
8/6/2010	10:36:39 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:36:39 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:36:39 PM	Tube furnace set to 0
8/6/2010	10:36:40 PM	H2 valve closed
8/6/2010	10:36:40 PM	BCl3 valve closed
8/6/2010	10:36:40 PM	PH3 valve closed
8/6/2010	10:36:40 PM	SiCl4 pre valve closed
8/6/2010	10:36:40 PM	SiCl4 post valve closed
8/6/2010	10:36:40 PM	Bubbler valve closed
8/6/2010	10:36:40 PM	Helium valve opened
8/6/2010	10:36:40 PM	Main Vac valve opened
8/6/2010	10:36:40 PM	Bypass valve opened
8/6/2010	10:36:40 PM	Helium MFC set to  100.000000
8/6/2010	10:36:40 PM	H2 MFC set to  0.000000
8/6/2010	10:36:40 PM	BCl3 MFC set to  0.000000
8/6/2010	10:36:40 PM	PHl3 MFC set to  0.000000
8/6/2010	10:36:40 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:36:40 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:36:40 PM	Tube furnace set to 0
8/6/2010	10:36:41 PM	Helium valve closed
8/6/2010	10:36:41 PM	H2 valve closed
8/6/2010	10:36:41 PM	BCl3 valve closed
8/6/2010	10:36:41 PM	PH3 valve closed
8/6/2010	10:36:41 PM	SiCl4 pre valve closed
8/6/2010	10:36:41 PM	SiCl4 post valve closed
8/6/2010	10:36:41 PM	Bubbler valve closed
8/6/2010	10:36:41 PM	Main Vac valve opened
8/6/2010	10:36:41 PM	Bypass valve opened
8/6/2010	10:36:41 PM	Helium MFC set to  0.000000
8/6/2010	10:36:41 PM	H2 MFC set to  0.000000
8/6/2010	10:36:41 PM	BCl3 MFC set to  0.000000
8/6/2010	10:36:41 PM	PHl3 MFC set to  0.000000
8/6/2010	10:36:41 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:36:41 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:36:41 PM	Tube furnace set to 0
8/6/2010	10:36:42 PM	Run finished at 10:36 PM
8/6/2010	10:36:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/6/2010	10:54:19 PM	Recipe started at 10:54 PM
8/6/2010	10:54:19 PM	Helium valve closed
8/6/2010	10:54:19 PM	BCl3 valve closed
8/6/2010	10:54:19 PM	PH3 valve closed
8/6/2010	10:54:19 PM	SiCl4 pre valve closed
8/6/2010	10:54:19 PM	SiCl4 post valve closed
8/6/2010	10:54:19 PM	Main Vac valve closed
8/6/2010	10:54:19 PM	Bypass valve closed
8/6/2010	10:54:19 PM	Bubbler valve closed
8/6/2010	10:54:19 PM	H2 valve opened
8/6/2010	10:54:19 PM	Helium MFC set to  0.000000
8/6/2010	10:54:19 PM	H2 MFC set to  500.000000
8/6/2010	10:54:19 PM	BCl3 MFC set to  0.000000
8/6/2010	10:54:19 PM	PHl3 MFC set to  0.000000
8/6/2010	10:54:19 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:54:19 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:54:19 PM	Tube furnace set to 0
8/6/2010	10:54:20 PM	Helium valve closed
8/6/2010	10:54:20 PM	BCl3 valve closed
8/6/2010	10:54:20 PM	PH3 valve closed
8/6/2010	10:54:20 PM	SiCl4 pre valve closed
8/6/2010	10:54:20 PM	SiCl4 post valve closed
8/6/2010	10:54:20 PM	Main Vac valve closed
8/6/2010	10:54:20 PM	Bypass valve closed
8/6/2010	10:54:20 PM	Bubbler valve closed
8/6/2010	10:54:20 PM	H2 valve opened
8/6/2010	10:54:20 PM	Helium MFC set to  0.000000
8/6/2010	10:54:20 PM	H2 MFC set to  500.000000
8/6/2010	10:54:20 PM	BCl3 MFC set to  0.000000
8/6/2010	10:54:20 PM	PHl3 MFC set to  0.000000
8/6/2010	10:54:20 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:54:20 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:54:20 PM	Tube furnace set to 1000
8/6/2010	10:54:20 PM	Helium valve closed
8/6/2010	10:54:20 PM	H2 valve closed
8/6/2010	10:54:20 PM	BCl3 valve closed
8/6/2010	10:54:20 PM	PH3 valve closed
8/6/2010	10:54:20 PM	SiCl4 pre valve closed
8/6/2010	10:54:20 PM	SiCl4 post valve closed
8/6/2010	10:54:20 PM	Main Vac valve closed
8/6/2010	10:54:20 PM	Bubbler valve closed
8/6/2010	10:54:20 PM	Bypass valve closed
8/6/2010	10:54:20 PM	Helium MFC set to  0.000000
8/6/2010	10:54:20 PM	H2 MFC set to  0.000000
8/6/2010	10:54:20 PM	BCl3 MFC set to  0.000000
8/6/2010	10:54:20 PM	PHl3 MFC set to  0.000000
8/6/2010	10:54:20 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:54:20 PM	Bypass solenoid MFC set to  760.000000
8/6/2010	10:54:20 PM	Tube furnace set to 0
8/6/2010	10:54:20 PM	Baratron reads 5.301319 Torr and NaOH valve is open.  Emergency exit.
8/6/2010	10:54:24 PM	Run aborted at 10:54 PM
8/6/2010	10:54:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	10:54:32 PM	Recipe started at 10:54 PM
8/6/2010	10:54:32 PM	Helium valve closed
8/6/2010	10:54:32 PM	H2 valve closed
8/6/2010	10:54:32 PM	BCl3 valve closed
8/6/2010	10:54:32 PM	PH3 valve closed
8/6/2010	10:54:32 PM	SiCl4 pre valve closed
8/6/2010	10:54:32 PM	SiCl4 post valve closed
8/6/2010	10:54:32 PM	Main Vac valve closed
8/6/2010	10:54:32 PM	Bubbler valve closed
8/6/2010	10:54:32 PM	Bypass valve opened
8/6/2010	10:54:32 PM	Helium MFC set to  0.000000
8/6/2010	10:54:32 PM	H2 MFC set to  0.000000
8/6/2010	10:54:32 PM	BCl3 MFC set to  0.000000
8/6/2010	10:54:32 PM	PHl3 MFC set to  0.000000
8/6/2010	10:54:32 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:54:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:54:32 PM	Tube furnace set to 0
8/6/2010	10:54:32 PM	Helium valve closed
8/6/2010	10:54:32 PM	H2 valve closed
8/6/2010	10:54:32 PM	BCl3 valve closed
8/6/2010	10:54:32 PM	PH3 valve closed
8/6/2010	10:54:32 PM	SiCl4 pre valve closed
8/6/2010	10:54:32 PM	SiCl4 post valve closed
8/6/2010	10:54:32 PM	Bubbler valve closed
8/6/2010	10:54:32 PM	Main Vac valve opened
8/6/2010	10:54:32 PM	Bypass valve opened
8/6/2010	10:54:32 PM	Helium MFC set to  0.000000
8/6/2010	10:54:32 PM	H2 MFC set to  0.000000
8/6/2010	10:54:32 PM	BCl3 MFC set to  0.000000
8/6/2010	10:54:32 PM	PHl3 MFC set to  0.000000
8/6/2010	10:54:32 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:54:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:54:33 PM	Tube furnace set to 0
8/6/2010	10:54:33 PM	Run finished at 10:54 PM
8/6/2010	10:54:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	10:55:37 PM	Recipe started at 10:55 PM
8/6/2010	10:55:37 PM	Helium valve closed
8/6/2010	10:55:37 PM	BCl3 valve closed
8/6/2010	10:55:37 PM	PH3 valve closed
8/6/2010	10:55:37 PM	SiCl4 pre valve closed
8/6/2010	10:55:37 PM	SiCl4 post valve closed
8/6/2010	10:55:37 PM	Main Vac valve closed
8/6/2010	10:55:37 PM	Bypass valve closed
8/6/2010	10:55:37 PM	Bubbler valve closed
8/6/2010	10:55:37 PM	H2 valve opened
8/6/2010	10:55:37 PM	Helium MFC set to  0.000000
8/6/2010	10:55:37 PM	H2 MFC set to  500.000000
8/6/2010	10:55:37 PM	BCl3 MFC set to  0.000000
8/6/2010	10:55:37 PM	PHl3 MFC set to  0.000000
8/6/2010	10:55:37 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:55:37 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:55:37 PM	Tube furnace set to 0
8/6/2010	10:56:58 PM	Helium valve closed
8/6/2010	10:56:58 PM	BCl3 valve closed
8/6/2010	10:56:58 PM	PH3 valve closed
8/6/2010	10:56:58 PM	SiCl4 pre valve closed
8/6/2010	10:56:58 PM	SiCl4 post valve closed
8/6/2010	10:56:58 PM	Main Vac valve closed
8/6/2010	10:56:58 PM	Bypass valve closed
8/6/2010	10:56:58 PM	H2 valve opened
8/6/2010	10:56:58 PM	Bubbler valve opened
8/6/2010	10:56:58 PM	Helium MFC set to  0.000000
8/6/2010	10:56:58 PM	H2 MFC set to  500.000000
8/6/2010	10:56:58 PM	BCl3 MFC set to  0.000000
8/6/2010	10:56:58 PM	PHl3 MFC set to  0.000000
8/6/2010	10:56:58 PM	SiCl4 MFC set to  0.000000
8/6/2010	10:56:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	10:56:58 PM	Tube furnace set to 1000
8/6/2010	11:16:58 PM	Helium valve closed
8/6/2010	11:16:58 PM	PH3 valve closed
8/6/2010	11:16:58 PM	Main Vac valve closed
8/6/2010	11:16:58 PM	Bypass valve closed
8/6/2010	11:16:58 PM	H2 valve opened
8/6/2010	11:16:58 PM	BCl3 valve opened
8/6/2010	11:16:58 PM	SiCl4 pre valve opened
8/6/2010	11:16:58 PM	SiCl4 post valve opened
8/6/2010	11:16:58 PM	Bubbler valve opened
8/6/2010	11:16:58 PM	Helium MFC set to  0.000000
8/6/2010	11:16:58 PM	H2 MFC set to  500.000000
8/6/2010	11:16:58 PM	BCl3 MFC set to  6.000000
8/6/2010	11:16:58 PM	PHl3 MFC set to  0.000000
8/6/2010	11:16:58 PM	SiCl4 MFC set to  50.000000
8/6/2010	11:16:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:16:58 PM	Tube furnace set to 1000
8/6/2010	11:36:58 PM	H2 valve closed
8/6/2010	11:36:58 PM	BCl3 valve closed
8/6/2010	11:36:58 PM	PH3 valve closed
8/6/2010	11:36:58 PM	SiCl4 pre valve closed
8/6/2010	11:36:58 PM	SiCl4 post valve closed
8/6/2010	11:36:58 PM	Main Vac valve closed
8/6/2010	11:36:58 PM	Bypass valve closed
8/6/2010	11:36:58 PM	Helium valve opened
8/6/2010	11:36:58 PM	Bubbler valve opened
8/6/2010	11:36:58 PM	Helium MFC set to  500.000000
8/6/2010	11:36:58 PM	H2 MFC set to  0.000000
8/6/2010	11:36:58 PM	BCl3 MFC set to  0.000000
8/6/2010	11:36:58 PM	PHl3 MFC set to  0.000000
8/6/2010	11:36:58 PM	SiCl4 MFC set to  0.000000
8/6/2010	11:36:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:36:58 PM	Tube furnace set to 0
8/6/2010	11:55:52 PM	Helium valve closed
8/6/2010	11:55:52 PM	H2 valve closed
8/6/2010	11:55:52 PM	BCl3 valve closed
8/6/2010	11:55:52 PM	PH3 valve closed
8/6/2010	11:55:52 PM	SiCl4 pre valve closed
8/6/2010	11:55:52 PM	SiCl4 post valve closed
8/6/2010	11:55:52 PM	Main Vac valve closed
8/6/2010	11:55:52 PM	Bubbler valve closed
8/6/2010	11:55:52 PM	Bypass valve closed
8/6/2010	11:55:52 PM	Helium MFC set to  0.000000
8/6/2010	11:55:52 PM	H2 MFC set to  0.000000
8/6/2010	11:55:52 PM	BCl3 MFC set to  0.000000
8/6/2010	11:55:52 PM	PHl3 MFC set to  0.000000
8/6/2010	11:55:52 PM	SiCl4 MFC set to  0.000000
8/6/2010	11:55:52 PM	Bypass solenoid MFC set to  760.000000
8/6/2010	11:55:52 PM	Tube furnace set to 0
8/6/2010	11:55:52 PM	Baratron reads 747.443289 Torr and NaOH valve is open.  Emergency exit.
8/6/2010	11:57:19 PM	Run aborted at 11:57 PM
8/6/2010	11:57:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2010	11:57:22 PM	Recipe started at 11:57 PM
8/6/2010	11:57:22 PM	Helium valve closed
8/6/2010	11:57:22 PM	H2 valve closed
8/6/2010	11:57:22 PM	BCl3 valve closed
8/6/2010	11:57:22 PM	PH3 valve closed
8/6/2010	11:57:22 PM	SiCl4 pre valve closed
8/6/2010	11:57:22 PM	SiCl4 post valve closed
8/6/2010	11:57:22 PM	Main Vac valve closed
8/6/2010	11:57:22 PM	Bubbler valve closed
8/6/2010	11:57:22 PM	Bypass valve opened
8/6/2010	11:57:22 PM	Helium MFC set to  0.000000
8/6/2010	11:57:22 PM	H2 MFC set to  0.000000
8/6/2010	11:57:22 PM	BCl3 MFC set to  0.000000
8/6/2010	11:57:22 PM	PHl3 MFC set to  0.000000
8/6/2010	11:57:22 PM	SiCl4 MFC set to  0.000000
8/6/2010	11:57:22 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:57:22 PM	Tube furnace set to 0
8/6/2010	11:57:57 PM	Helium valve closed
8/6/2010	11:57:57 PM	H2 valve closed
8/6/2010	11:57:57 PM	BCl3 valve closed
8/6/2010	11:57:57 PM	PH3 valve closed
8/6/2010	11:57:57 PM	SiCl4 pre valve closed
8/6/2010	11:57:57 PM	SiCl4 post valve closed
8/6/2010	11:57:57 PM	Bubbler valve closed
8/6/2010	11:57:57 PM	Main Vac valve opened
8/6/2010	11:57:57 PM	Bypass valve opened
8/6/2010	11:57:57 PM	Helium MFC set to  0.000000
8/6/2010	11:57:57 PM	H2 MFC set to  0.000000
8/6/2010	11:57:57 PM	BCl3 MFC set to  0.000000
8/6/2010	11:57:57 PM	PHl3 MFC set to  0.000000
8/6/2010	11:57:57 PM	SiCl4 MFC set to  0.000000
8/6/2010	11:57:57 PM	Bypass solenoid MFC set to  0.000000
8/6/2010	11:57:57 PM	Tube furnace set to 0
8/6/2010	11:57:57 PM	Run finished at 11:57 PM
8/6/2010	11:57:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
